基于透反式二维绝对零位光栅的光刻对准技术

在二维零位光栅原理的基础上提出了一种透反式二维零位光栅系统,从理论上分析了系统的可行性,并进行了对准性能的试验.实验数据表明透反式光栅系统比一般的光刻对准技术的对比度更强,判别零位的性能更好.该系统作为一种新型的掩模-硅片对准技术,应用于光刻机中可获得优于20 nm的定位对准精度.     

压印光刻对准中阻蚀胶层的设计及优化

针对高速旋涂造成标记区阻蚀胶薄膜覆盖不对称和压印曝光造成标记区薄膜聚合的问题，利用压印光刻压印曝光固化脱模的工艺原理，提出了用压印预处理标记表面薄膜来优化阻蚀胶层厚度和形貌的工艺方法．该方法采用下压力约束薄膜，使阻蚀胶在标记区的栅格间重新分布，从而削弱了覆盖膜的不对称性，获得了相应的薄膜厚度．采用旋涂厚度为1．1μm的覆盖膜对压印预处理工艺方法进行了试验，发现下压力大于0．48MPa时，薄膜结构具有较好的对称性，下压力为1．12MPa时，对准信号的对比度达到最大．试验结果表明，压印预处理对于压印光刻系统具有较好的工艺适应性，利用该方法优化标记区的阻蚀胶层不仅能够有效削弱覆盖膜不对称和压印曝光的影响，而且对准精度可满足100nm压印光刻的要求．     

光刻机镜头的结构设计与装配

介绍工作波长为193am的投影光刻物镜的研制，时结构型式的确定和材料的选择以及加工装配工艺进行充分考虑，提出投影光刻物镜结构设计和装配方法．本文研制的镜头在光刻机中获得了广泛应用．     

光刻机镜头的结构设计与装配

介绍工作波长为193nm的投影光刻物镜的研制,对结构型式的确定和材料的选择以及加工装配工艺进行充分考虑,提出投影光刻物镜结构设计和装配方法.本文研制的镜头在光刻机中获得了广泛应用.     

硅片力学行为与表面损伤

研究了硅片力学行为与表面损伤的关系．结果表明，Ｍ２０金刚砂研磨使硅片表面产生损伤和微小裂纹，研磨硅片在常温工艺中容易破碎，机械强度较低；在高温工艺中容易弯曲或翘曲，抗形变能力差．研磨后化腐３０μｍ左右可使强度提高１倍多，达到材质固有强度，高温弯曲度变化降到磨片的１／４～１／３．研磨片表面７～８μｍ的微腐也可使强度提高到材质强度的７０％～８０％，弯曲度变化降到磨片的１／２～２／３．     

压印光刻中高精度莫尔对准方法的研究

针对分步压印光刻工艺中多层套刻的高精度对准问题,提出一种应用斜纹结构光栅副实现x、y、θ三自由度自动对准的方法.光栅副分为4个区域,应用光电转换器阵列检测光栅副相对移动所引起的莫尔信号变化,通过电路系统处理可同时得到在平面x、y、θ三自由度的对准信号.驱动环节采用直线电机和压电驱动器作为宏微两级驱动,其分辨率分别为0.2μm和0.1nm,在激光干涉仪全程监测下,与控制系统一起构成闭环系统实现自动对准定位.实验结果表明,在多层压印光刻工艺中,实现了压印工作台步进精度小于10nm的高精度定位要求,使整个对准系统的套刻精度小于30nm.因此,应用这种莫尔对准方法可以获得较高的对准精度,同时能够满足压印100nm特征尺寸套刻精度的要求.     

用于三维封装的多层芯片键合对准技术

采用离心力使硅片直角边与模具凹槽直角边贴紧对准的思想,提出了一种用于三维系统封装的多芯片对准技术.基于该技术原理制作了对准装置,并实现了多芯片一次性对准键合(6层芯片).具体过程包括:加工带方形凹槽的模具;将芯片切割为形状一致的方形,并保证边缘整齐;将芯片置入凹槽并旋转模具,对准后停止旋转并夹紧固定堆叠芯片;将固定后的芯片转移至键合腔内实现键合,试验测试键合后对准误差为4μm.具体分析了影响多层芯片对准精度的因素,并提出了优化方案,论证了离心对准技术的可行性.     

借助光刻成像仿真软件的μDBO穿线套刻标记

在光刻机的对准、曝光和量测等过程中，存在量程范围小，测量精度要求极高的套刻标记。这些套刻标记在实现特定功能的同时，会受到多种误差的影响，比如标记线宽与设计差异、标记线条边缘粗糙度、标记边缘效应等。该文旨在解决光刻套刻量测领域中的问题，特别是针对业界常用的微型衍射套刻(micro diffraction-based overlay,μDBO)标记，通过对穿线套刻情形进行量测过程的仿真研究，提出了一种借助光刻成像仿真软件进行标记量测结果仿真的方法。该文运用自制代码的DrM软件和商业仿真软件HyperLith作为工具，两者的仿真结果均定性还原了实验中探测到的特殊亮暗线现象，验证了该方法用于量测仿真的可行性。此外，该文还对匹配实验仪器的穿线套刻μDBO标记设计、照明波长、照明配置和待测信号区域等参数进行仿真优化，输出了基于目前实验配置的优化标记与方案。     

压印光刻中模具空间位姿的识别及仿真

在纳米压印光刻中,为了减小模具与晶片的平行度误差,将精对正光栅标记的相对误差校正到半栅距范围之内,并建立了点光源映射的数学模型,对模具空间位姿的投影进行图像识别.在算法设计的基础上,建立了纳米压印光刻系统中的粗对正系统及其控制流程,通过仿真计算,可以将模型的转角计算精度控制在10-6rad以下,位置偏移量计算精度控制在1 nm以下,所建立的粗对正系统的检测精度可达到1μm以下,因此满足了压印光刻中下一步精对正系统的要求.     

硅单电子晶体管制备及特性

采用电子束光刻技术和反应离子刻蚀等工艺，在P型SIMOX硅片上成功地制备了一种单电子晶体管。提供了一种制备量子线和量子点的工艺方法，在器件的电流，电压特性上可观测到明显的库仑阻塞效应和单子隧穿效应，该器件的工作温度可达到77K。     

An Index mechanism for multi-scale view in spatial databases

There are numerous geometric objects stored in the spatial databases. An importance function in a spatial database is that users can browse the geometric objects as a map efficiently. Thus the spatial database should display the geometric objects users concern about swiftly onto the display window. This process includes two operations:retrieve data from database and then draw them onto screen. Accordingly, to improve the efficiency, we should try to reduce time of both retrieving object and displaying them. The former can be achieved with the aid of spatial index such as R-tree, the latter require to simplify the objects. Simplification means that objects are shown with sufficient but not with unnecessary detail which depend on the scale of browse. So the major problem is how to retrieve data at different detail level efficiently. This paper introduces the implementation of a multi-scale index in the spatial database SISP (Spatial Information Shared Platform) which is generalized from R-tree. The difference between the generalization and the R-tree lies on two facets: One is that every node and geometric object in the generalization is assigned with a importance value which denote the importance of them, and every vertex in the objects are assigned with a importance value,too. The importance value can be use to decide which data should be retrieve from disk in a query. The other difference is that geometric objects in the generalization are divided into one or more sub-blocks, and vertexes are total ordered by their importance value. With the help of the generalized R-tree, one can easily retrieve data at different detail levels.Some experiments are performed on real-life data to evaluate the performance of solutions that separately use normal spatial index and multi-scale spatial index. The results show that the solution using multi-scale index in SISP is satisfying.     

Characterization of Ordovician carbonate reservoirs, southeastern Saskatchewan, Canada

The discovery of the prolific Ordovician Red River reservoirs in 1995 in southeastern Saskatchewan was the catalyst for extensive exploration activity which resulted in the discovery of more than 15 new Red River pools. The best yields of Red River production to date have been from dolomite reservoirs. Understanding the processes of dolomitization is, therefore, crucial for the prediction of the connectivity, spatial distribution and heterogeneity of dolomite reservoirs.The Red River reservoirs in the Midale area consist of 3～4 thin dolomitized zones, with a total thickness of about 20 m, which occur at the top of the Yeoman Formation. Two types of replacement dolomite were recognized in the Red River reservoir: dolomitized burrow infills and dolomitized host matrix. The spatial distribution of dolomite suggests that burrowing organisms played an important role in facilitating the fluid flow in the backfilled sediments. This resulted in penecontemporaneous dolomitization of burrow infills by normal seawater. The dolomite in the host matrix is interpreted as having occurred at shallow burial by evaporitic seawater during precipitation of Lake Almar anhydrite that immediately overlies the Yeoman Formation. However, the low δ18O values of dolomited burrow infills (-5.9‰～ -7.8‰, PDB) and matrix dolomites (-6.6‰～ -8.1‰, avg. -7.4‰ PDB) compared to the estimated values for the late Ordovician marine dolomite could be attributed to modification and alteration of dolomite at higher temperatures during deeper burial, which could also be responsible for its 87Sr/86Sr ratios (0.7084～0.7088) that are higher than suggested for the late Ordovician seawaters (0.7078～0.7080). The trace amounts of saddle dolomite cement in the Red River carbonates are probably related to "cannibalization" of earlier replacement dolomite during the chemical compaction.     

A computer generator for randomly layered structures

AcomputergeneratorforrandomlylayeredstructuresYUJia shun1,2,HEZhen hua2(1.TheInstituteofGeologicalandNuclearSciences,NewZealand;2.StateKeyLaboratoryofOilandGasReservoirGeologyandExploitation,ChengduUniversityofTechnology,China)Abstract:Analgorithmisintrod…     

Perspherical Approaches for Electrons in Atoms and Charged Excitons in Quantum Wells

Instead of following Fock’s expansion,we solve the Schrodinger equation for some quantum mechanical manybody systems such as electrons in atoms and charged excitons in quantum wells in a similar way in hyperspherical coordinates by expanding the wave functions into orthonormal complete basis sets of the hyperspherical hannonics(HHs)of hyperangles and generalized Laguerre polynomials(GLPs)of the hyperradius.This leads the equation to     

Advances in broadband wireless communications under high-mobility scenarios

Future mobile communication systems aim at providing very high data transmission rates, even in high-mobility scenarios such as high-speed wheel-track trains, maglev trains, highway vehicles, airplanes, guided missiles or spacecraft. A particularly important commercial application is the strong and increasing worldwide demand for high- speed broadband wireless communications （up to 574.8 km/ h test speeds or 380 km/h commercial speeds） in railways, providing data, voice and video services for applications such as onboard entertainment services to passengers, train control, train dispatch, train sensor status handling and sur- veillance. In such high-mobility scenarios, there are a number of communication challenges, including fast hand- over, location updating, high-speed channel modeling, estimation and equalization, anti-Doppler spreading tech- niques, fast power control, and dedicated network architec- ture. Because signal transmission in very high-speed scenarios will inevitably experience serious deterioration, it is imperative to develop key broadband mobile communi- cation techniques for such high-speed vehicles.     

Wuhan University Journal of Natural Sciences TOTAL CONTENTS

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海南岛地体及其毗邻陆缘晚中生代—新生代古地磁研究和构造演化

本文叙述了对海南岛及其毗邻大陆边缘白垩纪到第四纪地层岩石进行古地磁研究的全部工作过程。通过分析岩石中剩余磁矢量的磁偏角及磁倾角的变化,提出海南岛白垩纪以来经历的构造演化模式如下:早期伴随顺时针旋转而向南迁移,后期伴随逆时针转动并向北运移。联系该地区及邻区的地质、地球物理资料,对海南岛上述的构造地体运动提出以下认识:北部湾内早期有一拉张作用,主要是该作用使湾内地壳显著伸长减薄,形成北部湾盆地。从而导致了海南岛的早期构造运动,而海南岛后期的构造运动则主要是受南海海底扩张的影响。海南地体运动规律的阐明对于了解北部湾油气盆地的形成演化有重要的理论和实际意义。     

Scale-based spatial data model for GIS

Being the primary media of geographical information and the elementary objects manipulated, almost all of maps adopt the layer-based model to represent geographic information in the existent GIS. However, it is difficult to extend the map represented in layer-based model. Furthermore, in Web-Based GIS, It is slow to transmit the spatial data for map viewing. In this paper, for solving the questions above, we have proposed a new method for representing the spatial data. That is scale-based model. In this model we represent maps in three levels: scale-view, block, and spatial object, and organize the maps in a set of map layers, named Scale-View, which associates some given scales.Lastly, a prototype Web-Based GIS using the proposed spatial data representation is described briefly.     

Exciton Seebeck in Molecular Systems

Various applications relevant to the exciton dynamics,such as the organic solar cell,the large-area organic light-emitting diodes and the thermoelectricity,are operating under temperature gradient.The potential abnormal behavior of the exicton dynamics driven by the temperature difference may affect the efficiency and performance of the corresponding devices.In the above situations,the exciton dynamics under temperature difference is mixed with     

Achieving Unusual States of Matter Under High Pressure

The elongation method,originally proposed by Imamura was further developed for many years in our group.As a method towards O(N)with high efficiency and high accuracy for any dimensional systems.This treatment designed for one-dimensional(ID)polymers is now available for three-dimensional(3D)systems,but geometry optimization is now possible only for 1D-systems.As an approach toward post-Hartree-Fock,it was also extended to