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Fabrication and photoluminescence of GaN nanowires prepared by ammoniating GaeO3/BN films on Si substrate
作者姓名:XUE  Chengshan
作者单位:Institute of Semiconductors, College of Physics and Electronics, Shandong Normal University, Jinan 250014, China
基金项目:Acknowledgements This work was supported by the Key Research Program of the National Natural Science Foundation of China (Grant No. 90201025) and the National Natural Science Foundation of China (Grant No. 90301002).
摘    要:GaN nanowires were successfully prepared on Si(111) substrate through ammoniating Ga203/BN films deposited by radio frequency magnetron sputtering system. The synthesized nanowires were confirmed as hexagonal wurtzite GaN by X-ray diffraction, selected-area electron diffraction and Fourier transform infrared spectra. Scanning electron microscopy and transmission electron microscopy revealed that the grown GaN nanowires have a smooth and clean surface with diameters ranging from 40 to 160 nm and lengths typically up to several tens of micrometers. The representative photoluminescence spectrum at room temperature exhibited a strong UV light emission band centered at 363 nm and a relative weak purple light emission peak at 422 nm. The growth mechanism is discussed briefly.

关 键 词:磁控溅射  GaN纳米线  光致发光  GaeO3/BN薄膜  Si
收稿时间:2006-03-27
修稿时间:2006-03-272006-05-09

Fabrication and photoluminescence of GaN nanowires prepared by ammoniating Ga2O3/BN films on Si substrate
Chengshan Xue,Yuxin Wu,Huizhao Zhuang,Deheng Tian,Yi’an Liu,Jianting He,Yujie Ai,Lili Sun,Fuxue Wang.Fabrication and photoluminescence of GaN nanowires prepared by ammoniating GaeO3/BN films on Si substrate[J].Chinese Science Bulletin,2006,51(14):1662-1665.
Authors:Chengshan Xue  Yuxin Wu  Huizhao Zhuang  Deheng Tian  Yi’an Liu  Jianting He  Yujie Ai  Lili Sun  Fuxue Wang
Institution:(1) Institute of Semiconductors, College of Physics and Electronics, Shandong Normal University, Jinan, 250014, China
Abstract:GaN nanowires were successfully prepared on Si(111) substrate through ammoniating Ga2O3/BN films deposited by radio frequency magnetron sputtering system. The synthesized nanowires were confirmed as hexagonal wurtzite GaN by X-ray diffraction, selected-area electron diffraction and Fourier transform infrared spectra. Scanning electron microscopy and transmission electron microscopy revealed that the grown GaN nanowires have a smooth and clean surface with diameters ranging from 40 to 160 nm and lengths typically up to several tens of micrometers. The representative photoluminescence spectrum at room temperature exhibited a strong UV light emission band centered at 363 nm and a relative weak purple light emission peak at 422 nm. The growth mechanism is discussed briefly.
Keywords:magnetron sputtering  GaN nanowires  photoluminescence  
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