紫外光固化中阻蚀胶薄膜应力分析及成膜控制

针对压印光刻工艺实现图章保真复型对阻蚀胶薄膜的均匀度和应力分布的要求，对匀胶过程中的时间、转速和加速度等参数进行了分析，并采用基片曲率法的Stoney公式及其近似计算公式，对不同参数环境下的薄膜应力及应力梯度分布作了计算分析．通过对比几组试验参数的应力分析结果，验证了薄膜应力的大小和应力梯度的分布主要与匀胶时间和速度有关，而与加速度的关系较小．因此，当选用匀胶转速为5000r／min、时间为30s时，薄膜应力分布最优，成膜质量最佳，能够满足压印光刻工艺中300nm级图型的保真复型需求．     

紫外压印光刻中阻蚀胶残膜刻蚀工艺

针对紫外（UV）压印光刻在压印工艺过程中会产生阻蚀胶残膜的技术特点，采用以O2为反应气体来清除阻蚀胶残膜的反应离子刻蚀（RIE）工艺方法，研究了不同的反应气体流量、反应腔室压力、射频功率等刻蚀参数对刻蚀速率和刻蚀各向异性的影响，得到了刻蚀速率和刻蚀各向异性随各刻蚀参数的变化趋势图．实验结果表明，减小反应气体压力和气体流速可以降低刻蚀速率，提高刻蚀各向异性．通过对刻蚀参数的优化配置，当射频功率在200W、反应气体流速在30mL／min、反应腔室压力为0．6Pa时，刻蚀速率可以稳定在265nm／min，各向异性值可以达到13，因此实现了对压印图质形的高质量转移．     

有机LED聚合物薄膜的制备工艺研究

采用两次重复的2^3析因实验设计，应用方差分析方法，研究了旋涂工艺中聚合物溶液的浓度，匀胶机的旋涂速度和加速度对旋涂的薄膜厚度和薄膜均匀性的影响。实验和分析的结果表明：溶液浓度和和旋涂速度对膜厚和薄膜均匀具有显著性的影响，而旋涂加速度对它们的影响则不显著。这一结论对于制备优质薄膜、改善聚合物发光器件性能具有重要的指导作用。     

高保真度五步加载纳米压印光刻的研究

从理论上建立了压印光刻工艺中留膜厚度与压印力的关系，为压印预设曲线的建立提供了理论依据。基于液态光敏抗蚀剂在紫外光照射下发生光固化反应这一特性，对固化过程进行了详细的分析，建立了抗蚀剂的固化深度与紫外光曝光量之间的关系。在分析了现有压印工艺存在的问题后，提出了一个全新的压印工艺：高保真度固化压印，即包括特征转移-抗蚀剂减薄-脱模回弹力释放-保压光固化-脱模等压印过程。实验结果表明，高保真度固化压印过程与加载路线能实现复杂图形特征的复制，从而保证了压印图形的保真度，并可保证图形复制的一致性及适度留膜厚度，压印图形的分辨率可达100nm。     

光刻图形转移技术

通过对预烘、光刻胶旋涂、软烘焙、对准曝光、后烘、显影、坚膜的光刻工艺过程分析,主要介绍了光刻工艺中容易出现的问题及解决方法,并通过实验和分析得出了可靠的技术方案.     

冷压印光刻中高分辨率抗蚀剂的研究

在集成电路的冷压印光刻中，为了获得高分辨率抗蚀剂，着重对溶剂挥发固化型、化学交联固化型和紫外光照交联固化型材料，从复形分辨率、涂铺均匀性、脱模性、流动性、物理粘度、刻蚀比率、固化速度、固化方式和固化收缩率等方面进行了分析和研究。经过对比，得出低粘度光固化树脂具有薄膜厚度容易控制且均匀(误差为O．3％)、固化速度快(小于O．2min)和固化收缩率小(3％)等特性，其对冷压印光刻工艺的匹配性明显优于溶剂挥发固化型和化学交联固化型材料。因此，最终决定采用低粘度光固化树脂作为冷压印光刻工艺中的抗蚀剂。     

红外微腔探测器中金属支撑柱的制备工艺研究

基于一般正胶光刻工艺的剥离工艺,所需胶膜的厚度要大大超过剥离薄膜的厚度,这样在剥离线宽小、厚度大的微腔结构探测器的金属互连柱图形时就会存在光刻分辨率低、剥离难的问题.本文重点研究了基于AZ5214E光刻胶图像反转性能的剥离工艺,对图像反转光刻所特有的反转烘、掩模曝光、泛曝光工艺条件进行了详细的对比实验.结果表明:当反转烘温度为96～98℃,第一次掩模曝光时间和泛曝光时间分别为8.1 s、8.4 s时,可以得到较好的光刻图形.通过电子束蒸发Ti,成功剥离出高2.40μm、面积3.0 μm×3.0 μm的Ti微互连柱.此工艺的优点在于分辨率高,胶膜与剥离薄膜的厚度比接近1时,也能剥离出所要图形,可以用于制备MEMS微腔器件中的微互连柱.     

7740玻璃湿法腐蚀凹槽及槽内光刻图形的研究

用玻璃腐蚀工艺制作MEMS器件，腐蚀非常困难．通过对PYREX7740玻璃在Buffer溶液中腐蚀速率的研究发现，PYREX7740玻璃腐蚀1μm的槽需要25min．而作为掩膜的光刻胶在腐蚀液中只能保持10min不浮胶．为此，中详细介绍了运用一次光刻．多次坚膜．多次腐蚀的工艺．来达到对PYREX7740玻璃进行深腐蚀的方法．实验结果表明．光刻胶厚度、坚膜时间、坚膜次数和坚膜温度都与光刻胶的浮胶有关．最后给出了不同条件下凹槽深度与所需的曝光和显影时间的关系，槽越深需要的曝光和显影时间越长，这对于用PYREX7740玻璃制作MEMS器件具有重要意义。     

基于微压印成形的三维微电子机械系统制造新工艺

针对目前微电子机械系统(MEMS)制造中存在的三维加工能力不足的问题,将压印光刻技术和分层制造原理相结合,研究了三维MEMS制造的新工艺.采用视频图像原理构建了多层压印的对正系统,对正精度达到2μm.通过降低黏度和固化收缩率,兼顾弹性和固化速度,开发了适用于微压印工艺的高分辨率抗蚀剂材料,并进行了匀胶、压印和脱模工艺的优化实验.通过原子力显微镜对压印结果进行了分析,分析结果表明,图形从模具到抗蚀剂的转移误差小于8%,具有制作复杂微结构的能力,同时也为MEMS的制作提供了一种高效低成本的新方法.     

纳米压印光刻技术的研究

研究了一种新型的纳米结构制作方法——纳米压印光刻技术,该工艺通过阻蚀剂的物理变形而不是改变其化学特性来实现图形转移,其分辨率不受光波波长、物镜数值孔径等因素的限制,可突破传统光刻工艺的分辨率极限,论述了热压雕版压印工艺及其设备,实验表明,该工艺同时还具有高效率、低成本、大深宽比等优点。     

Markedness and its Interpretation in Language Use

Language markedness is a common phenomenon in languages, and is reflected from hearing, vision and sense, i.e. the variation in the three aspects such as phonology, morphology and semantics. This paper focuses on the interpretation of markedness in language use following the three perspectives, i.e. pragmatic interpretation, psychological interpretation and cognitive interpretation, with an aim to define the function of markedness.     

Lower Paleozoic oil relationships within Williston Basin, Canada

The Williston Basin is a significant petroleum province, containing oil production zones that include the Middle Cambrian to Lower Ordovician, Upper Ordovician, Middle Devonian, Upper Devonian and Mississippian and within the Jurassic and Cretaceous. The oils of the Williston Basin exhibit a wide range of geochemical characteristics defined as "oil families", although the geochemical signature of the Cambrian Deadwood Formation and Lower Ordovician Winnipeg reservoired oils does not match any "oil family". Despite their close stratigraphic proximity, it is evident that the oils of the Lower Palaeozoic within the Williston Basin are distinct. This suggests the presence of a new "oil family" within the Williston Basin. Diagnostic geochemical signatures occur in the gasoline range chromatograms, within saturate fraction gas chromatograms and biomarker fingerprints. However, some of the established criteria and cross-plots that are currently used to segregate oils into distinct genetic families within the basin do not always meet with success, particularly when applied to the Lower Palaeozoic oils of the Deadwood and Winnipeg Formation.     

An Analysis of Catherine＇s Character——Wuthering Heights

Wuthering Heights, Emily Bronte＇s only novel, was published in December of 1847 under the pseudonym Ellis Bell. The book did not gain immediate success, but it is now thought one of the finest novels in the English language. Catherine is the key character of this masterpiece, because everybody and everything center on her though she had a short life. We can understand this masterpiece better if we know Catherine well.     

Features of Women's language

Language is a means of verbal communication. People use language to communicate with each other. In the society, no two speakers are exactly alike in the way of speaking. Some differences are due to age, gender, statue and personality. Above all, gender is one of the obvious reasons. The writer of this paper tries to describe the features of women＇s language from these perspectives： pronunciation, intonation, diction, subjects, grammar and discourse. From the discussion of the features of women＇s language, more attention should be paid to language use in social context. What＇s more, the linguistic phenomena in a speaking community can be understood more thoroughly.     

Characterization of Ordovician carbonate reservoirs, southeastern Saskatchewan, Canada

The discovery of the prolific Ordovician Red River reservoirs in 1995 in southeastern Saskatchewan was the catalyst for extensive exploration activity which resulted in the discovery of more than 15 new Red River pools. The best yields of Red River production to date have been from dolomite reservoirs. Understanding the processes of dolomitization is, therefore, crucial for the prediction of the connectivity, spatial distribution and heterogeneity of dolomite reservoirs.The Red River reservoirs in the Midale area consist of 3～4 thin dolomitized zones, with a total thickness of about 20 m, which occur at the top of the Yeoman Formation. Two types of replacement dolomite were recognized in the Red River reservoir: dolomitized burrow infills and dolomitized host matrix. The spatial distribution of dolomite suggests that burrowing organisms played an important role in facilitating the fluid flow in the backfilled sediments. This resulted in penecontemporaneous dolomitization of burrow infills by normal seawater. The dolomite in the host matrix is interpreted as having occurred at shallow burial by evaporitic seawater during precipitation of Lake Almar anhydrite that immediately overlies the Yeoman Formation. However, the low δ18O values of dolomited burrow infills (-5.9‰～ -7.8‰, PDB) and matrix dolomites (-6.6‰～ -8.1‰, avg. -7.4‰ PDB) compared to the estimated values for the late Ordovician marine dolomite could be attributed to modification and alteration of dolomite at higher temperatures during deeper burial, which could also be responsible for its 87Sr/86Sr ratios (0.7084～0.7088) that are higher than suggested for the late Ordovician seawaters (0.7078～0.7080). The trace amounts of saddle dolomite cement in the Red River carbonates are probably related to "cannibalization" of earlier replacement dolomite during the chemical compaction.     

Design and analysis of generic LBS application developing platform

Location based services is promising due to its novel working style and contents.A software platform is proposed to provide application programs of typical location based services and support new applications developing efficiently. The analysis shows that this scheme is easy implemented, low cost and adapt to all kinds of mobile nework system.     

橡胶颗粒沥青混合料低温抗裂性试验研究

以AC-13级配为基础,将橡胶颗粒代替部分集料掺入混合料中,以低温弯曲试验为评价方法对不同橡胶颗粒掺量下沥青混合料的低温抗裂性进行研究,并引入应变能密度值对混合料的低温抗裂性进行综合评价.试验结果表明:橡胶颗粒沥青混合料试件的破坏微应变均超过2 300,满足冬寒区的技术指标;无论是否掺加橡胶颗粒,随着温度的下降,沥青混合料破坏时的最大弯拉强度增大,弯拉应变降低,劲度模量增大;弯曲应变能密度在胶粒掺量为1%左右时具有较大的弯曲应变能密度值,此时橡胶颗粒沥青混合料具有较好的低温抗裂性.     

低渗透非均质砂岩油藏启动压力梯度研究

理论推导与室内实验相结合,建立了低渗透非均质砂岩油藏启动压力梯度确定方法。首先借助油藏流场与电场相似的原理,推导了非均质砂岩油藏启动压力梯度计算公式。其次基于稳定流实验方法,建立了非均质砂岩油藏启动压力梯度测试方法。结果表明:低渗透非均质砂岩油藏的启动压力梯度确定遵循两个等效原则。平面非均质油藏的启动压力梯度等于各级渗透率段的启动压力梯度关于长度的加权平均;纵向非均质油藏的启动压力梯度等于各渗透率层的启动压力梯度关于渗透率与渗流面积乘积的加权平均。研究成果可用于有效指导低渗透非均质砂岩油藏的合理井距确定,促进该类油藏的高效开发。     

Quantitative trait loci （QTLs） for quality traits related to protein and starch in wheat

Quality traits in wheat （Triticum aestirum L.） were studied by quantitative trait locus （QTL） analysis in a recombinant inbred line （RIL） population, a set of 131 lines derived from Chuan 35050 × Shannong 483 cross （ChSh）. Grains from RILs were assayed for 21 quality traits related to protein and starch. A total of 35 putative QTLs for 19 traits with a single QTL explaining 7.99-40.52% of phenotypic variations were detected on 10 chromosomes, 1D, 2A, 2D, 3B, 3D, 5A, 6A, 6B, 6D, and 7B. The additive effects of 30 QTLs were positive, contributed by Chuan 35050, the remaining 5 QTLs were negative with the additive effect contributed by Shannong 483. For protein traits, 15 QTLs were obtained and most of them were located on chromosomes 1 D, 3B and 6D, while 20 QTLs for starch traits were detected and most of them were located on chromosomes 3D, 6B and 7B. Only 7 QTLs for protein and starch traits were co-located in three regions on chromosomes 1D, 2A and 2D. These protein and starch trait QTLs showed a distinct distribution pattern in certain regions and chromosomes. Twenty-two QTLs were clustered in 6 regions of 5 chromosomes. Two QTL clusters for protein traits were located on chromosomes 1D and 3B, respectively, three clusters for starch traits on chromosomes 3D, 6B and 7B, and one cluster including protein and starch traits on chromosome 1D.     

On Tragic Consciousness In The Works By Ernest Hemingway

As an American modern novelist who were famous in the literary world, Hemingway was not a person who always followed the trend but a sharp observer. At the same time, he was a tragedy maestro, he paid great attention on existence, fate and end-result. The dramatis personae's tragedy of his works was an extreme limit by all means tragedy on the meaning of fearless challenge that failed. The beauty of tragedy was not produced on the destruction of life, but now this kind of value was in the impact activity. They performed for the reader about the tragedy on challenging for the limit and the death.