高保真度五步加载纳米压印光刻的研究

从理论上建立了压印光刻工艺中留膜厚度与压印力的关系，为压印预设曲线的建立提供了理论依据。基于液态光敏抗蚀剂在紫外光照射下发生光固化反应这一特性，对固化过程进行了详细的分析，建立了抗蚀剂的固化深度与紫外光曝光量之间的关系。在分析了现有压印工艺存在的问题后，提出了一个全新的压印工艺：高保真度固化压印，即包括特征转移-抗蚀剂减薄-脱模回弹力释放-保压光固化-脱模等压印过程。实验结果表明，高保真度固化压印过程与加载路线能实现复杂图形特征的复制，从而保证了压印图形的保真度，并可保证图形复制的一致性及适度留膜厚度，压印图形的分辨率可达100nm。     

微压印中抗蚀剂填充行为研究

为了提高微压印的质量,改进工艺参数优化模具结构,对微压印抗蚀剂的填充行为进行了数值计算和可视化实验研究。实验在三维离焦数字粒子图像测速系统中进行,由此提取了抗蚀剂中的荧光示踪粒子的坐标,通过时间解析算法获得了示踪粒子的三维粒子场,利用粒子跟踪测试技术获得了示踪粒子的速度场。数值模拟中采用了计算流体动力学软件,同时考虑了表面张力和接触角等因素,并根据模具特征划分了不同的压印区域,以分析、预测压印模型中的抗蚀剂填充行为。研究结果显示:数值模拟与实验结果吻合较好,抗蚀剂速度最大值在模具尖角与支撑基板之间,抗蚀剂速度水平方向上的实验最大误差为6.6%,竖直方向上的最大误差为9.6%;模具侧壁下方粒子运动轨迹的演化方向决定着抗蚀剂的体积转移方向和最终的填充形貌。该结果可为深入研究微压印中抗蚀剂流动提供参考。     

冷压印光刻中高分辨率抗蚀剂的研究

在集成电路的冷压印光刻中，为了获得高分辨率抗蚀剂，着重对溶剂挥发固化型、化学交联固化型和紫外光照交联固化型材料，从复形分辨率、涂铺均匀性、脱模性、流动性、物理粘度、刻蚀比率、固化速度、固化方式和固化收缩率等方面进行了分析和研究。经过对比，得出低粘度光固化树脂具有薄膜厚度容易控制且均匀(误差为O．3％)、固化速度快(小于O．2min)和固化收缩率小(3％)等特性，其对冷压印光刻工艺的匹配性明显优于溶剂挥发固化型和化学交联固化型材料。因此，最终决定采用低粘度光固化树脂作为冷压印光刻工艺中的抗蚀剂。     

厚层抗蚀剂光刻技术研究进展

厚层抗蚀剂光刻是一种制作深浮雕结构的微细加工技术。综述了近年来厚层抗蚀剂光刻技术的最新进展,从厚层抗蚀剂光刻工艺原理以及计算机模拟诸方面分析了该技术区别与传统光刻的一些特点,并对其应用的研究现状进行了总结,最后指出了进一步发展厚层抗蚀剂光刻技术的关键问题。     

压印光刻对准中阻蚀胶层的设计及优化

针对高速旋涂造成标记区阻蚀胶薄膜覆盖不对称和压印曝光造成标记区薄膜聚合的问题，利用压印光刻压印曝光固化脱模的工艺原理，提出了用压印预处理标记表面薄膜来优化阻蚀胶层厚度和形貌的工艺方法．该方法采用下压力约束薄膜，使阻蚀胶在标记区的栅格间重新分布，从而削弱了覆盖膜的不对称性，获得了相应的薄膜厚度．采用旋涂厚度为1．1μm的覆盖膜对压印预处理工艺方法进行了试验，发现下压力大于0．48MPa时，薄膜结构具有较好的对称性，下压力为1．12MPa时，对准信号的对比度达到最大．试验结果表明，压印预处理对于压印光刻系统具有较好的工艺适应性，利用该方法优化标记区的阻蚀胶层不仅能够有效削弱覆盖膜不对称和压印曝光的影响，而且对准精度可满足100nm压印光刻的要求．     

三维微流道支架直接压印成形方法

针对软质生物材料支架内部三维微结构成形难题,提出了结合分层制造、微压印与冷冻干燥技术的三维微流道支架直接压印成形方法.通过开发自动化成形设备,实现了材料溶液填充、微结构压印、结构预冻、层间黏结等工艺过程的可控化,从而解决了传统手工操作所造成的结构重复性差、成形效率低等问题.研究了模具表面等离子处理、亲水物质添加、改变溶液填充方式等工艺对自动化成形过程中微结构复型性能的影响.结果表明,向材料溶液中添加微量亲水物质并辅助溶液填充引导,可实现软质水溶性天然生物材料内部复杂微流道结构的精确三维压印成形.通过工艺装备保证了成形过程的自动化和稳定性,从而实现了支架微结构制造的可重复性与可控性.     

光敏剂与紫外正性抗蚀剂合成工艺的改进

抗蚀剂是由酚醛树脂成膜剂、重氮萘醌光敏剂、添加剂和溶剂四大类组成，为提高集成电路等器件制作的生产量，就要缩短曝光时间，增加抗蚀剂的感光灵敏度，光敏剂的结构及加入量将影响胶的感光性、曝光量、操作宽容度和耐热性等．本文对正性抗蚀剂合成过程中加入光敏剂的效果作一报道，以设计出一条提高其酯化度的工艺路线。     

步进闪光压印光刻模具制作工艺研究

由于硅橡胶具有良好的自适应性和优异的脱模性，所以选取硅橡胶作为模具材料，并确定使用硅橡胶加石英硬衬作为压印光刻工艺的模具．分析了硅橡胶模具制作工艺中真空辅助浇铸的成型过程，以及交联固化反应过程的各个工艺参数对硅橡胶模具性能的影响，通过大量实验，具体分析了硅橡胶单体和固化荆配比、浇铸真空压力、固化温度及固化时间等工艺参数，并由此得到了优化的硅橡胶固化工艺参数，提高了硅橡胶模具的物理性能．实验表明，硅橡胶模具具有良好的自清洁功能，其表面图形完好，图形转移效果优异，完全能够满足300nm特征尺寸图形复型转移压印的要求。     

一种微透镜阵列制作方法

提出一种采用热压印技术制作微透镜阵列的方法.将聚合物加热到其玻璃转化温度以上,利用预先制备好的模板在适当的压力下压向聚合物样品,保持压力直到聚合物温度降到玻璃转化温度以下,将模板移去后,模板上图形便转移到样品表面.根据热压印工艺要求,研制了一台热压印设备,并利用这台设备制作了单元口径大小为40μm,单元之间间距为60μm的256×256单元8位相台阶衍射微透镜阵列.制作的微透镜阵列SEM图表明图形台阶清晰、各单元一致性好.光学性能测试表明制作的微透镜阵列聚焦的三维光强分布集中,具有较高的峰值.从制作工艺可以看出,利用热压印的方法制作微透镜阵列工艺简单,对制作设备要求不高,为实现低成本、高分辨率、大批量制造微透镜阵列等器件创造了条件.     

纳米压印光刻技术的研究与发展

介绍纳米压印光刻技术的研究现状和发展状况,分析常用的热压印(Hot Embossing Lithography,HEL)、紫外固化压印(Ultra Violet Nanoimprint Lithography,UV-NIL)及微接触压印(Micro Contact Printing,μ-CP)三种光刻的工艺过程。探讨纳米压印光刻方法的优缺点及影响压印图形质量的主要因素,旨在加深对纳米压印光刻工艺过程(模具制作、压印过程及图形转移)深层次的理解和认识,从而解决纳米压印光刻过程中存在的一些关键问题,为新型纳米压印技术的研究和发展提供必要的科学依据。     

Markedness and its Interpretation in Language Use

Language markedness is a common phenomenon in languages, and is reflected from hearing, vision and sense, i.e. the variation in the three aspects such as phonology, morphology and semantics. This paper focuses on the interpretation of markedness in language use following the three perspectives, i.e. pragmatic interpretation, psychological interpretation and cognitive interpretation, with an aim to define the function of markedness.     

Lower Paleozoic oil relationships within Williston Basin, Canada

The Williston Basin is a significant petroleum province, containing oil production zones that include the Middle Cambrian to Lower Ordovician, Upper Ordovician, Middle Devonian, Upper Devonian and Mississippian and within the Jurassic and Cretaceous. The oils of the Williston Basin exhibit a wide range of geochemical characteristics defined as "oil families", although the geochemical signature of the Cambrian Deadwood Formation and Lower Ordovician Winnipeg reservoired oils does not match any "oil family". Despite their close stratigraphic proximity, it is evident that the oils of the Lower Palaeozoic within the Williston Basin are distinct. This suggests the presence of a new "oil family" within the Williston Basin. Diagnostic geochemical signatures occur in the gasoline range chromatograms, within saturate fraction gas chromatograms and biomarker fingerprints. However, some of the established criteria and cross-plots that are currently used to segregate oils into distinct genetic families within the basin do not always meet with success, particularly when applied to the Lower Palaeozoic oils of the Deadwood and Winnipeg Formation.     

An Analysis of Catherine＇s Character——Wuthering Heights

Wuthering Heights, Emily Bronte＇s only novel, was published in December of 1847 under the pseudonym Ellis Bell. The book did not gain immediate success, but it is now thought one of the finest novels in the English language. Catherine is the key character of this masterpiece, because everybody and everything center on her though she had a short life. We can understand this masterpiece better if we know Catherine well.     

Characterization of Ordovician carbonate reservoirs, southeastern Saskatchewan, Canada

The discovery of the prolific Ordovician Red River reservoirs in 1995 in southeastern Saskatchewan was the catalyst for extensive exploration activity which resulted in the discovery of more than 15 new Red River pools. The best yields of Red River production to date have been from dolomite reservoirs. Understanding the processes of dolomitization is, therefore, crucial for the prediction of the connectivity, spatial distribution and heterogeneity of dolomite reservoirs.The Red River reservoirs in the Midale area consist of 3～4 thin dolomitized zones, with a total thickness of about 20 m, which occur at the top of the Yeoman Formation. Two types of replacement dolomite were recognized in the Red River reservoir: dolomitized burrow infills and dolomitized host matrix. The spatial distribution of dolomite suggests that burrowing organisms played an important role in facilitating the fluid flow in the backfilled sediments. This resulted in penecontemporaneous dolomitization of burrow infills by normal seawater. The dolomite in the host matrix is interpreted as having occurred at shallow burial by evaporitic seawater during precipitation of Lake Almar anhydrite that immediately overlies the Yeoman Formation. However, the low δ18O values of dolomited burrow infills (-5.9‰～ -7.8‰, PDB) and matrix dolomites (-6.6‰～ -8.1‰, avg. -7.4‰ PDB) compared to the estimated values for the late Ordovician marine dolomite could be attributed to modification and alteration of dolomite at higher temperatures during deeper burial, which could also be responsible for its 87Sr/86Sr ratios (0.7084～0.7088) that are higher than suggested for the late Ordovician seawaters (0.7078～0.7080). The trace amounts of saddle dolomite cement in the Red River carbonates are probably related to "cannibalization" of earlier replacement dolomite during the chemical compaction.     

Design and analysis of generic LBS application developing platform

Location based services is promising due to its novel working style and contents.A software platform is proposed to provide application programs of typical location based services and support new applications developing efficiently. The analysis shows that this scheme is easy implemented, low cost and adapt to all kinds of mobile nework system.     

橡胶颗粒沥青混合料低温抗裂性试验研究

以AC-13级配为基础,将橡胶颗粒代替部分集料掺入混合料中,以低温弯曲试验为评价方法对不同橡胶颗粒掺量下沥青混合料的低温抗裂性进行研究,并引入应变能密度值对混合料的低温抗裂性进行综合评价.试验结果表明:橡胶颗粒沥青混合料试件的破坏微应变均超过2 300,满足冬寒区的技术指标;无论是否掺加橡胶颗粒,随着温度的下降,沥青混合料破坏时的最大弯拉强度增大,弯拉应变降低,劲度模量增大;弯曲应变能密度在胶粒掺量为1%左右时具有较大的弯曲应变能密度值,此时橡胶颗粒沥青混合料具有较好的低温抗裂性.     

A computer generator for randomly layered structures

AcomputergeneratorforrandomlylayeredstructuresYUJia shun1,2,HEZhen hua2(1.TheInstituteofGeologicalandNuclearSciences,NewZealand;2.StateKeyLaboratoryofOilandGasReservoirGeologyandExploitation,ChengduUniversityofTechnology,China)Abstract:Analgorithmisintrod…     

低渗透非均质砂岩油藏启动压力梯度研究

理论推导与室内实验相结合,建立了低渗透非均质砂岩油藏启动压力梯度确定方法。首先借助油藏流场与电场相似的原理,推导了非均质砂岩油藏启动压力梯度计算公式。其次基于稳定流实验方法,建立了非均质砂岩油藏启动压力梯度测试方法。结果表明:低渗透非均质砂岩油藏的启动压力梯度确定遵循两个等效原则。平面非均质油藏的启动压力梯度等于各级渗透率段的启动压力梯度关于长度的加权平均;纵向非均质油藏的启动压力梯度等于各渗透率层的启动压力梯度关于渗透率与渗流面积乘积的加权平均。研究成果可用于有效指导低渗透非均质砂岩油藏的合理井距确定,促进该类油藏的高效开发。     

Quantitative trait loci （QTLs） for quality traits related to protein and starch in wheat

Quality traits in wheat （Triticum aestirum L.） were studied by quantitative trait locus （QTL） analysis in a recombinant inbred line （RIL） population, a set of 131 lines derived from Chuan 35050 × Shannong 483 cross （ChSh）. Grains from RILs were assayed for 21 quality traits related to protein and starch. A total of 35 putative QTLs for 19 traits with a single QTL explaining 7.99-40.52% of phenotypic variations were detected on 10 chromosomes, 1D, 2A, 2D, 3B, 3D, 5A, 6A, 6B, 6D, and 7B. The additive effects of 30 QTLs were positive, contributed by Chuan 35050, the remaining 5 QTLs were negative with the additive effect contributed by Shannong 483. For protein traits, 15 QTLs were obtained and most of them were located on chromosomes 1 D, 3B and 6D, while 20 QTLs for starch traits were detected and most of them were located on chromosomes 3D, 6B and 7B. Only 7 QTLs for protein and starch traits were co-located in three regions on chromosomes 1D, 2A and 2D. These protein and starch trait QTLs showed a distinct distribution pattern in certain regions and chromosomes. Twenty-two QTLs were clustered in 6 regions of 5 chromosomes. Two QTL clusters for protein traits were located on chromosomes 1D and 3B, respectively, three clusters for starch traits on chromosomes 3D, 6B and 7B, and one cluster including protein and starch traits on chromosome 1D.     

On Tragic Consciousness In The Works By Ernest Hemingway

As an American modern novelist who were famous in the literary world, Hemingway was not a person who always followed the trend but a sharp observer. At the same time, he was a tragedy maestro, he paid great attention on existence, fate and end-result. The dramatis personae's tragedy of his works was an extreme limit by all means tragedy on the meaning of fearless challenge that failed. The beauty of tragedy was not produced on the destruction of life, but now this kind of value was in the impact activity. They performed for the reader about the tragedy on challenging for the limit and the death.