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1.
给出了As和P注入硅的电激活能与退火温度的关系.用这些结果和表示晶格去除率与退火温度的关系式,研究了损伤的晶格恢复和杂质电激活动力学,发现低剂量As注入硅,在退火过程中仅出现1~2个低的激活能.当注入剂量大于5×10~(15)cm~(-2)时,硅注入区转变成了无序层,退火过程中则出现无序层外延生长区、过渡区和电激活能区3个特征温区,并在激活能区可观察到2~3个激活能.当硅在300℃温度下注入As,注入剂量为1×10~(16)cm~(-2)时,注入层中未出现无序层,退火过程中仅有激活能区,在此区能测到3个激活能.  相似文献   

2.
本文研究了用全离子注入控制双极集成电路中晶体管电参数的一些基本条件。研究了磷注入发射区的条件:注入能量为50KeV,注入剂量为4×10~(16)/cm~2。退火条件为940℃,20分钟,氮气保护,基区采用二次硼叠加注入:浅硼注入和深硼注入。浅硼注入能量为60KeV,注入剂量为8×10~3/cm~2。深硼注入能量分别为120KeV、140KeV、160KeV、180KeV,注入剂量均为5×10~(13)/cm~2。退火为960℃,30分钟,氮气保护等温退火。研究了注入条件和退火条件与双极电路管芯电参数(如电流增益h_(FE),管子基极—发射极击穿电压BVebo。基区方块电阻R_□和管子特征频率f_(Τo))的关系。  相似文献   

3.
本文包括三个方面:(一)比较了用剥层椭偏光法和背散射法测得的注P~ 硅中的损伤分布.实验结果表明,当注入剂量为5×10~(14)/厘米~2、10~(15)/厘米~2及10~(10)/厘米~2时,注入区形成了不同厚度的非晶层,且由椭偏光法测得的非晶层厚度及分布区域与由背散射沟道分析法测得的符合很好;在注入剂量为2×10~(14)/厘米~2的较低剂量时,未形成非晶层,从椭偏光法测得的损伤峰位置亦与背散射法所得结果一致.(二)用椭偏光法研究了注As~ 硅表面层的离子注入增强腐蚀效应.文中提出了一种较精确地测量注入层腐蚀厚度的方法,并测得注As~ (剂量为10~(15)/厘米~2)的硅注入层在温度为43℃到45℃的23%稀释HF酸中增强腐蚀速率为6.5埃/分到22埃/分.(三)用椭偏光法研究了注入10~(15)/厘米~2As~ 的硅在500℃下的热退火过程.实验证实了离子注入引起的非晶层在热退火时发生固相外延.用剥层椭偏光法测量经过热退火后的注入区,发现△和ψ值都较正常硅的低,ψ最低可达9.2°,其原因还有待进一步研究.  相似文献   

4.
采用2Mev~4He~ 离子的卢瑟福背散射技术详细地研究了Xe在不锈钢中的扩散和释放过程,不锈钢衬底中的Xe是由离子注入引入的,注入的能量为30Kev,~(129)Xe~ 离子的剂量为2.8×10~(15)ions/cm~2。恒时退火累积分数释放额的测量表明,Xe在不锈钢中的迁移和释放可分为三个阶段。实验发现经Xe离子注入的不锈钢样品表面极易氧化,在退火温度为488℃——789℃的范围内,表面层的氧化将驱使Xe向衬底内部迁移。  相似文献   

5.
用Mev的硅、氧离子注入SI-GaAs形成了相互隔离的N-SI-N双导电层结构.6 MeV的Si离子注入半绝缘的GaAs,在950℃5s条件下进行快速退火,可以得到最佳电特性,在表面下2.8μm深处形成n~+深埋层.采用双能量的硅离子注入半绝缘GaAs:6 MeV(1×10~(14)cm~(-2))+80 key(5×10~(13)cm~(-2)),在950℃5s退火,然后用1.2MeV的氧离子注入该样品,注量为10~(10)~10~(11)cm~(-2)时,形成了上、下相互隔离的双导电层,隔离击穿电压为10~20V,该结构在600℃以下是稳定的.  相似文献   

6.
对 MBE-GaAs/Si 进行离子注入和退火.GaAs 外延层的厚度为0.9-2.0μm.Si离子的注入能量及剂量分别为1.2-2.8MeV,l×10~(14)-7×10~(15).cm~(-2).退火采用红外瞬态退火(850℃,15s)及白光退火(1050℃,8s).背散射沟道分析采用4.2MeV~7Li.实验表明,注入结合退火是改善 GaAs 外延层晶体质量的一种有效方法.注入剂量过大,由于正化学配比遭到破坏,外延生长终止.  相似文献   

7.
将C 离子注入硅衬底,衬底温度约为400℃,C 离子引出电压为45keV注入剂量为5×1017cm-2.经高温退火形成碳化硅沉淀,利用X射线光电子能谱(XPS),俄歇电子能谱(AES)及傅立叶变换红外吸收光谱(FTIR),对所形成的碳化硅埋层作了初步的分析.  相似文献   

8.
本文讨论了用S~ 注入掺铬的半绝缘GaAs衬底以制备N—GaAs薄层。目的是代替微波低噪声砷化镓肖特基势垒场效应管(SBFET)所需要的GaAs薄外延层。注入条件:能量100Kev,剂量1.5×10~(13)/cm~2,退火温度为825℃,退火时间15分钟。已经做出0.2~0.3μm厚的N型薄层,平均载流子浓度为5×10~(16)~1×10~(17)/cm~3。。载流子迁移率在2600~3400cm~2/V.S的范围。薄层厚度和载流子浓度的均匀性是好的。采用双注入即注入S~ 之后,再注入P~ 可以改善注入层的电特性。利用S~ 注入制备的N—GaAs薄层,已制出SBFET,其跨导和夹断电压可与气相外延薄层制备的SBFET相比拟。  相似文献   

9.
喇曼光谱及扫描镜徽区形貌象说明,E_u~+注入(注入能量350Kev,注入剂量2×10~(15) cm~(-2) )n 型单晶硅后,在表面可形成一连续非晶层.经过895℃快速热退火(RTA)可以消除注入损伤,Si 损伤区恢复完整;当快速退火温度为1285℃时,在硅表面存在 E_u 的表面偏析及表面增强喇曼散射(SERS)现象,我们对增强机理进行了讨论.  相似文献   

10.
本文用四探针法测量了在不同剂量和不同能量下的N~+注入Si后的薄层电阻率及其退火效应,结果表明,N~+注入Si的退火特性曲线为“W”形,曲线中的两个波谷是两个好的退火区:其中间的波峰是逆退火区,在退火温度为1080℃附近时,当注入剂量为1×10~(14)N~+/cm~2,注入能量为170kev和注入剂量为5×10~(14)N~+/cm~2注入能量为160 kev时,薄层电阻率都有急剧增大的趋势,最后,本文对上述这些实验结果进行了初步的分析和讨论。  相似文献   

11.
Language markedness is a common phenomenon in languages, and is reflected from hearing, vision and sense, i.e. the variation in the three aspects such as phonology, morphology and semantics. This paper focuses on the interpretation of markedness in language use following the three perspectives, i.e. pragmatic interpretation, psychological interpretation and cognitive interpretation, with an aim to define the function of markedness.  相似文献   

12.
The Williston Basin is a significant petroleum province, containing oil production zones that include the Middle Cambrian to Lower Ordovician, Upper Ordovician, Middle Devonian, Upper Devonian and Mississippian and within the Jurassic and Cretaceous. The oils of the Williston Basin exhibit a wide range of geochemical characteristics defined as "oil families", although the geochemical signature of the Cambrian Deadwood Formation and Lower Ordovician Winnipeg reservoired oils does not match any "oil family". Despite their close stratigraphic proximity, it is evident that the oils of the Lower Palaeozoic within the Williston Basin are distinct. This suggests the presence of a new "oil family" within the Williston Basin. Diagnostic geochemical signatures occur in the gasoline range chromatograms, within saturate fraction gas chromatograms and biomarker fingerprints. However, some of the established criteria and cross-plots that are currently used to segregate oils into distinct genetic families within the basin do not always meet with success, particularly when applied to the Lower Palaeozoic oils of the Deadwood and Winnipeg Formation.  相似文献   

13.
王慧 《科技信息》2008,(10):240-240
Wuthering Heights, Emily Bronte's only novel, was published in December of 1847 under the pseudonym Ellis Bell. The book did not gain immediate success, but it is now thought one of the finest novels in the English language. Catherine is the key character of this masterpiece, because everybody and everything center on her though she had a short life. We can understand this masterpiece better if we know Catherine well.  相似文献   

14.
The discovery of the prolific Ordovician Red River reservoirs in 1995 in southeastern Saskatchewan was the catalyst for extensive exploration activity which resulted in the discovery of more than 15 new Red River pools. The best yields of Red River production to date have been from dolomite reservoirs. Understanding the processes of dolomitization is, therefore, crucial for the prediction of the connectivity, spatial distribution and heterogeneity of dolomite reservoirs.The Red River reservoirs in the Midale area consist of 3~4 thin dolomitized zones, with a total thickness of about 20 m, which occur at the top of the Yeoman Formation. Two types of replacement dolomite were recognized in the Red River reservoir: dolomitized burrow infills and dolomitized host matrix. The spatial distribution of dolomite suggests that burrowing organisms played an important role in facilitating the fluid flow in the backfilled sediments. This resulted in penecontemporaneous dolomitization of burrow infills by normal seawater. The dolomite in the host matrix is interpreted as having occurred at shallow burial by evaporitic seawater during precipitation of Lake Almar anhydrite that immediately overlies the Yeoman Formation. However, the low δ18O values of dolomited burrow infills (-5.9‰~ -7.8‰, PDB) and matrix dolomites (-6.6‰~ -8.1‰, avg. -7.4‰ PDB) compared to the estimated values for the late Ordovician marine dolomite could be attributed to modification and alteration of dolomite at higher temperatures during deeper burial, which could also be responsible for its 87Sr/86Sr ratios (0.7084~0.7088) that are higher than suggested for the late Ordovician seawaters (0.7078~0.7080). The trace amounts of saddle dolomite cement in the Red River carbonates are probably related to "cannibalization" of earlier replacement dolomite during the chemical compaction.  相似文献   

15.
何延凌 《科技信息》2008,(4):258-258
Language is a means of verbal communication. People use language to communicate with each other. In the society, no two speakers are exactly alike in the way of speaking. Some differences are due to age, gender, statue and personality. Above all, gender is one of the obvious reasons. The writer of this paper tries to describe the features of women's language from these perspectives: pronunciation, intonation, diction, subjects, grammar and discourse. From the discussion of the features of women's language, more attention should be paid to language use in social context. What's more, the linguistic phenomena in a speaking community can be understood more thoroughly.  相似文献   

16.
Location based services is promising due to its novel working style and contents.A software platform is proposed to provide application programs of typical location based services and support new applications developing efficiently. The analysis shows that this scheme is easy implemented, low cost and adapt to all kinds of mobile nework system.  相似文献   

17.
以AC-13级配为基础,将橡胶颗粒代替部分集料掺入混合料中,以低温弯曲试验为评价方法对不同橡胶颗粒掺量下沥青混合料的低温抗裂性进行研究,并引入应变能密度值对混合料的低温抗裂性进行综合评价.试验结果表明:橡胶颗粒沥青混合料试件的破坏微应变均超过2 300,满足冬寒区的技术指标;无论是否掺加橡胶颗粒,随着温度的下降,沥青混合料破坏时的最大弯拉强度增大,弯拉应变降低,劲度模量增大;弯曲应变能密度在胶粒掺量为1%左右时具有较大的弯曲应变能密度值,此时橡胶颗粒沥青混合料具有较好的低温抗裂性.  相似文献   

18.
AcomputergeneratorforrandomlylayeredstructuresYUJia shun1,2,HEZhen hua2(1.TheInstituteofGeologicalandNuclearSciences,NewZealand;2.StateKeyLaboratoryofOilandGasReservoirGeologyandExploitation,ChengduUniversityofTechnology,China)Abstract:Analgorithmisintrod…  相似文献   

19.
理论推导与室内实验相结合,建立了低渗透非均质砂岩油藏启动压力梯度确定方法。首先借助油藏流场与电场相似的原理,推导了非均质砂岩油藏启动压力梯度计算公式。其次基于稳定流实验方法,建立了非均质砂岩油藏启动压力梯度测试方法。结果表明:低渗透非均质砂岩油藏的启动压力梯度确定遵循两个等效原则。平面非均质油藏的启动压力梯度等于各级渗透率段的启动压力梯度关于长度的加权平均;纵向非均质油藏的启动压力梯度等于各渗透率层的启动压力梯度关于渗透率与渗流面积乘积的加权平均。研究成果可用于有效指导低渗透非均质砂岩油藏的合理井距确定,促进该类油藏的高效开发。  相似文献   

20.
As an American modern novelist who were famous in the literary world, Hemingway was not a person who always followed the trend but a sharp observer. At the same time, he was a tragedy maestro, he paid great attention on existence, fate and end-result. The dramatis personae's tragedy of his works was an extreme limit by all means tragedy on the meaning of fearless challenge that failed. The beauty of tragedy was not produced on the destruction of life, but now this kind of value was in the impact activity. They performed for the reader about the tragedy on challenging for the limit and the death.  相似文献   

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