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1.
采用直流磁控反应溅射法制备AlN薄膜.研究了靶基距、衬底温度和电极材料对AlN薄膜择优取向的影响.用XRD、AFM表征了AlN薄膜的结构、表面形貌.结果表明衬底温度为300℃、靶基距为3cm,在Pt电极上可沉积高质量的C轴择优取向AlN薄膜.  相似文献   

2.
孙治国  杨莉 《甘肃科技》2008,24(1):63-66
用Monte Carlo法以Cu为例对薄膜生长过程中薄膜应力进行计算机模拟。将分子动力学法引入到连续体薄膜的生长过程中,通过面上的假想力来实现薄膜应力的计算机模拟.模拟结果表明,在一定原子入射率和基底温度下,在薄膜厚度极其薄的情况下,薄膜应力随薄膜平均厚度的增加而增大,薄膜应力随薄膜表面粗糙度的增大也增大,薄膜应力—厚度随原子沉积个数趋向于线性关系,并且模拟了薄膜应力与薄膜表面粗糙度以及沉积时间的关系曲线。  相似文献   

3.
氮化铝(AlN)薄膜不同的择优取向直接影响其压电性和声波传递速度.本文通过改变衬底补偿温度对AlN薄膜的择优取向进行了研究.在正常实验溅射完成后继续通入氮气对衬底进行温度补偿.应用XRD和AFM对氮化铝薄膜的取向性和表面形貌进行表征分析,结果表明本实验制备出了较好的(002)面和(100)面取向的AlN薄膜,而且薄膜沉积均匀,比较致密.  相似文献   

4.
利用化学气相淀积(CVD)技术,在700~1000℃下合成了AlN超细粒子,研究了操作参数对粒子特性和AlN薄膜生长规律的影响。AlN超细粒子表面形态和反应温度、AlCl_3浓度等有关,其粒度及分布宽度随反应温度的升高、AlCl_3浓度减小和总流量增加而减小,AlN薄膜生长速率随反应温度的减小和总流量的增加而增大。在AlCl_3和NH_3的CVD反应中出现中间产物Al(NH_2)_3和Al_2(NH)_3,它们促使了粒子的形成和薄膜的生长。  相似文献   

5.
磁控溅射法生长ZnO薄膜的结构和表面形貌特性   总被引:1,自引:0,他引:1  
采用射频磁控溅射方法,在Si(111)和玻璃基片上制备ZnO薄膜.研究衬底温度和基片类型对薄膜结构、表面形貌的影响.结果显示,所有ZnO薄膜沿c轴择优生长,同种基片类型上生长的薄膜,随着衬底温度升高,(002)衍射峰强度和表面粗糙度增高;相同衬底温度下生长的ZnO薄膜,Si基片上制备的薄膜(002)衍射峰强度和表面粗糙度小于玻璃片上的.基片类型影响薄膜应力状态,玻璃片上制备的ZnO薄膜处于张应变状态,Si基片上的薄膜处于压应变状态;对于同种基片类型上生长的ZnO薄膜,衬底温度升高,应力减小.Si衬底上、300℃下沉积的薄膜颗粒尺寸分布呈正态.  相似文献   

6.
采用热蒸发在载玻片和SiO_2衬底上沉积约5. 12 nm的Cu薄膜,再用退火炉分别进行100、200、300、400和500℃等5个温度退火,得到不同温度下的纳米Cu薄膜.用原子力显微镜和紫外-可见分光光度计研究不同退火温度对纳米Cu薄膜表面形貌、粒子分布和光学性质的影响.实验结果表明:当纳米Cu薄膜在载玻片上生长Cu颗粒阵列时,需要将退火温度控制在200℃左右;若使纳米Cu薄膜在SiO_2薄膜表面也能生长Cu颗粒阵列,退火温度比没有沉积SiO_2薄膜的衬底高100℃,此时纳米Cu颗粒对应方均根粗糙度为7. 20 nm、峰高(Skewness)为1. 75,以及偏态(Kurtosis)为5. 67,仅透射率略低9%.这样的Cu颗粒阵列更利于做超结构薄膜与完美吸收的顶层纳米金属颗粒.当退火温度为500℃时,载玻片上生长Cu薄膜的透射率出现一个相对稳定的波段,该工艺条件制备出来的纳米Cu薄膜,可以用来制作一些微型芯片,而SiO_2薄膜表面生长使纳米Cu薄膜对应方均根粗糙度为6. 25 nm、峰高为0. 57,以及偏态为2. 66.这样的Cu颗粒阵列不仅能够做大频率光电波吸收,还可以用作全固态电池中电解质上层的导电层.  相似文献   

7.
研究铜、铝作为银薄膜的缓冲层对银薄膜的光电学性质的影响.利用热蒸发技术在BK-7玻璃基底上沉积Ag(220 nm)/Al(20 nm)和Ag(220 nm)/Cu(20 nm)薄膜,沉积薄膜在温度为400、500℃的大气条件下退火处理1 h.样品的表面形貌用原子力显微镜观测,光学和电学性质分别用分光光度计和vander Pauw方法测量.实验结果表明,相对于同等条件下制备的纯银薄膜,附加缓冲层大大提高了退火态薄膜的光电性质,改善了银薄膜的热稳定性.不同的缓冲层对银薄膜光电性质影响程度不同:在同一退火温度下,在可见光谱区域,Ag/Al薄膜的反射率大于Ag/Cu薄膜;Ag/Cu薄膜的电阻率ρ小于Ag/Al薄膜,且在退火温度为500℃时Ag/Cu薄膜的ρ最小.  相似文献   

8.
基于Monte Carlo模型, 在理想基底上设置100×100的二维方形格, 利用周期性边界条件建立Cu薄膜初期生长模型, 并模拟粒子的气相沉积过程及迁移步数对薄膜生长的影响规律. 结果表明: 当沉积粒子数逐渐增加时, 基底表面的粒子团簇结构逐渐增大; 在温度不变的条件下, 随着最大迁移步数的增加, 团簇逐渐增大, 团簇数量逐渐减小, 且团簇分布逐渐稀疏; 温度升高使粒子聚集为岛状, 薄膜呈岛状生长.  相似文献   

9.
化学浴沉积法制备纳米氧化亚铜薄膜   总被引:7,自引:0,他引:7  
用改进后的化学浴沉积法制备了纳米Cu2O薄膜,并对成膜条件及膜的性能进行了研究.结果表明:化学浴沉积法改进后有利于制备高质量的纳米Cu2O薄膜;最佳反应温度为60~70C,此温度范围内Cu2O薄膜的膜厚随着循环次数线性增加.制备的薄膜纯度较高.表面较平整和致密,Cu2O粒径为14~22nm,其禁带宽度为2.01eV.  相似文献   

10.
MEMS开关中氮化硅薄膜工艺研究   总被引:1,自引:0,他引:1       下载免费PDF全文
分析了沉积薄膜厚度、PECVD的薄膜沉积温度、反应气体形成的杂质以及多层薄膜之间热应力匹配等因素对薄膜残余应力的影响.应用光刻分割聚酰亚胺(PI)牺牲层、分层生长氮化硅薄膜及快速热退火等工艺减小薄膜残余应力,成功生长出了合格的氮化硅薄膜.  相似文献   

11.
Language markedness is a common phenomenon in languages, and is reflected from hearing, vision and sense, i.e. the variation in the three aspects such as phonology, morphology and semantics. This paper focuses on the interpretation of markedness in language use following the three perspectives, i.e. pragmatic interpretation, psychological interpretation and cognitive interpretation, with an aim to define the function of markedness.  相似文献   

12.
The discovery of the prolific Ordovician Red River reservoirs in 1995 in southeastern Saskatchewan was the catalyst for extensive exploration activity which resulted in the discovery of more than 15 new Red River pools. The best yields of Red River production to date have been from dolomite reservoirs. Understanding the processes of dolomitization is, therefore, crucial for the prediction of the connectivity, spatial distribution and heterogeneity of dolomite reservoirs.The Red River reservoirs in the Midale area consist of 3~4 thin dolomitized zones, with a total thickness of about 20 m, which occur at the top of the Yeoman Formation. Two types of replacement dolomite were recognized in the Red River reservoir: dolomitized burrow infills and dolomitized host matrix. The spatial distribution of dolomite suggests that burrowing organisms played an important role in facilitating the fluid flow in the backfilled sediments. This resulted in penecontemporaneous dolomitization of burrow infills by normal seawater. The dolomite in the host matrix is interpreted as having occurred at shallow burial by evaporitic seawater during precipitation of Lake Almar anhydrite that immediately overlies the Yeoman Formation. However, the low δ18O values of dolomited burrow infills (-5.9‰~ -7.8‰, PDB) and matrix dolomites (-6.6‰~ -8.1‰, avg. -7.4‰ PDB) compared to the estimated values for the late Ordovician marine dolomite could be attributed to modification and alteration of dolomite at higher temperatures during deeper burial, which could also be responsible for its 87Sr/86Sr ratios (0.7084~0.7088) that are higher than suggested for the late Ordovician seawaters (0.7078~0.7080). The trace amounts of saddle dolomite cement in the Red River carbonates are probably related to "cannibalization" of earlier replacement dolomite during the chemical compaction.  相似文献   

13.
AcomputergeneratorforrandomlylayeredstructuresYUJia shun1,2,HEZhen hua2(1.TheInstituteofGeologicalandNuclearSciences,NewZealand;2.StateKeyLaboratoryofOilandGasReservoirGeologyandExploitation,ChengduUniversityofTechnology,China)Abstract:Analgorithmisintrod…  相似文献   

14.
理论推导与室内实验相结合,建立了低渗透非均质砂岩油藏启动压力梯度确定方法。首先借助油藏流场与电场相似的原理,推导了非均质砂岩油藏启动压力梯度计算公式。其次基于稳定流实验方法,建立了非均质砂岩油藏启动压力梯度测试方法。结果表明:低渗透非均质砂岩油藏的启动压力梯度确定遵循两个等效原则。平面非均质油藏的启动压力梯度等于各级渗透率段的启动压力梯度关于长度的加权平均;纵向非均质油藏的启动压力梯度等于各渗透率层的启动压力梯度关于渗透率与渗流面积乘积的加权平均。研究成果可用于有效指导低渗透非均质砂岩油藏的合理井距确定,促进该类油藏的高效开发。  相似文献   

15.
As an American modern novelist who were famous in the literary world, Hemingway was not a person who always followed the trend but a sharp observer. At the same time, he was a tragedy maestro, he paid great attention on existence, fate and end-result. The dramatis personae's tragedy of his works was an extreme limit by all means tragedy on the meaning of fearless challenge that failed. The beauty of tragedy was not produced on the destruction of life, but now this kind of value was in the impact activity. They performed for the reader about the tragedy on challenging for the limit and the death.  相似文献   

16.
本文叙述了对海南岛及其毗邻大陆边缘白垩纪到第四纪地层岩石进行古地磁研究的全部工作过程。通过分析岩石中剩余磁矢量的磁偏角及磁倾角的变化,提出海南岛白垩纪以来经历的构造演化模式如下:早期伴随顺时针旋转而向南迁移,后期伴随逆时针转动并向北运移。联系该地区及邻区的地质、地球物理资料,对海南岛上述的构造地体运动提出以下认识:北部湾内早期有一拉张作用,主要是该作用使湾内地壳显著伸长减薄,形成北部湾盆地。从而导致了海南岛的早期构造运动,而海南岛后期的构造运动则主要是受南海海底扩张的影响。海南地体运动规律的阐明对于了解北部湾油气盆地的形成演化有重要的理论和实际意义。  相似文献   

17.
There are numerous geometric objects stored in the spatial databases. An importance function in a spatial database is that users can browse the geometric objects as a map efficiently. Thus the spatial database should display the geometric objects users concern about swiftly onto the display window. This process includes two operations:retrieve data from database and then draw them onto screen. Accordingly, to improve the efficiency, we should try to reduce time of both retrieving object and displaying them. The former can be achieved with the aid of spatial index such as R-tree, the latter require to simplify the objects. Simplification means that objects are shown with sufficient but not with unnecessary detail which depend on the scale of browse. So the major problem is how to retrieve data at different detail level efficiently. This paper introduces the implementation of a multi-scale index in the spatial database SISP (Spatial Information Shared Platform) which is generalized from R-tree. The difference between the generalization and the R-tree lies on two facets: One is that every node and geometric object in the generalization is assigned with a importance value which denote the importance of them, and every vertex in the objects are assigned with a importance value,too. The importance value can be use to decide which data should be retrieve from disk in a query. The other difference is that geometric objects in the generalization are divided into one or more sub-blocks, and vertexes are total ordered by their importance value. With the help of the generalized R-tree, one can easily retrieve data at different detail levels.Some experiments are performed on real-life data to evaluate the performance of solutions that separately use normal spatial index and multi-scale spatial index. The results show that the solution using multi-scale index in SISP is satisfying.  相似文献   

18.
19.
The elongation method,originally proposed by Imamura was further developed for many years in our group.As a method towards O(N)with high efficiency and high accuracy for any dimensional systems.This treatment designed for one-dimensional(ID)polymers is now available for three-dimensional(3D)systems,but geometry optimization is now possible only for 1D-systems.As an approach toward post-Hartree-Fock,it was also extended to  相似文献   

20.
Various applications relevant to the exciton dynamics,such as the organic solar cell,the large-area organic light-emitting diodes and the thermoelectricity,are operating under temperature gradient.The potential abnormal behavior of the exicton dynamics driven by the temperature difference may affect the efficiency and performance of the corresponding devices.In the above situations,the exciton dynamics under temperature difference is mixed with  相似文献   

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