首页 | 本学科首页   官方微博 | 高级检索  
相似文献
 共查询到20条相似文献,搜索用时 78 毫秒
1.
采用灯丝热解化学气相沉积方法,在不同的碳源气体气氛中合成金刚石薄膜,并研究不同工艺条件下的金刚石膜生长速率.结果表明,在较低的灯丝分解气体温度和较近的灯丝与衬底距离条件下,以丙酮为碳源气体合成的金刚石膜具有较高的生长速率和较好的质量.  相似文献   

2.
目前利用气相法得的金刚石薄膜多为晶膜,性能远不如天然金刚石,严重地影响了它在光学、电子学等方面的应用。因此,如何控制合成条件,实现金刚石薄膜的均匀定向生长是目前金刚石薄膜研究中急需解决的课题。本工作利用电子促进HFCVD技术成功的得到了织构生长的金刚石薄膜,研究了合成的优化工艺条件。实验中钨丝温度为2000℃,CH4/H2浓度0.4—2%,基片温度控制在750-900℃,基片与钨丝之间加偏压130V。对合成的薄膜用扫描电子显微镜(型号SEM1000B—2)观察薄膜的形貌。结果表明,当碳源浓度为的0.8%,基片温度为870℃时,晶粒晶形好,样品上金刚石颗粒已经连成了薄膜,每个晶粒顶部呈现和衬底平行的(100)面。CH4浓度高时,晶性变差,呈粗糙的球状多晶状。基片温度过低时晶形较差。温度过高因相变和气化不能成膜。基片温度在850℃-900℃范围内可连续成膜。加衬底偏压可以提高基底表面能和降低原子团界面自由能,因而可以促进成核。综上,我们利用偏压促进成核HFCVD技术,在优化工艺条件下得到了织构生长金刚石薄膜,为揭示其外延生长机理提供了实验数据  相似文献   

3.
在热丝CVD法生长金刚石膜的实验中,实验参数(包括灯丝温度、衬底温度、气体的碳氢比等等)对金刚石膜的生长起到了关键性的作用,它们的数值与金刚石膜的生长速率快慢与生长质量的高低密切相关。而且实验参数相互之间也有着密切的联系。  相似文献   

4.
本文介绍了在863新材料领域资助下最新研制成功的100kw级高功率直流等离子体喷射(DCPlasmaJet)金刚石膜沉积系统。利用该系统在氩气—氢气—甲烷气体系中进行了初步的工艺试验,经过40小时的连续运行,在Φ110mm的基片上沉积出中心厚1.9mm,边沿厚1.6mm的金刚石膜。平均生长速率达44μm/h。  相似文献   

5.
用热丝化学气相沉积设备研究了钢渗铬层、P-Si(100)基片和三氧化二铝基底表面形成的球形金刚石.研究结果表明:在不适合球形金刚石形成的工艺爷件下,在P-Si(100)基片和三氧化二铝表面沉积的晶形很好的金刚石膜中也存在球形金刚石团块(称为异常长大金刚石团块);首次使用金刚石“异常晶核”解释了异常长大金刚石团块的形成.球形金刚石膜由异常长大金刚石团块组成.异常长大金刚石团块的形成不但与沉积工艺参数有关,而且与CVD金刚石生长特性有关.  相似文献   

6.
陶瓷-金刚石膜复合材料在微电子技术中的应用前景   总被引:1,自引:0,他引:1  
微电子技术、微电路构装技术、功能材料与器件技术的发展,使器件与电路工作速度不断提高和单位体积内热耗散量大幅度增加.这要求封装基片和构装基板材料具有极高的热导率和较小的介电系数.金刚石热导率高,介电系数低,介电损耗低,热膨胀系数与单晶硅非常接近,是目前电子器件、电路和系统的最理想的封装基片和构装基板.用金刚石膜为基础的复合材料来制备高热导率和低介电常数的基片,是一种性能/价格比非常高的选择.本文综述陶瓷-金刚石膜复合材料在微电子技术中的应用前景.并介绍目前我们的研究现状.  相似文献   

7.
描述了用直流弧放电等离子体喷流CVD法来合成金刚石薄膜的过程。通过实验确定了金刚石生长的最佳条件。实验结果表明,金刚石薄膜的生长速率约为64μm/h。借助拉曼光谱证实了膜为金刚石膜,扫描电镜拍摄的照片清楚的显示了晶体的形状。  相似文献   

8.
主要介绍硼掺杂金刚石膜的生长.采用热灯丝CVD法在硅上制备金刚石薄膜,采用三氧化二硼制备硼掺杂金刚石膜.利用拉曼光谱分析硼掺杂金刚石膜的生长情况.结果表明:硼的掺杂质量分数随生长时间延长而增大;利用SEM观察硼掺杂金刚石膜的表面晶粒变小;利用银浆在掺杂金刚石膜表面制备电极,测试电流随温度升高而变大.  相似文献   

9.
气相法生长金刚石薄膜过程和热解CVD实验   总被引:1,自引:1,他引:0  
本文简述了气相法生长金刚石薄膜的基本过程,论述了反应气体系统及碳源浓度、激活源、基片温度和预处理等参数对金刚石结构和性能的重要影响.  相似文献   

10.
采用直流辉光等离子体辅助反应蒸发法在玻璃基片上沉积了锡掺杂的氧化铟锡(ITO)透明导电膜。在沉积过程中保持了辉光放电电流、氧分压、氧流量、蒸发速率等工艺参数不变,而基片温度由室温变化到达300℃。用四探针法测量了膜的方阻和用直流法测量了膜的霍尔系数,计算出膜的电阻率ρ、霍尔迁移率μ、载流子浓度n,从而研究了基片温度对膜的导电性能的影响。  相似文献   

11.
Language markedness is a common phenomenon in languages, and is reflected from hearing, vision and sense, i.e. the variation in the three aspects such as phonology, morphology and semantics. This paper focuses on the interpretation of markedness in language use following the three perspectives, i.e. pragmatic interpretation, psychological interpretation and cognitive interpretation, with an aim to define the function of markedness.  相似文献   

12.
何延凌 《科技信息》2008,(4):258-258
Language is a means of verbal communication. People use language to communicate with each other. In the society, no two speakers are exactly alike in the way of speaking. Some differences are due to age, gender, statue and personality. Above all, gender is one of the obvious reasons. The writer of this paper tries to describe the features of women's language from these perspectives: pronunciation, intonation, diction, subjects, grammar and discourse. From the discussion of the features of women's language, more attention should be paid to language use in social context. What's more, the linguistic phenomena in a speaking community can be understood more thoroughly.  相似文献   

13.
The discovery of the prolific Ordovician Red River reservoirs in 1995 in southeastern Saskatchewan was the catalyst for extensive exploration activity which resulted in the discovery of more than 15 new Red River pools. The best yields of Red River production to date have been from dolomite reservoirs. Understanding the processes of dolomitization is, therefore, crucial for the prediction of the connectivity, spatial distribution and heterogeneity of dolomite reservoirs.The Red River reservoirs in the Midale area consist of 3~4 thin dolomitized zones, with a total thickness of about 20 m, which occur at the top of the Yeoman Formation. Two types of replacement dolomite were recognized in the Red River reservoir: dolomitized burrow infills and dolomitized host matrix. The spatial distribution of dolomite suggests that burrowing organisms played an important role in facilitating the fluid flow in the backfilled sediments. This resulted in penecontemporaneous dolomitization of burrow infills by normal seawater. The dolomite in the host matrix is interpreted as having occurred at shallow burial by evaporitic seawater during precipitation of Lake Almar anhydrite that immediately overlies the Yeoman Formation. However, the low δ18O values of dolomited burrow infills (-5.9‰~ -7.8‰, PDB) and matrix dolomites (-6.6‰~ -8.1‰, avg. -7.4‰ PDB) compared to the estimated values for the late Ordovician marine dolomite could be attributed to modification and alteration of dolomite at higher temperatures during deeper burial, which could also be responsible for its 87Sr/86Sr ratios (0.7084~0.7088) that are higher than suggested for the late Ordovician seawaters (0.7078~0.7080). The trace amounts of saddle dolomite cement in the Red River carbonates are probably related to "cannibalization" of earlier replacement dolomite during the chemical compaction.  相似文献   

14.
理论推导与室内实验相结合,建立了低渗透非均质砂岩油藏启动压力梯度确定方法。首先借助油藏流场与电场相似的原理,推导了非均质砂岩油藏启动压力梯度计算公式。其次基于稳定流实验方法,建立了非均质砂岩油藏启动压力梯度测试方法。结果表明:低渗透非均质砂岩油藏的启动压力梯度确定遵循两个等效原则。平面非均质油藏的启动压力梯度等于各级渗透率段的启动压力梯度关于长度的加权平均;纵向非均质油藏的启动压力梯度等于各渗透率层的启动压力梯度关于渗透率与渗流面积乘积的加权平均。研究成果可用于有效指导低渗透非均质砂岩油藏的合理井距确定,促进该类油藏的高效开发。  相似文献   

15.
As an American modern novelist who were famous in the literary world, Hemingway was not a person who always followed the trend but a sharp observer. At the same time, he was a tragedy maestro, he paid great attention on existence, fate and end-result. The dramatis personae's tragedy of his works was an extreme limit by all means tragedy on the meaning of fearless challenge that failed. The beauty of tragedy was not produced on the destruction of life, but now this kind of value was in the impact activity. They performed for the reader about the tragedy on challenging for the limit and the death.  相似文献   

16.
AcomputergeneratorforrandomlylayeredstructuresYUJia shun1,2,HEZhen hua2(1.TheInstituteofGeologicalandNuclearSciences,NewZealand;2.StateKeyLaboratoryofOilandGasReservoirGeologyandExploitation,ChengduUniversityofTechnology,China)Abstract:Analgorithmisintrod…  相似文献   

17.
There are numerous geometric objects stored in the spatial databases. An importance function in a spatial database is that users can browse the geometric objects as a map efficiently. Thus the spatial database should display the geometric objects users concern about swiftly onto the display window. This process includes two operations:retrieve data from database and then draw them onto screen. Accordingly, to improve the efficiency, we should try to reduce time of both retrieving object and displaying them. The former can be achieved with the aid of spatial index such as R-tree, the latter require to simplify the objects. Simplification means that objects are shown with sufficient but not with unnecessary detail which depend on the scale of browse. So the major problem is how to retrieve data at different detail level efficiently. This paper introduces the implementation of a multi-scale index in the spatial database SISP (Spatial Information Shared Platform) which is generalized from R-tree. The difference between the generalization and the R-tree lies on two facets: One is that every node and geometric object in the generalization is assigned with a importance value which denote the importance of them, and every vertex in the objects are assigned with a importance value,too. The importance value can be use to decide which data should be retrieve from disk in a query. The other difference is that geometric objects in the generalization are divided into one or more sub-blocks, and vertexes are total ordered by their importance value. With the help of the generalized R-tree, one can easily retrieve data at different detail levels.Some experiments are performed on real-life data to evaluate the performance of solutions that separately use normal spatial index and multi-scale spatial index. The results show that the solution using multi-scale index in SISP is satisfying.  相似文献   

18.
In the 19th century the society was controlled by men, and women were just appendants of them, they had not any rights and freedom. But Jane was an exception, she showed some characteristics of early feminist. Jane showed her characteristics of feminism in three aspects: rebellion, equality, and independence. These characteristics were helpful to her success, and feminism is the only way out for women of that time.  相似文献   

19.
正The periodicity of the elements and the non-reactivity of the inner-shell electrons are two related principles of chemistry,rooted in the atomic shell structure.Within compounds,Group I elements,for example,invariably assume the+1 oxidation state,and their chemical properties differ completely from those of the p-block elements.These general rules govern our understanding of chemical structures and reactions.Using first principles calcula-  相似文献   

20.
We have developed an adiabatic connection to formulate the ground-state exchange-correlation energy in terms of pairing matrix linear fluctuations.This formulation of the exchange-correlation energy opens a new channel for density functional approximations based on the many-body perturbation theory.We illustrate the potential of such approaches with an approximation based on the particle-particle Random Phase Approximation(pp-RPA).This re-  相似文献   

设为首页 | 免责声明 | 关于勤云 | 加入收藏

Copyright©北京勤云科技发展有限公司  京ICP备09084417号