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1.
提出了一种可显著改善室温下直流磁控溅射氧化铟锡(ITO)薄膜晶体结构、光学和电学性能的后处理方法,将ITO薄膜分别置于氩气、氨气和氧气中进行低温等离子体退火处理.同单纯的退火处理相比,在3种气氛下,低温等离子退火均可使室温溅射沉积的ITO薄膜在相对低的温度(150℃)时,由非晶态转变为晶态,其相应的电学和光学性能都有较大的提高.实验证明:氨气气氛下退火温度为350℃时,玻璃衬底上ITO薄膜在波长为600 nm的可见光区内的透光率可达88.5%;薄膜表面的针刺很少,表面平整度小于2.08 nm;方块电阻由348.7Ω降到66.8Ω,相应的电阻率由4.1×10-3Ω.cm降到7.9×10-4Ω.cm.该方法更能满足柔性有机聚合衬底的ITO薄膜对低温退火的要求.  相似文献   

2.
ITO薄膜是目前应用最为广泛的透明导电薄膜,通过在ITO中掺杂其他金属可以进一步改善ITO薄膜的光学和电学性能。本文采用射频(RF)磁控溅射法制备了掺钨氧化铟锡(ITO∶W)透明导电薄膜,研究了薄膜厚度、表面形貌、晶体结构以及光学和电学性能与各溅射参数之间的关系。当溅射功率大于40 W时,制备的ITO∶W薄膜为方铁锰矿结构的多晶薄膜,此时薄膜表面光滑平整而且具有良好的结晶性。在基板温度320℃、溅射功率80 W、溅射时间15 min、工作气压0.6 Pa条件下得到了光学和电学性能优良的ITO∶W薄膜,其方块电阻为10.5Ω/、电阻率为4.41×10-4Ω·cm,对应的载流子浓度为2.23×1020 cm-3、迁移率为27.3 cm2·V-1·s-1、可见光(400~700 nm)范围内平均透射率为90.97%。此外,本研究还发现通过调节基板温度影响氧元素的状态可以改变ITO∶W薄膜的电学性能。  相似文献   

3.
采用溶胶-凝胶旋转涂膜法,以InCl3·4H2O和SnCl4·5H2O为前驱物在玻璃基片上制备了氧化铟锡(ITO)薄膜材料,研究掺锡浓度、涂膜层数、热处理温度和热处理时间等工艺条件对ITO薄膜光电特性的影响.实验结果表明,ITO薄膜的方块电阻和可见光透射率都与掺锡浓度、涂膜层数、热处理温度和时间等因素有关,最佳参数为锡掺杂量12wt%,热处理温度和时间分别为450℃和1h,薄膜层数为6层.最佳ITO薄膜的方块电阻为185Ω/□,可见光平均透射率为91.25%.  相似文献   

4.
为了提高半导体发光二极管封装的可靠性与焊接性能,避开传统的电极层陶瓷/金属的机械性能匹配问题,设计了两种电极层的结构:一种是多层膜系结构,另一种是氧化铟锡(ITO)薄膜.研究发现:多层膜系结构的电阻率为3×10-6 Ω·cm,平均抗拉强度为4.22 MPa,膜层表面缺陷较少, 致密性好,焊接性能好;ITO薄膜在紫外辐照条件下制备样品的电阻率、表面形貌和生长取向明显优于未经紫外辐照的样品,在线紫外辐照下最低方阻为5 Ω,电阻率为2.5×10-4 Ω·cm,平均抗拉强度为5.3 MPa ,表面缺陷少,致密度好,趋于[222]晶面的择优取向.多层膜系结构的电阻率明显优于ITO薄膜,但平均抗拉强度不如ITO薄膜.  相似文献   

5.
以InCl3·4H2O和SnCl4·5H2O为主要原料,采用溶胶一凝胶法和旋转涂膜工艺,在玻璃基片上制备掺锡氧化铟透明导电薄膜(ITO).用紫外-可见透射光谱和四探针技术,研究了不同掺Sn量、不同热处理温度和热处理时间对薄膜光学和电学性能的影响.实验结果表明,最佳工艺条件为掺Sn量11%,热处理温度480℃,热处理时间60min.在最佳工艺条件下制备的ITO薄膜可见光透过率达82%以上,薄膜的方块阻为390Ω/□.  相似文献   

6.
以掺锡氧化铟陶瓷靶材作为溅射源,采用磁控溅射技术在玻璃衬底上制备了氧化铟锡(ITO)透明导电薄膜,通过X-射线衍射仪(XRD)和X-射线光电子能谱仪(XPS)测试表征,研究了生长温度对薄膜结晶性质和微结构性能的影响.结果表明:所沉积的ITO薄膜均具有体心立方的多晶结构,其生长特性和微结构性能明显受到生长温度的影响.生长温度升高时,薄膜(222)晶面的织构系数T_(C(222))和晶粒尺寸先增后减,而晶格应变和位错密度则先减后增.当生长温度为500 K时,ITO样品的织构系数T_(C(222))最高(1.5097)、晶粒尺寸最大(52.8 nm)、晶格应变最低(1.226×10~(-3))、位错密度最小(3.409×10~(14)m~(-2)),具有最佳的(222)晶面择优取向性和微结构性能.  相似文献   

7.
真空退火处理对光敏薄膜及聚合物太阳电池性能的影响   总被引:4,自引:1,他引:3  
采用掺锡氧化铟玻璃作为衬底,制备了聚[2-甲氧基-5-(2-乙基己氧基)-1-4-苯撑乙烯]光敏薄膜及其器件,研究了退火处理对薄膜形貌和光电性能的影响.透射光谱和AFM研究表明,退火处理改善了薄膜的表面形貌、降低了薄膜的光学能隙.另外,通过分析器件伏安特性发现,退火处理有助于提高薄膜的电导率和载流子迁移率.这些实验结果对于提高聚合物太阳电池的能量转换效率、改善器件的光伏性能具有非常重要的意义.  相似文献   

8.
采用常压烧结方法制备了Ga2O3陶瓷靶,用X射线衍射仪、金相显微镜对Ga2O3陶瓷靶的结构和形貌进行了研究.用射频磁控溅射Ga2O3陶瓷靶材和直流磁控溅射ITO(锡铟氧化物)靶材分别制备了Ga2O3薄膜、Ga2O3/ITO/Ga2O3膜,用紫外-可见分光光度计、四探针测试仪对Ga2O3薄膜、Ga2O3/ITO/Ga2O3膜的光学透过率和电阻率进行了表征.Ga2O3薄膜不导电,光学带隙5.1 eV;Ga2O3(45 nm)/ITO(14 nm)/Ga2O3(45nm)膜在300 nm处的光学透过率71.5%,280 nm处60.6%,电阻率1.48×10-2Ω.cm.ITO层的厚度影响Ga2O3/ITO/Ga2O3膜的光电性质.  相似文献   

9.
介电常数近零(Epsilon-near-zero, ENZ)复合超表面是一种由ENZ材料和金属纳米单元构成的超结构,因其可有效增强光场与物质相互作用而受到关注.本文设计并制备了基于氧化铟锡(Indium Tin Oxide, ITO)薄膜和金属纳米结构的非线性超表面,实验研究了该ENZ复合超表面宽波段偏振相关的非线性光学响应特性.与单一ITO薄膜相比,该ENZ复合超表面的非线性吸收系数和非线性折射率提高了2个数量级,并且可以有效增强三次谐波的产生.通过改变入射光的偏振状态,可以实现该复合超表面非线性折射和非线性吸收系数符号和大小的调控,并在x偏振入射条件下观察到最大~1.97 THz的蓝移.研究结果表明,该ENZ复合超表面可为发展高集成微纳光电器件提供材料平台,并可为微纳尺度下光场高效调控提供超快全光手段.  相似文献   

10.
板式电势差计实验参数选择的讨论   总被引:1,自引:0,他引:1  
有二种参数选择,如在《普通物理实验》(电磁学部分)第3版中取R5=10Ω,R=0—5Ω,且放电电流要大于100mA:在《普通物理实验》第2版中取R5=1000Ω,R=0.5-10kΩ,且放电电流不大于10mA,比较二种参数选择的测量结果,指出参数选择对实验结果的影响及实验结果相差原因,提出测量干电池内阻所用最佳参数,从而达到提高板式电势差计测电池内阻精确度的目的.  相似文献   

11.
Language markedness is a common phenomenon in languages, and is reflected from hearing, vision and sense, i.e. the variation in the three aspects such as phonology, morphology and semantics. This paper focuses on the interpretation of markedness in language use following the three perspectives, i.e. pragmatic interpretation, psychological interpretation and cognitive interpretation, with an aim to define the function of markedness.  相似文献   

12.
何延凌 《科技信息》2008,(4):258-258
Language is a means of verbal communication. People use language to communicate with each other. In the society, no two speakers are exactly alike in the way of speaking. Some differences are due to age, gender, statue and personality. Above all, gender is one of the obvious reasons. The writer of this paper tries to describe the features of women's language from these perspectives: pronunciation, intonation, diction, subjects, grammar and discourse. From the discussion of the features of women's language, more attention should be paid to language use in social context. What's more, the linguistic phenomena in a speaking community can be understood more thoroughly.  相似文献   

13.
The discovery of the prolific Ordovician Red River reservoirs in 1995 in southeastern Saskatchewan was the catalyst for extensive exploration activity which resulted in the discovery of more than 15 new Red River pools. The best yields of Red River production to date have been from dolomite reservoirs. Understanding the processes of dolomitization is, therefore, crucial for the prediction of the connectivity, spatial distribution and heterogeneity of dolomite reservoirs.The Red River reservoirs in the Midale area consist of 3~4 thin dolomitized zones, with a total thickness of about 20 m, which occur at the top of the Yeoman Formation. Two types of replacement dolomite were recognized in the Red River reservoir: dolomitized burrow infills and dolomitized host matrix. The spatial distribution of dolomite suggests that burrowing organisms played an important role in facilitating the fluid flow in the backfilled sediments. This resulted in penecontemporaneous dolomitization of burrow infills by normal seawater. The dolomite in the host matrix is interpreted as having occurred at shallow burial by evaporitic seawater during precipitation of Lake Almar anhydrite that immediately overlies the Yeoman Formation. However, the low δ18O values of dolomited burrow infills (-5.9‰~ -7.8‰, PDB) and matrix dolomites (-6.6‰~ -8.1‰, avg. -7.4‰ PDB) compared to the estimated values for the late Ordovician marine dolomite could be attributed to modification and alteration of dolomite at higher temperatures during deeper burial, which could also be responsible for its 87Sr/86Sr ratios (0.7084~0.7088) that are higher than suggested for the late Ordovician seawaters (0.7078~0.7080). The trace amounts of saddle dolomite cement in the Red River carbonates are probably related to "cannibalization" of earlier replacement dolomite during the chemical compaction.  相似文献   

14.
理论推导与室内实验相结合,建立了低渗透非均质砂岩油藏启动压力梯度确定方法。首先借助油藏流场与电场相似的原理,推导了非均质砂岩油藏启动压力梯度计算公式。其次基于稳定流实验方法,建立了非均质砂岩油藏启动压力梯度测试方法。结果表明:低渗透非均质砂岩油藏的启动压力梯度确定遵循两个等效原则。平面非均质油藏的启动压力梯度等于各级渗透率段的启动压力梯度关于长度的加权平均;纵向非均质油藏的启动压力梯度等于各渗透率层的启动压力梯度关于渗透率与渗流面积乘积的加权平均。研究成果可用于有效指导低渗透非均质砂岩油藏的合理井距确定,促进该类油藏的高效开发。  相似文献   

15.
As an American modern novelist who were famous in the literary world, Hemingway was not a person who always followed the trend but a sharp observer. At the same time, he was a tragedy maestro, he paid great attention on existence, fate and end-result. The dramatis personae's tragedy of his works was an extreme limit by all means tragedy on the meaning of fearless challenge that failed. The beauty of tragedy was not produced on the destruction of life, but now this kind of value was in the impact activity. They performed for the reader about the tragedy on challenging for the limit and the death.  相似文献   

16.
AcomputergeneratorforrandomlylayeredstructuresYUJia shun1,2,HEZhen hua2(1.TheInstituteofGeologicalandNuclearSciences,NewZealand;2.StateKeyLaboratoryofOilandGasReservoirGeologyandExploitation,ChengduUniversityofTechnology,China)Abstract:Analgorithmisintrod…  相似文献   

17.
There are numerous geometric objects stored in the spatial databases. An importance function in a spatial database is that users can browse the geometric objects as a map efficiently. Thus the spatial database should display the geometric objects users concern about swiftly onto the display window. This process includes two operations:retrieve data from database and then draw them onto screen. Accordingly, to improve the efficiency, we should try to reduce time of both retrieving object and displaying them. The former can be achieved with the aid of spatial index such as R-tree, the latter require to simplify the objects. Simplification means that objects are shown with sufficient but not with unnecessary detail which depend on the scale of browse. So the major problem is how to retrieve data at different detail level efficiently. This paper introduces the implementation of a multi-scale index in the spatial database SISP (Spatial Information Shared Platform) which is generalized from R-tree. The difference between the generalization and the R-tree lies on two facets: One is that every node and geometric object in the generalization is assigned with a importance value which denote the importance of them, and every vertex in the objects are assigned with a importance value,too. The importance value can be use to decide which data should be retrieve from disk in a query. The other difference is that geometric objects in the generalization are divided into one or more sub-blocks, and vertexes are total ordered by their importance value. With the help of the generalized R-tree, one can easily retrieve data at different detail levels.Some experiments are performed on real-life data to evaluate the performance of solutions that separately use normal spatial index and multi-scale spatial index. The results show that the solution using multi-scale index in SISP is satisfying.  相似文献   

18.
In the 19th century the society was controlled by men, and women were just appendants of them, they had not any rights and freedom. But Jane was an exception, she showed some characteristics of early feminist. Jane showed her characteristics of feminism in three aspects: rebellion, equality, and independence. These characteristics were helpful to her success, and feminism is the only way out for women of that time.  相似文献   

19.
正The periodicity of the elements and the non-reactivity of the inner-shell electrons are two related principles of chemistry,rooted in the atomic shell structure.Within compounds,Group I elements,for example,invariably assume the+1 oxidation state,and their chemical properties differ completely from those of the p-block elements.These general rules govern our understanding of chemical structures and reactions.Using first principles calcula-  相似文献   

20.
We have developed an adiabatic connection to formulate the ground-state exchange-correlation energy in terms of pairing matrix linear fluctuations.This formulation of the exchange-correlation energy opens a new channel for density functional approximations based on the many-body perturbation theory.We illustrate the potential of such approaches with an approximation based on the particle-particle Random Phase Approximation(pp-RPA).This re-  相似文献   

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