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1.
提出了一种可显著改善室温下直流磁控溅射氧化铟锡(ITO)薄膜晶体结构、光学和电学性能的后处理方法,将ITO薄膜分别置于氩气、氨气和氧气中进行低温等离子体退火处理.同单纯的退火处理相比,在3种气氛下,低温等离子退火均可使室温溅射沉积的ITO薄膜在相对低的温度(150℃)时,由非晶态转变为晶态,其相应的电学和光学性能都有较大的提高.实验证明:氨气气氛下退火温度为350℃时,玻璃衬底上ITO薄膜在波长为600 nm的可见光区内的透光率可达88.5%;薄膜表面的针刺很少,表面平整度小于2.08 nm;方块电阻由348.7Ω降到66.8Ω,相应的电阻率由4.1×10-3Ω.cm降到7.9×10-4Ω.cm.该方法更能满足柔性有机聚合衬底的ITO薄膜对低温退火的要求.  相似文献   

2.
ITO薄膜是目前应用最为广泛的透明导电薄膜,通过在ITO中掺杂其他金属可以进一步改善ITO薄膜的光学和电学性能。本文采用射频(RF)磁控溅射法制备了掺钨氧化铟锡(ITO∶W)透明导电薄膜,研究了薄膜厚度、表面形貌、晶体结构以及光学和电学性能与各溅射参数之间的关系。当溅射功率大于40 W时,制备的ITO∶W薄膜为方铁锰矿结构的多晶薄膜,此时薄膜表面光滑平整而且具有良好的结晶性。在基板温度320℃、溅射功率80 W、溅射时间15 min、工作气压0.6 Pa条件下得到了光学和电学性能优良的ITO∶W薄膜,其方块电阻为10.5Ω/、电阻率为4.41×10-4Ω·cm,对应的载流子浓度为2.23×1020 cm-3、迁移率为27.3 cm2·V-1·s-1、可见光(400~700 nm)范围内平均透射率为90.97%。此外,本研究还发现通过调节基板温度影响氧元素的状态可以改变ITO∶W薄膜的电学性能。  相似文献   

3.
采用溶胶-凝胶旋转涂膜法,以InCl3·4H2O和SnCl4·5H2O为前驱物在玻璃基片上制备了氧化铟锡(ITO)薄膜材料,研究掺锡浓度、涂膜层数、热处理温度和热处理时间等工艺条件对ITO薄膜光电特性的影响.实验结果表明,ITO薄膜的方块电阻和可见光透射率都与掺锡浓度、涂膜层数、热处理温度和时间等因素有关,最佳参数为锡掺杂量12wt%,热处理温度和时间分别为450℃和1h,薄膜层数为6层.最佳ITO薄膜的方块电阻为185Ω/□,可见光平均透射率为91.25%.  相似文献   

4.
为了提高半导体发光二极管封装的可靠性与焊接性能,避开传统的电极层陶瓷/金属的机械性能匹配问题,设计了两种电极层的结构:一种是多层膜系结构,另一种是氧化铟锡(ITO)薄膜.研究发现:多层膜系结构的电阻率为3×10-6 Ω·cm,平均抗拉强度为4.22 MPa,膜层表面缺陷较少, 致密性好,焊接性能好;ITO薄膜在紫外辐照条件下制备样品的电阻率、表面形貌和生长取向明显优于未经紫外辐照的样品,在线紫外辐照下最低方阻为5 Ω,电阻率为2.5×10-4 Ω·cm,平均抗拉强度为5.3 MPa ,表面缺陷少,致密度好,趋于[222]晶面的择优取向.多层膜系结构的电阻率明显优于ITO薄膜,但平均抗拉强度不如ITO薄膜.  相似文献   

5.
以InCl3·4H2O和SnCl4·5H2O为主要原料,采用溶胶一凝胶法和旋转涂膜工艺,在玻璃基片上制备掺锡氧化铟透明导电薄膜(ITO).用紫外-可见透射光谱和四探针技术,研究了不同掺Sn量、不同热处理温度和热处理时间对薄膜光学和电学性能的影响.实验结果表明,最佳工艺条件为掺Sn量11%,热处理温度480℃,热处理时间60min.在最佳工艺条件下制备的ITO薄膜可见光透过率达82%以上,薄膜的方块阻为390Ω/□.  相似文献   

6.
以掺锡氧化铟陶瓷靶材作为溅射源,采用磁控溅射技术在玻璃衬底上制备了氧化铟锡(ITO)透明导电薄膜,通过X-射线衍射仪(XRD)和X-射线光电子能谱仪(XPS)测试表征,研究了生长温度对薄膜结晶性质和微结构性能的影响.结果表明:所沉积的ITO薄膜均具有体心立方的多晶结构,其生长特性和微结构性能明显受到生长温度的影响.生长温度升高时,薄膜(222)晶面的织构系数T_(C(222))和晶粒尺寸先增后减,而晶格应变和位错密度则先减后增.当生长温度为500 K时,ITO样品的织构系数T_(C(222))最高(1.5097)、晶粒尺寸最大(52.8 nm)、晶格应变最低(1.226×10~(-3))、位错密度最小(3.409×10~(14)m~(-2)),具有最佳的(222)晶面择优取向性和微结构性能.  相似文献   

7.
真空退火处理对光敏薄膜及聚合物太阳电池性能的影响   总被引:4,自引:1,他引:3  
采用掺锡氧化铟玻璃作为衬底,制备了聚[2-甲氧基-5-(2-乙基己氧基)-1-4-苯撑乙烯]光敏薄膜及其器件,研究了退火处理对薄膜形貌和光电性能的影响.透射光谱和AFM研究表明,退火处理改善了薄膜的表面形貌、降低了薄膜的光学能隙.另外,通过分析器件伏安特性发现,退火处理有助于提高薄膜的电导率和载流子迁移率.这些实验结果对于提高聚合物太阳电池的能量转换效率、改善器件的光伏性能具有非常重要的意义.  相似文献   

8.
采用常压烧结方法制备了Ga2O3陶瓷靶,用X射线衍射仪、金相显微镜对Ga2O3陶瓷靶的结构和形貌进行了研究.用射频磁控溅射Ga2O3陶瓷靶材和直流磁控溅射ITO(锡铟氧化物)靶材分别制备了Ga2O3薄膜、Ga2O3/ITO/Ga2O3膜,用紫外-可见分光光度计、四探针测试仪对Ga2O3薄膜、Ga2O3/ITO/Ga2O3膜的光学透过率和电阻率进行了表征.Ga2O3薄膜不导电,光学带隙5.1 eV;Ga2O3(45 nm)/ITO(14 nm)/Ga2O3(45nm)膜在300 nm处的光学透过率71.5%,280 nm处60.6%,电阻率1.48×10-2Ω.cm.ITO层的厚度影响Ga2O3/ITO/Ga2O3膜的光电性质.  相似文献   

9.
采用JGP300型超高真空磁控溅射系统,在蓝宝石(Al_2O_3)、p-Si和氧化铟锡(ITO)导电玻璃衬底上制备了ZnO薄膜。使用X射线衍射仪(XRD)、紫外分光光度计(UV)、原子力显微镜(AFM)分析了氧氩比对ZnO薄膜晶体结构、光学特性和表面形貌的影响。测试结果表明:ZnO薄膜均为单一六方纤锌矿结构,且均表现出c轴择优取向。随着氧氩比的减小,ZnO(002)衍射峰强度增大,衍射峰半高宽(FWHM)减小。氧氩比为1∶4条件下制备的ZnO薄膜结晶质量较好。随着氧氩比的增大,ZnO薄膜表面粗糙度先增大后减小。在可见光范围内(波长400~700 nm),氧氩比为3∶2条件下制备的ZnO薄膜,平均透过率超过70%。  相似文献   

10.
板式电势差计实验参数选择的讨论   总被引:1,自引:0,他引:1  
有二种参数选择,如在《普通物理实验》(电磁学部分)第3版中取R5=10Ω,R=0—5Ω,且放电电流要大于100mA:在《普通物理实验》第2版中取R5=1000Ω,R=0.5-10kΩ,且放电电流不大于10mA,比较二种参数选择的测量结果,指出参数选择对实验结果的影响及实验结果相差原因,提出测量干电池内阻所用最佳参数,从而达到提高板式电势差计测电池内阻精确度的目的.  相似文献   

11.
Language markedness is a common phenomenon in languages, and is reflected from hearing, vision and sense, i.e. the variation in the three aspects such as phonology, morphology and semantics. This paper focuses on the interpretation of markedness in language use following the three perspectives, i.e. pragmatic interpretation, psychological interpretation and cognitive interpretation, with an aim to define the function of markedness.  相似文献   

12.
The discovery of the prolific Ordovician Red River reservoirs in 1995 in southeastern Saskatchewan was the catalyst for extensive exploration activity which resulted in the discovery of more than 15 new Red River pools. The best yields of Red River production to date have been from dolomite reservoirs. Understanding the processes of dolomitization is, therefore, crucial for the prediction of the connectivity, spatial distribution and heterogeneity of dolomite reservoirs.The Red River reservoirs in the Midale area consist of 3~4 thin dolomitized zones, with a total thickness of about 20 m, which occur at the top of the Yeoman Formation. Two types of replacement dolomite were recognized in the Red River reservoir: dolomitized burrow infills and dolomitized host matrix. The spatial distribution of dolomite suggests that burrowing organisms played an important role in facilitating the fluid flow in the backfilled sediments. This resulted in penecontemporaneous dolomitization of burrow infills by normal seawater. The dolomite in the host matrix is interpreted as having occurred at shallow burial by evaporitic seawater during precipitation of Lake Almar anhydrite that immediately overlies the Yeoman Formation. However, the low δ18O values of dolomited burrow infills (-5.9‰~ -7.8‰, PDB) and matrix dolomites (-6.6‰~ -8.1‰, avg. -7.4‰ PDB) compared to the estimated values for the late Ordovician marine dolomite could be attributed to modification and alteration of dolomite at higher temperatures during deeper burial, which could also be responsible for its 87Sr/86Sr ratios (0.7084~0.7088) that are higher than suggested for the late Ordovician seawaters (0.7078~0.7080). The trace amounts of saddle dolomite cement in the Red River carbonates are probably related to "cannibalization" of earlier replacement dolomite during the chemical compaction.  相似文献   

13.
AcomputergeneratorforrandomlylayeredstructuresYUJia shun1,2,HEZhen hua2(1.TheInstituteofGeologicalandNuclearSciences,NewZealand;2.StateKeyLaboratoryofOilandGasReservoirGeologyandExploitation,ChengduUniversityofTechnology,China)Abstract:Analgorithmisintrod…  相似文献   

14.
理论推导与室内实验相结合,建立了低渗透非均质砂岩油藏启动压力梯度确定方法。首先借助油藏流场与电场相似的原理,推导了非均质砂岩油藏启动压力梯度计算公式。其次基于稳定流实验方法,建立了非均质砂岩油藏启动压力梯度测试方法。结果表明:低渗透非均质砂岩油藏的启动压力梯度确定遵循两个等效原则。平面非均质油藏的启动压力梯度等于各级渗透率段的启动压力梯度关于长度的加权平均;纵向非均质油藏的启动压力梯度等于各渗透率层的启动压力梯度关于渗透率与渗流面积乘积的加权平均。研究成果可用于有效指导低渗透非均质砂岩油藏的合理井距确定,促进该类油藏的高效开发。  相似文献   

15.
As an American modern novelist who were famous in the literary world, Hemingway was not a person who always followed the trend but a sharp observer. At the same time, he was a tragedy maestro, he paid great attention on existence, fate and end-result. The dramatis personae's tragedy of his works was an extreme limit by all means tragedy on the meaning of fearless challenge that failed. The beauty of tragedy was not produced on the destruction of life, but now this kind of value was in the impact activity. They performed for the reader about the tragedy on challenging for the limit and the death.  相似文献   

16.
本文叙述了对海南岛及其毗邻大陆边缘白垩纪到第四纪地层岩石进行古地磁研究的全部工作过程。通过分析岩石中剩余磁矢量的磁偏角及磁倾角的变化,提出海南岛白垩纪以来经历的构造演化模式如下:早期伴随顺时针旋转而向南迁移,后期伴随逆时针转动并向北运移。联系该地区及邻区的地质、地球物理资料,对海南岛上述的构造地体运动提出以下认识:北部湾内早期有一拉张作用,主要是该作用使湾内地壳显著伸长减薄,形成北部湾盆地。从而导致了海南岛的早期构造运动,而海南岛后期的构造运动则主要是受南海海底扩张的影响。海南地体运动规律的阐明对于了解北部湾油气盆地的形成演化有重要的理论和实际意义。  相似文献   

17.
There are numerous geometric objects stored in the spatial databases. An importance function in a spatial database is that users can browse the geometric objects as a map efficiently. Thus the spatial database should display the geometric objects users concern about swiftly onto the display window. This process includes two operations:retrieve data from database and then draw them onto screen. Accordingly, to improve the efficiency, we should try to reduce time of both retrieving object and displaying them. The former can be achieved with the aid of spatial index such as R-tree, the latter require to simplify the objects. Simplification means that objects are shown with sufficient but not with unnecessary detail which depend on the scale of browse. So the major problem is how to retrieve data at different detail level efficiently. This paper introduces the implementation of a multi-scale index in the spatial database SISP (Spatial Information Shared Platform) which is generalized from R-tree. The difference between the generalization and the R-tree lies on two facets: One is that every node and geometric object in the generalization is assigned with a importance value which denote the importance of them, and every vertex in the objects are assigned with a importance value,too. The importance value can be use to decide which data should be retrieve from disk in a query. The other difference is that geometric objects in the generalization are divided into one or more sub-blocks, and vertexes are total ordered by their importance value. With the help of the generalized R-tree, one can easily retrieve data at different detail levels.Some experiments are performed on real-life data to evaluate the performance of solutions that separately use normal spatial index and multi-scale spatial index. The results show that the solution using multi-scale index in SISP is satisfying.  相似文献   

18.
19.
The elongation method,originally proposed by Imamura was further developed for many years in our group.As a method towards O(N)with high efficiency and high accuracy for any dimensional systems.This treatment designed for one-dimensional(ID)polymers is now available for three-dimensional(3D)systems,but geometry optimization is now possible only for 1D-systems.As an approach toward post-Hartree-Fock,it was also extended to  相似文献   

20.
Various applications relevant to the exciton dynamics,such as the organic solar cell,the large-area organic light-emitting diodes and the thermoelectricity,are operating under temperature gradient.The potential abnormal behavior of the exicton dynamics driven by the temperature difference may affect the efficiency and performance of the corresponding devices.In the above situations,the exciton dynamics under temperature difference is mixed with  相似文献   

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