| 磁控溅射制备ZnO:Ag薄膜及其室温光致发光特性 |
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| 引用本文： | 薛华,陈彦,张国恒.磁控溅射制备ZnO:Ag薄膜及其室温光致发光特性[J].兰州大学学报(自然科学版),2009,45(2). |
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| 作者姓名： | 薛华 陈彦 张国恒 |
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| 作者单位： | 西北民族大学,电子材料国家民族事务委员会重点实验室,兰州,730000 |
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| 基金项目： | 国家民族事务委员会科研项目，甘肃省自然科学基金，西北民族大学中青年科研基金 |
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| 摘 要： | 采用射频磁控溅射法在玻璃衬底上制备出含Ag量不同的Ag掺杂ZnO:Ag薄膜,利用X射线衍射仪、X射线光电子能谱仪及荧光分光光度汁研究了不同Ag掺杂量对ZnO薄膜结构及荧光发射谱的影响.在室温下测量了样品的光致发光谱,所有样品都出现了446nm左右的蓝色发光峰,在掺杂以后的样品中观察到波长位于368 nm左右的较强紫外发射.结合x射线衍射仪、光电子能谱仪等的测量结果,分析认为,样品紫外光发射的显著增强源于Ag掺杂以后在晶粒间界形成的大量激子,而蓝光的发射来源于Zn空位.
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| 关 键 词： | ZnO薄膜 射频磁控溅射 X射线衍射 光致发光 |
Photoluminescence properties of ZnO:Ag thin films grown by magnetron sputtering technique |
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| XUE Hua,CHEN Yan,ZHANG Guo-heng.Photoluminescence properties of ZnO:Ag thin films grown by magnetron sputtering technique[J].Journal of Lanzhou University(Natural Science),2009,45(2). |
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| Authors: | XUE Hua CHEN Yan ZHANG Guo-heng |
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| Institution: | Key Laboratory for Electronic Materials with the State National Affairs Commission of China;Northwest University for Nationality;Lanzhou 730030;China |
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| Abstract: | ZnO and Ag-doped ZnO thin films were prepared on glass substrates by the radio frequency co-reactive magnetron sputtering technique,and the effect of the Ag doping on the microstructure and the luminescence properties of the ZnO thin films were studied by X-ray diffractometry(XRD),X-ray photoelectron spectroscopy(XPS)and fluorescence spectrophotometer.The photoluminescence(PL)spectrum of the four samples were measured at room temperature.Two peaks were observed from the PL spectra of the samples.The violet ... |
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| Keywords: | ZnO thin film RF magnetron sputtering X-ray diffraction photoluminescence |
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