无掩模多束SPPs干涉光刻成像仿真软件研究

多束SPPs干涉光刻是一种可制作纳米尺度光子晶体器件的新型微加工方法，目前尚未见对多束SPPs干涉光刻过程进行模拟分析的专门软件.在分析SPPs激励和传输机理基础上，建立多束SPPs干涉成像模型，并采用VC和Matlab库函数混合编程编制了可计算多束SPPS干涉光刻成像的仿真软件.模拟和分析表明，该模型及软件计算准确、快速，达到预期效果，为实现无掩模SPPs干涉光刻全过程模拟和曝光实验研究的开展提供了技术支撑.     

多束SPPs干涉成像模拟研究

多束SPPs干涉光刻是一种可突破衍射极限的新型纳米加工方法。在分析SPPs激励和传输机理基础上,建立多束SPPs干涉成像模型,编制了能快速准确地计算多束SPPs干涉光刻成像的仿真软件。并在此基础上对多束SPPs的干涉像进行了模拟,发现如果将两束光增加到四束或八束光激发SPPs干涉,则可获得二维分布的周期性光斑点阵,在制作纳米光子晶体材料方面有很强的应用前景。随着入射SPPs的增加,当棱锥棱数足够多近似于一个圆锥时,干涉场会形成一系列的同心圆结构,可考虑实现纳米级波带片的制作。     

电子束光刻“自主可控”EDA软件HNU-EBL

为模拟和优化电子束光刻（Electron Beam Lithography,EBL）工艺过程,提高电子束光刻版图加工质量,依托湖南大学（Hunan University,HNU）开发了一套电子束光刻的“自主可控”国产电子设计自动化（Electronic Design Automation,EDA）软件HNU-EBL.该软件实现了以下主要功能：1）基于Monte Carlo方法计算电子束在光刻胶和衬底中的散射过程与运动轨迹;2）基于多高斯加指数函数模型计算拟合出电子束散射的点扩散函数;3）基于GDSII光刻版图文件矩阵化,进行邻近效应、雾效应等校正计算,优化电子束曝光剂量;4）基于卷积计算,计算出给定曝光剂量下的能量沉积密度,并计算出边缘放置误差等光刻加工质量关键指标.基于该软件,通过异或门（Exclusive OR,XOR）集成电路的光刻版图算例,计算在聚甲基丙烯酸甲酯（Polymethyl Methacrylate,PMMA）光刻胶和硅衬底中10 kV电子束的光刻工艺过程.通过对比电子束邻近效应校正前后的显影版图,验证了该软件的有效性.在完全相同的计算硬件和算例条件下,与主流同类进口EDA软件进行了对比,证实了在同等精度下,本软件具有更高的计算效率.已建立http：//www.ebeam.com.cn网站,将HNU-EBL软件免费授权给EBL用户使用.     

亚波长光刻离轴照明和次分辨率辅助图形技术

讨论了亚波长光刻条件下的离轴照明和次分辨率辅助图形两种分辨率的增强技术,分析了两种技术的原理,利用光刻模拟软件,针对不同线宽的稀疏线条,对添加次分辨率辅助图形前后的光刻仿真结果进行了对比.研究结果表明,离轴照明技术和次分辨率辅助图形的结合使用,可以显著提高亚100纳米级版图线条的光刻分辨率,增大工艺窗口,降低版图成像对生产工艺参数的要求,对于解决亚波长光刻所带来的亚100纳米级集成电路成像质量下降的问题非常必要.     

接近式光刻衍射光场的快速计算机模拟

接近式光刻中一般采用柯勒照明系统,并采用蝇眼透镜形成多点光源均匀掩模面的光场分布.利用基尔霍夫衍射理论及多点光源的衍射光场非相干叠加方法,对光刻胶表面的衍射光场进行了快速计算机模拟,并与霍普金斯理论计算结果进行了分析比较.结果表明采用基尔霍夫衍射理论及多点光源的衍射光场非相干叠加的模型不仅快速而且也可以比较准确地模拟接近式光刻的衍射光场分布.     

集成电路光刻模拟的数据后处理研究

在集成电路光刻过程中,利用光刻模拟软件将光刻模拟结果与设计模板进行比较可以预先发现模板设计中的缺陷.由于光刻模拟软件与模板设计软件数据格式的不同影响了这一步工作的顺利完成.本文通过对两种软件数据格式的研究,利用Perl语言实现了两种软件之间数据格式的转换,具有一定的实用价值.     

可见光波段亚波长防伪光栅的实验研究

研究可见光波段亚波长防伪光栅的制做.给出了用2θ夹角一次光刻、2θ夹角摆动δ角两次光刻和2θ夹角旋转β角两次光刻等干涉光刻工艺设计和构建可见光波段亚波长光栅微结构的基本原理.优化设计的干板表面曝光量分布函数可用于构建特定面形分布的光栅微结构.制作了可见光波段的1维和2维亚波长光栅微结构,给出了其SEM和AFM实验数据和理论分析图形,检验了微结构的彩色防伪光变效果.实验结果表明:该干涉光刻工艺能够构建出表面光滑、深度较大的复杂光栅微结构,并能展现出一定的彩色光变效果.     

超振荡透镜的三维全矢量电磁分析方法

为了揭示超振荡透镜(SOL)亚波长聚焦本质和高分辨率成像机理,阐述了超振荡透镜的三维全矢量电磁分析方法,包括矢量电磁聚焦和矢量电磁成像两个连续物理过程。采用矢量角谱理论,计算预测超振荡透镜后多衍射光束精细干涉形成的矢量光场分布,利用等价磁偶极子矢量成像理论,定量计算探测面内像场分布。研究结果表明:三维时域有限差分法建模的严格求解结果与矢量角谱结果基本吻合;高倍、大数值孔径显微成像系统具有选择性偏振滤波成像机理,特别是可对纵向偏振分量进行抑制。该研究为超振荡透镜应用于纳米光刻、超分辨显微技术、粒子操控等领域提供了理论基础。     

获得清晰干涉图样的相干光极限振幅比

研究了相干光振幅比对干涉图样清晰度的影响 ,得出了获得清晰干涉图样的极限相干光振幅比和极限反衬度 ,分析了透明薄膜多束反射和多束透射光的振幅比对其干涉图样的影响。     

干涉光谱仪遥感探测的信噪比研究

干涉光谱仪进行空间目标探测时有很多影响因素。通过计算太阳对目标的表面辐射，利用大气传输模型分析软件——MODTRAN分析计算在可见光到近红外范围的天空漫反射辐射和背景辐射，给出探测器接收到的信号电子数。另外分析各种噪声源，给出主要噪声源的计算方法，并以电子数为基本单位表达各噪声的大小，从而推导出干涉光谱仪接收到的信噪比（以电子数为基本单位）的一般表达式。同时，分析各种因素对成像质量的影响，提出可行的方法改善成像质量。     

An Index mechanism for multi-scale view in spatial databases

There are numerous geometric objects stored in the spatial databases. An importance function in a spatial database is that users can browse the geometric objects as a map efficiently. Thus the spatial database should display the geometric objects users concern about swiftly onto the display window. This process includes two operations:retrieve data from database and then draw them onto screen. Accordingly, to improve the efficiency, we should try to reduce time of both retrieving object and displaying them. The former can be achieved with the aid of spatial index such as R-tree, the latter require to simplify the objects. Simplification means that objects are shown with sufficient but not with unnecessary detail which depend on the scale of browse. So the major problem is how to retrieve data at different detail level efficiently. This paper introduces the implementation of a multi-scale index in the spatial database SISP (Spatial Information Shared Platform) which is generalized from R-tree. The difference between the generalization and the R-tree lies on two facets: One is that every node and geometric object in the generalization is assigned with a importance value which denote the importance of them, and every vertex in the objects are assigned with a importance value,too. The importance value can be use to decide which data should be retrieve from disk in a query. The other difference is that geometric objects in the generalization are divided into one or more sub-blocks, and vertexes are total ordered by their importance value. With the help of the generalized R-tree, one can easily retrieve data at different detail levels.Some experiments are performed on real-life data to evaluate the performance of solutions that separately use normal spatial index and multi-scale spatial index. The results show that the solution using multi-scale index in SISP is satisfying.     

Characterization of Ordovician carbonate reservoirs, southeastern Saskatchewan, Canada

The discovery of the prolific Ordovician Red River reservoirs in 1995 in southeastern Saskatchewan was the catalyst for extensive exploration activity which resulted in the discovery of more than 15 new Red River pools. The best yields of Red River production to date have been from dolomite reservoirs. Understanding the processes of dolomitization is, therefore, crucial for the prediction of the connectivity, spatial distribution and heterogeneity of dolomite reservoirs.The Red River reservoirs in the Midale area consist of 3～4 thin dolomitized zones, with a total thickness of about 20 m, which occur at the top of the Yeoman Formation. Two types of replacement dolomite were recognized in the Red River reservoir: dolomitized burrow infills and dolomitized host matrix. The spatial distribution of dolomite suggests that burrowing organisms played an important role in facilitating the fluid flow in the backfilled sediments. This resulted in penecontemporaneous dolomitization of burrow infills by normal seawater. The dolomite in the host matrix is interpreted as having occurred at shallow burial by evaporitic seawater during precipitation of Lake Almar anhydrite that immediately overlies the Yeoman Formation. However, the low δ18O values of dolomited burrow infills (-5.9‰～ -7.8‰, PDB) and matrix dolomites (-6.6‰～ -8.1‰, avg. -7.4‰ PDB) compared to the estimated values for the late Ordovician marine dolomite could be attributed to modification and alteration of dolomite at higher temperatures during deeper burial, which could also be responsible for its 87Sr/86Sr ratios (0.7084～0.7088) that are higher than suggested for the late Ordovician seawaters (0.7078～0.7080). The trace amounts of saddle dolomite cement in the Red River carbonates are probably related to "cannibalization" of earlier replacement dolomite during the chemical compaction.     

A computer generator for randomly layered structures

AcomputergeneratorforrandomlylayeredstructuresYUJia shun1,2,HEZhen hua2(1.TheInstituteofGeologicalandNuclearSciences,NewZealand;2.StateKeyLaboratoryofOilandGasReservoirGeologyandExploitation,ChengduUniversityofTechnology,China)Abstract:Analgorithmisintrod…     

Perspherical Approaches for Electrons in Atoms and Charged Excitons in Quantum Wells

Instead of following Fock’s expansion,we solve the Schrodinger equation for some quantum mechanical manybody systems such as electrons in atoms and charged excitons in quantum wells in a similar way in hyperspherical coordinates by expanding the wave functions into orthonormal complete basis sets of the hyperspherical hannonics(HHs)of hyperangles and generalized Laguerre polynomials(GLPs)of the hyperradius.This leads the equation to     

Advances in broadband wireless communications under high-mobility scenarios

Future mobile communication systems aim at providing very high data transmission rates, even in high-mobility scenarios such as high-speed wheel-track trains, maglev trains, highway vehicles, airplanes, guided missiles or spacecraft. A particularly important commercial application is the strong and increasing worldwide demand for high- speed broadband wireless communications （up to 574.8 km/ h test speeds or 380 km/h commercial speeds） in railways, providing data, voice and video services for applications such as onboard entertainment services to passengers, train control, train dispatch, train sensor status handling and sur- veillance. In such high-mobility scenarios, there are a number of communication challenges, including fast hand- over, location updating, high-speed channel modeling, estimation and equalization, anti-Doppler spreading tech- niques, fast power control, and dedicated network architec- ture. Because signal transmission in very high-speed scenarios will inevitably experience serious deterioration, it is imperative to develop key broadband mobile communi- cation techniques for such high-speed vehicles.     

Wuhan University Journal of Natural Sciences TOTAL CONTENTS

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海南岛地体及其毗邻陆缘晚中生代—新生代古地磁研究和构造演化

本文叙述了对海南岛及其毗邻大陆边缘白垩纪到第四纪地层岩石进行古地磁研究的全部工作过程。通过分析岩石中剩余磁矢量的磁偏角及磁倾角的变化,提出海南岛白垩纪以来经历的构造演化模式如下:早期伴随顺时针旋转而向南迁移,后期伴随逆时针转动并向北运移。联系该地区及邻区的地质、地球物理资料,对海南岛上述的构造地体运动提出以下认识:北部湾内早期有一拉张作用,主要是该作用使湾内地壳显著伸长减薄,形成北部湾盆地。从而导致了海南岛的早期构造运动,而海南岛后期的构造运动则主要是受南海海底扩张的影响。海南地体运动规律的阐明对于了解北部湾油气盆地的形成演化有重要的理论和实际意义。     

Scale-based spatial data model for GIS

Being the primary media of geographical information and the elementary objects manipulated, almost all of maps adopt the layer-based model to represent geographic information in the existent GIS. However, it is difficult to extend the map represented in layer-based model. Furthermore, in Web-Based GIS, It is slow to transmit the spatial data for map viewing. In this paper, for solving the questions above, we have proposed a new method for representing the spatial data. That is scale-based model. In this model we represent maps in three levels: scale-view, block, and spatial object, and organize the maps in a set of map layers, named Scale-View, which associates some given scales.Lastly, a prototype Web-Based GIS using the proposed spatial data representation is described briefly.     

Exciton Seebeck in Molecular Systems

Various applications relevant to the exciton dynamics,such as the organic solar cell,the large-area organic light-emitting diodes and the thermoelectricity,are operating under temperature gradient.The potential abnormal behavior of the exicton dynamics driven by the temperature difference may affect the efficiency and performance of the corresponding devices.In the above situations,the exciton dynamics under temperature difference is mixed with     

Achieving Unusual States of Matter Under High Pressure

The elongation method,originally proposed by Imamura was further developed for many years in our group.As a method towards O(N)with high efficiency and high accuracy for any dimensional systems.This treatment designed for one-dimensional(ID)polymers is now available for three-dimensional(3D)systems,but geometry optimization is now possible only for 1D-systems.As an approach toward post-Hartree-Fock,it was also extended to