微观形貌扫描隧道显微镜检测的性能分析

对自行研制的双功能扫描隧道显微镜（ＳＴＭ）的性能特点进行了研究，探讨了影响其纵、横向分辨率的有关因素；对其用于超精微观表面形貌的检测精度进行了分析，提出了其灵敏度、分辨率及视场连续可调的原理；并通过实验检测了原子级分辨率和纳米级分辨率的微观表面形貌，探讨了用ＳＴＭ在不辨率条件下对于微观形貌进行检测的可行性。     

基于分形特征的表面微观形貌模拟和分析

用Ｗ－Ｍ模型模拟了分形表面并用所设计的分形算法对其进行分形分析，分析结果与理论值相符，最后，用该分形算法对ＳＴＭ检测的超精密表面微观形貌进行分析．     

热红外低比辐射率高漫反射比表面的分形表征

采用ＤＦＢＩＲ模型分析了热红外低比辐射率高漫反射比粗糙表面的宏观分维特性，利用ＳＥＭ表面形貌图和图像处理系统Ｓ６００计算了宏观分维数，为了描述本粗糙表面的微观分形特征，采用Ｗ－Ｍ函数作为其数学模型，了随机分形算法，对粗糙表面ＳＴＭ微观微形貌进行了分形并进行微观分维数，研究结果表明，热红外低比辐射率高漫反射比粗糙表面不仅菜表面，而且是多尺度分形表面，分维数Ｄ与比辐射率及漫反射比ＤＲ均成正相关关系，红     

基于隧道效应的nm级三维轮廓仪的研究

介绍两种不同结构形式的基于电子隧道效应的ｎｍ级三维轮廓仪．其纵向分辨率可达００２ｎｍ，横向分辨率可达０２ｎｍ，扫描范围分别达到４０μｍ×４０μｍ和１４０μｍ×１４０μｍ．可直接对φ５０ｍｍ和φ１３０ｍｍ的大尺寸样品表面进行ｎｍ级的超微观形貌检测与分析．还给出了高定向石墨表现原子图像及一些超精密表面的超微观形貌测量的结果     

STM式三维nm级轮廓仪的研究

基于ＳＴＭ式三维ｎｍ级轮廓仪的检测原理、检测系统，研究了与其相关的检测技术．该轮廓仪可直接测量较大工件，扫描范围为１４０μｍ×１４０μｍ，分辨率达ｎｍ级．最后对工作台扫描非线性及扫描控制技术进行讨论，并利用多项式拟合法补偿工作台扫描的非线性误差，进而提出了一种平滑反馈扫描技术．     

用于超精微观形貌检测的STM研制

研制了一种具有原子级和纳米级分辨率的宽范围扫描隧道显微镜（ＳＴＭ），通过理论分析和实验论证，介绍纳米级精度微进给机构的原理及特点，研究了一种适于该仪器的简易、有效的隔振系统及探针夹持方法，并对夹持精度进行分析，实验结果表明该仪器可用于原子级与纳米级精度微观形貌的检测。     

STM用于超精机械加工表面微观形貌检测与分析的研究

通过自行研制扫描隧道显微镜(Scanning Tunneling Microscope，以下简称STM)检测了超精机械加工试件表面微观形貌，生成三维立体形貌图，对微观形貌图进行分析，了解相关的加工机理及微观表面形貌缺陷发生的原因，为提高超精加工表面质量及优化加工工艺过程提供了一些参考依据。     

光子扫描隧道显微镜的超衍射分辨的光子理论假说

光子扫描隧道显微镜（ＰｈｏｔｏｎＳｃａｎｎｉｎｇＴｕｎｎｅｌｉｎｇＭｉｃｒｏｓｃｏｐｅ，简称ＰＳＴＭ）的发明是在近场光学理论、全内反射理论、光纤技术、高灵敏度光电探测技术和计算机等获得重大进展的基础之上取得的，最近的研究结果表明其ＰＳＴＭ已实现１～３ｎｍ的超衍射极限的分辨率，如何解释ＰＳＴＭ能够获得如此高的超衍射极限分辨率？ＰＳＴＭ能获得的超衍射极限分辨率会是多少？本文提出一种关于ＰＳＴＭ的光子理论假说，这个假说是基于下面两个基本定律：１．光子不只是携带能量和光学信息的载体，也是具有一定空间尺寸的基本粒子２．当光子发生反射、折射、散射等时，仅改变它所携带的能量和光学信息，它的粒子尺寸并不改变，即ｐｈｏｔｏ＝常数．将上面两个基本定律应用于ＰＳＴＭ时，所谓“消逝场（ｅｖａｎｅｓｃｅｎｔｆｉｅｌｄ）”实际上乃是弱光子分布场，探测光纤尖端尺寸实际上相当于一个“门”，它控制着进入光纤的光子数量，通过一些计算，可获得如下几个结论：１．在ＰＳＴＭ的探测系统足够灵敏的条件下，探测光纤尖端的直径Ｄ和近场探测间距Ｚ是决定ＰＳＴＭ超级射分辨率的两个最重要的因索．２．ＰＳＴＭ分辨极限将产生在Ｄ＝ｐｈｏｔｏｎ和Ｚ＝ｐｈｏｔｏｎ．３Ｐ     

光子扫描隧道显微镜的关键问题及实验研究

光子扫描隧道显微镜（ＰＳＴＭ）是一种高分辨率的扫描探针式显微镜。本在简略地介绍了ＰＳＴＭ的工作原理及实用系统的基础上，着重讨论了光纤探针的制备和扫描偏移、耦合误差的定理计算这两具关键技术问题，提出了一种分析扫描偏移及耦合误差的理论计算方法，并由此推导出计算公式，应用自行研制的ＰＳＴＭ系统、成功地对光栅、鱼鳞片等样品显微成象并作了分析，图象的质量和分辨率达到了较好的水平。     

原子力显微镜和扫描隧道显微镜兼容系统的研制

扫描隧道显微镜（ＳＴＭ）和原子力显微镜（ＡＦＭ）由于具有原子量级的分辨率,所以在表面物理,化学,生物学领域得到了越来越广泛的应用。但是,扫描隧道显微镜只能观察导电样品,这就限制了它的应用范围。     

高能量分辨率扫描隧道谱的发展及其在单自旋态和低维超导电性研究的应用

在发展高能量分辨率扫描隧道谱的基础上,实现了基于自旋翻转的非弹性隧道谱,从而实现了对单自旋态的探测,并成功在单分子尺度上研究了自旋间的超交换作用.还探测到了磁性原子在超导能隙中诱导的多重束缚态,并利用这些束缚态在单原子尺度上研究了自旋间的相互作用,在实空间实现了对单个原子的化学识别.利用低温扫描隧道谱,证明生长在Si基片的单原子层厚的铅和铟薄膜为超导体,这是至今报道的最薄的超导体.     

Magnetic exchange force microscopy with atomic resolution

The ordering of neighbouring atomic magnetic moments (spins) leads to important collective phenomena such as ferromagnetism and antiferromagnetism. A full understanding of magnetism on the nanometre scale therefore calls for information on the arrangement of spins in real space and with atomic resolution. Spin-polarized scanning tunnelling microscopy accomplishes this but can probe only conducting materials. Force microscopy can be used on any sample independent of its conductivity. In particular, magnetic force microscopy is well suited to exploring ferromagnetic domain structures. However, atomic resolution cannot be achieved because data acquisition involves the sensing of long-range magnetostatic forces between tip and sample. Magnetic exchange force microscopy has been proposed for overcoming this limitation: by using an atomic force microscope with a magnetic tip, it should be possible to detect the short-range magnetic exchange force between tip and sample spins. Here we show for a prototypical antiferromagnetic insulator, the (001) surface of nickel oxide, that magnetic exchange force microscopy can indeed reveal the arrangement of both surface atoms and their spins simultaneously. In contrast with previous attempts to implement this method, we use an external magnetic field to align the magnetic polarization at the tip apex so as to optimize the interaction between tip and sample spins. This allows us to observe the direct magnetic exchange coupling between the spins of the tip atom and sample atom that are closest to each other, and thereby demonstrate the potential of magnetic exchange force microscopy for investigations of inter-spin interactions at the atomic level.     

近场光学与近场光学显微镜

近场光学是研究距离物体表面一个波长以内的光学现象的新型交叉学科。基于非辐射场的探测与成像原理,近场光学显微镜突破常规光学显微镜所受到的衍射极限,在超高光学分辨率下进行纳米尺度光学成像与纳米尺度光谱研究。本文将讨论近场光学的基本原理,非辐射场的探测与高分辨率的关系;光学限阈及隐失场在近场光学中的重要性;以及近场信息的获取方法。对近场光学显微镜的主要类型及相应的仪器发展,分辨率,衬度原理做一综述。同时简要介绍近场光学显微镜在超高分辨率光学成像,近场局域光谱,高密度数据存储,在生命科学,单分子光谱,量子器件发光机制等领域中的应用。     

扫描隧道显微镜单原子操纵技术及其物理机理

扫描隧道显微镜不仅使得人们的视野可以直接观察到物质表面上的原子及其结构,并进而分析物质表面的物理性质,它还使得人们可以在纳米尺度上对材料表面进行各种加工处理,甚至可以操作单个原子,这一特定的应用将会使人类从目前微米尺度的加工技术迅速跨入纳米尺度和原子尺度。这将是推动人类科学和技术发展的一个无法估量和替代的动力。文中介绍近年来这一前沿研究领域所取得的部分进展,并讨论原子操纵的物理机理和应用前景。     

Atom-by-atom spectroscopy at graphene edge

The properties of many nanoscale devices are sensitive to local atomic configurations, and so elemental identification and electronic state analysis at the scale of individual atoms is becoming increasingly important. For example, graphene is regarded as a promising candidate for future devices, and the electronic properties of nanodevices constructed from this material are in large part governed by the edge structures. The atomic configurations at graphene boundaries have been investigated by transmission electron microscopy and scanning tunnelling microscopy, but the electronic properties of these edge states have not yet been determined with atomic resolution. Whereas simple elemental analysis at the level of single atoms can now be achieved by means of annular dark field imaging or electron energy-loss spectroscopy, obtaining fine-structure spectroscopic information about individual light atoms such as those of carbon has been hampered by a combination of extremely weak signals and specimen damage by the electron beam. Here we overcome these difficulties to demonstrate site-specific single-atom spectroscopy at a graphene boundary, enabling direct investigation of the electronic and bonding structures of the edge atoms-in particular, discrimination of single-, double- and triple-coordinated carbon atoms is achieved with atomic resolution. By demonstrating how rich chemical information can be obtained from single atoms through energy-loss near-edge fine-structure analysis, our results should open the way to exploring the local electronic structures of various nanodevices and individual molecules.     

新型微机械隧道陀螺仪的设计和工艺制备

介绍了一种新型微机械隧道振动陀螺仪的设计和工艺制备,该陀螺仪采用平行梳齿驱动和面外振动框架的方式分别作为质量块的振动和恒隧道电流的检测,对平行梳齿驱动的工作原理和隧道陀螺仪的设计进行了详细的阐述.由于采用了硅玻键合和DRIE的DDSOG体硅制备工艺,因而可以获得较大的敏感质量块,从而使得该陀螺仪具有较高的灵敏度.根据检测模态和驱动模态匹配的原则,利用有限元模型对隧道陀螺仪的结构尺寸进行了优化.仿真结果表明,该陀螺仪在常压下具有0.07 nm(°/s)的灵敏度.     

Single spin detection by magnetic resonance force microscopy

Magnetic resonance imaging (MRI) is well known as a powerful technique for visualizing subsurface structures with three-dimensional spatial resolution. Pushing the resolution below 1 micro m remains a major challenge, however, owing to the sensitivity limitations of conventional inductive detection techniques. Currently, the smallest volume elements in an image must contain at least 10(12) nuclear spins for MRI-based microscopy, or 10(7) electron spins for electron spin resonance microscopy. Magnetic resonance force microscopy (MRFM) was proposed as a means to improve detection sensitivity to the single-spin level, and thus enable three-dimensional imaging of macromolecules (for example, proteins) with atomic resolution. MRFM has also been proposed as a qubit readout device for spin-based quantum computers. Here we report the detection of an individual electron spin by MRFM. A spatial resolution of 25 nm in one dimension was obtained for an unpaired spin in silicon dioxide. The measured signal is consistent with a model in which the spin is aligned parallel or anti-parallel to the effective field, with a rotating-frame relaxation time of 760 ms. The long relaxation time suggests that the state of an individual spin can be monitored for extended periods of time, even while subjected to a complex set of manipulations that are part of the MRFM measurement protocol.     

钢丝绳断丝探伤传感器的研制

本文在实验和理论分析的基础上,讨论了Hall元件在钢丝绳断丝电磁无捐探伤中的应用特点,探讨了提高探伤精度的技术措施,并据此研制了采用多个Hall元件组合探伤的、具有随动定心探头及多通道信号输出的钢丝绳断丝电磁无损探伤传感器。     

扫描探针显微镜漂移的定量测量方法

对扫描探针显微镜(SPM)仪器漂移的定量测量的几种方法进行探讨,提出应用二维零位标记进行漂移测量.分析比较使用普通样品、周期二维光栅、二维零位标记和原子光栅在测定仪器漂移中的优缺点.结果表明:应用二维零位标记的测量技术对探针与样品形貌耦合引起的图像误差不敏感,漂移测量范围不受光栅单元尺寸影响.该方法优于采用普通样品和规则周期的二维光栅样品的方法,而应用原子光栅可以预计达到亚原子量级的超高精度的SPM漂移测量.