沉积温度对取向纳米ZnO阵列形貌结构的影响

采用化学气相沉积方法，以ZnO及无定形碳粉末为原料，高纯Ar气为载气，在单晶硅和Al2O3基底上，用化学气相沉积技术，在750—1050℃范围内制备了取向的纳米ZnO晶体阵列．用扫描电子显微镜（SEM）、透射电子显微镜（TEM）和荧光光谱（PL）等方法对ZnO薄膜阵列的结构和性能进行了表征，发现沉积温度对取向ZnO纳米阵列的生长结构和光致发光特性有重要影响，并就生长条件对纳米ZnO晶体阵列性能的影响因素进行了讨论分析．     

温度对硅纳米线生长结构的影响

以硅烷为反应气体，温度为850～1100℃，在（100）取向的单晶硅片上，采用化学气相沉积法生长了一维硅纳米线．用扫描电子显微镜观察了硅纳米线的表面形貌，用X射线衍射仪研究了硅纳米线生长结构与反应温度的关系．分析了不同实验条件对硅纳米线生长结构的影响，并对一维硅纳米线与块体硅的光致发光（PL）特性进行了分析比较．     

纳米硅薄膜太阳能电池的制备及特性研究

主要讲述了单晶体硅电池、多晶体硅电池、微晶硅电池及薄膜硅电池的性质及特点,同时介绍了硅太阳能电池的发展历程;讲述了纳米硅薄膜太阳能电池的等离子体增强化学气相沉积制备及沉积理论;论证了H稀释浓度对硅纳米薄膜太阳电池性能的影响;阐述了沉积气压和衬底温度对薄膜性能的影响;最后讲述了透明导电薄膜在薄膜太阳能电池中的应用情况及光学性质。     

纳米硅簿膜制备工艺的研究

采用等离子体增强化学气相淀积（ＰＥＣＶＤ）技术，在超高真空系统中，使用大量氢稀释的硅烷作为反应气体，利用Ｒ．Ｆ．＋Ｄ．Ｃ．双重功率源激励，通过低温下硅在氢等离子体放电中的化学输运直接淀积纳米硅薄膜。根据对薄膜样品结构的测定及其制各工艺条件，分析讨论了各工艺参数对淀积后薄膜的影响，从而使纳米硅簿膜的制备工艺趋于完善。     

SnO_2纳米线表面形貌影响因素研究

采用化学气相沉积法在经硝酸镍水溶液处理过的硅衬底上,通过控制生长条件,制备出了二氧化锡的几种纳米结构。利用扫描电子显微镜（SEM）对样品的表面形貌进行了表征,并在此基础上对CVD过程中影响产物形貌的各因素进行了讨论分析,为实现SnO2纳米线的可控生长提供了工艺参数。     

纳米硅/P3HT复合薄膜的制备及光学特性

采用等离子体增强化学气相沉积技术和旋涂法相结合制备了纳米硅/P3HT复合薄膜.利用Raman散射、紫外-可见吸收光谱(UV-Vis)和光致发光谱(PL)等技术对复合薄膜的微观结构及光学特性进行了分析.结果表明:氢流量的增加,可以有效钝化硅中的缺陷,提高纳米硅薄膜的晶化度;复合薄膜中纳米硅的引入改善了P3HT在短波长范围的吸收能力,但存在与P3HT辐射发光相竞争的过程;对复合薄膜的光致发光机制进行了分析.     

nc-Si∶H薄膜的制备及特性表征

利用等离子体化学气相沉积技术制备纳米硅(nc-Si∶H)薄膜材料,并用X射线衍射仪(XRD)、原子力显微镜(AFM)、Raman光谱仪对成膜的状态进行了表征。用红外吸收光谱仪对不同工艺薄膜的结构进行了分析,研究了偏压对薄膜结构的影响,为纳米硅薄膜在光电子方面的应用提供可靠的依据。     

纳米硅薄膜制备工艺的研究

采用等离子体增强化学气相淀积（ＰＥＣＶＤ）技术，在超高真空系统中，使用大量氢稀释的硅烷作为反应气体，利用Ｒ．Ｆ．＋Ｄ．Ｃ．双重功率源激励，通过低温下硅在氢等离子体放电中的化学输运直接淀积纳米硅薄膜，根据对薄膜样品结构的测定及其制备工艺条件，分析讨论了各工艺参数对淀积后薄膜的影响，从而使纳米硅薄膜的制备工艺趋于完善。     

取向ZnO纳米线阵列的生长机理及发光特性

用化学气相沉积法制备了圾向纳米氧化锌（ZnO）阵列；用扫描电镜（SEM）和透射电镜（TEM）观察了制备的纳米ZnO的形貌结构;用荧光光谱仪（PL）分析了样品的发光特性；以气-液-固（VLS）生长模型和Ehrlich-Schwoebel势垒理论解释讨论了ZnO纳米线的生长结构与机理。     

金刚石声表面波器件的研制

对ZnO／IDT／金石多层结构高频声表面波滤波器进行模拟设计、样件制备和测量．利用热丝化学气相沉积方法，在抛光Si基底沉积致密、光滑的CVD金刚石膜；采用磁控溅射法在金刚石薄膜上制备C轴取向的氧化钎压电薄膜．研制的ZnO／IDT／金刚石／硅结构SAW滤波器，又指换能器（IDT）指宽1．7μm，SAW滤波器频率达到1．4GHz．     

计算机控制的PCVD系统

对ＬＬ－ＰＣＶＤ（真空负载保护等离子体化学气相沉积系统）进行了计算机控制的改进，改进后的设备在沉积过程中各路源气体可进行自动控制。在改进后的设备上采用逐层生长法制备了ｎｃ－Ｓｉ∶Ｈ薄膜。讨论了关键的技术问题     

氮化硅薄膜的PECVD沉积工艺与绝缘耐压性能

用PECVD法制备氮化硅介质薄膜 ,分析了沉积温度、本底真空度及气体流量比等工艺参数对氮化硅薄膜绝缘耐压性能的影响 ,制备出 0 .4 μm的性能良好的氮化硅介质绝缘膜     

纳米晶铁纤维的制备及其电磁参数的测量

用磁场引导的MOCVD法制备了纳米晶铁纤维,用SEM、XRD表征了纳米晶铁纤维的结构,利用反射—传输法测量了此铁纤维的电磁参数。比较模拟和试验结果发现:应用各向同性材料电磁参数的测量方法,可测量各向异性材料的电磁参数,此参数可用指导雷达波吸收涂层的设计。     

Bulk glasses and ultrahard nanoceramics based on alumina and rare-earth oxides

Although often regarded as a network-former in conventional silicate glasses, Al(2)O(3) alone cannot be obtained as a bulk glass. Until now, glasses comprising continuously linked [AlO(x)] polyhedra have been prepared in only a few systems under very fast cooling conditions, which limits their dimensions to a few millimetres. Yet it is desirable to prepare bulk, or monolithic, alumina-rich glasses, with the prospect of superior mechanical, chemical and optical properties. Here we report a novel process for preparing very-high-alumina glasses and nanoscale glass-ceramics. Fully dense bulk articles in net shape are obtained through viscous sintering of glass microbeads. Additional heat treatment of the consolidated glasses leads to fully crystallized transparent glass-converted nanoceramics with a hardness similar to that of alumina. This method avoids the impracticably high applied pressures (more than 1 GPa) that have been required in most cases to prepare nanocrystalline ceramics by sintering, owing to the concurrent nature of densification and grain growth under pressureless conditions. The reported techniques can be extended to form glasses and nanoceramics in other oxide systems that do not include a conventional glass-forming component.     

nc-Si:H薄膜的微结构特征与光学特性

利用射频等离子体增强型化学气相沉积(RF-PECVD)工艺,以SiH4和H2作为反应气体源,在玻璃和石英衬底上制备了氢化纳米晶硅(nc-Si:H)薄膜.采用Raman散射谱、原子力显微镜(AFM)、透射光谱方法对在不同衬底温度与不同H2稀释比条件下沉积生长薄膜的微结构和光学特性进行了实验研究.结果表明,nc-Si:H薄膜的晶粒尺寸为2.6～7.0nm和晶化率为45%～48%.在一定反应压强、衬底温度和射频功率下,随着H2稀释比的增加,薄膜的沉积速率降低,但晶化率和晶粒尺寸均有所增加,相应光学吸收系数增大.而在一定反应压强、射频功率和H2稀释比下,随着衬底温度的增加,沉积速率增加,薄膜晶化率提高.     

碳化硅薄膜的光学特性研究

采用螺旋波等离子体增强化学气相沉积(HW-PECVD)技术制备了纳米晶碳化硅(nc-SiC)薄膜,利用傅立叶红外吸收谱(FTIR)、X射线衍射谱(XRD)、紫外-可见透射光谱(UV-Vis)和光致发光谱(PL)对薄膜的结构、光学带隙、发光特性等进行了测量和分析.结果表明,所沉积薄膜主要以Si-C键合结构存在,薄膜中包含有立方结构的3C-SiC晶粒,光学带隙2.59 eV,室温下薄膜表现出强的可见蓝色光致发光,发光峰位随氙灯激发波长的增加呈现红移现象,并将此发光归因于量子限制效应作用的结果.     

Patterning by controlled cracking

Crack formation drives material failure and is often regarded as a process to be avoided. However, closer examination of cracking phenomena has revealed exquisitely intricate patterns such as spirals, oscillating and branched fracture paths and fractal geometries. Here we demonstrate the controlled initiation, propagation and termination of a variety of channelled crack patterns in a film/substrate system comprising a silicon nitride thin film deposited on a silicon substrate using low-pressure chemical vapour deposition. Micro-notches etched into the silicon substrate concentrated stress for crack initiation, which occurred spontaneously during deposition of the silicon nitride layer. We reproducibly created three distinct crack morphologies--straight, oscillatory and orderly bifurcated (stitchlike)--through careful selection of processing conditions and parameters. We induced direction changes by changing the system parameters, and we terminated propagation at pre-formed multi-step crack stops. We believe that our patterning technique presents new opportunities in nanofabrication and offers a starting point for atomic-scale pattern formation, which would be difficult even with current state-of-the-art nanofabrication methodologies.     

Epitaxial core-shell and core-multishell nanowire heterostructures

Semiconductor heterostructures with modulated composition and/or doping enable passivation of interfaces and the generation of devices with diverse functions. In this regard, the control of interfaces in nanoscale building blocks with high surface area will be increasingly important in the assembly of electronic and photonic devices. Core-shell heterostructures formed by the growth of crystalline overlayers on nanocrystals offer enhanced emission efficiency, important for various applications. Axial heterostructures have also been formed by a one-dimensional modulation of nanowire composition and doping. However, modulation of the radial composition and doping in nanowire structures has received much less attention than planar and nanocrystal systems. Here we synthesize silicon and germanium core-shell and multishell nanowire heterostructures using a chemical vapour deposition method applicable to a variety of nanoscale materials. Our investigations of the growth of boron-doped silicon shells on intrinsic silicon and silicon-silicon oxide core-shell nanowires indicate that homoepitaxy can be achieved at relatively low temperatures on clean silicon. We also demonstrate the possibility of heteroepitaxial growth of crystalline germanium-silicon and silicon-germanium core-shell structures, in which band-offsets drive hole injection into either germanium core or shell regions. Our synthesis of core-multishell structures, including a high-performance coaxially gated field-effect transistor, indicates the general potential of radial heterostructure growth for the development of nanowire-based devices.     

纳米硅薄膜的拉曼谱研究

通过等离子增强化学汽相沉积法,制备了本征和掺磷的氢化纳米硅薄膜（ｎｃ－Ｓｉ：Ｈ）研究了晶粒尺寸和掺杂浓度对纳米硅薄膜拉曼谱的影响。结果表明晶粒变小和掺杂浓度增加都使纳米晶粒的ＴＯ模峰位逐渐偏离声子限制模型的计算值。Ｘ－射线衍射和透射电镜像的结果表明晶粒变小导致硅晶粒应力增加,而掺杂使晶粒内部杂质和缺陷增多,这些因素破坏了晶粒内晶格的平移对称性,进一步减小声子的平均自由程,导致实验值偏离理论计算值,