GaAs非平面衬底液相外延的实验研究

本文介绍了在GaAs非平面衬底上进行液相外延的实验,研究了沟槽形状等衬底几何参数和降温速度、过冷度等外延条件对外延层的影响。     

Al2O3衬底上低温生长GaN薄膜的一种新方法

研究了 ECR- PAMOCVD在蓝宝石衬底上生长 Ga N外延层时衬底的清洗方法和缓冲层结构对于 Ga N晶体质量的影响 ,提出了新的衬底清洗方法和双缓冲层结构 .实验表明这种方法能够提供一个很好的生长基底 ,可以有效地改善 Ga N外延层的晶体质量     

衬底定向偏差角对非平面衬底液相外延的影响

在非平面衬底液相外延中,衬底的定向偏差角对外延生长有较大影响。为此我们对衬底定向偏差角对外延层形状及表面形貌的影响做了实验研究。 一、实验 1.对外延层形状的影响 我们在衬底定向和(100)面无偏差角(误差在±0.1°范围)及沿沟槽方向和(100)面有0.5°—1°的偏差角的衬底片上,进行液相外延生长四层结构。     

Hg1—xCdxTe液相外延薄膜的貌相分析

用扫描电子显微镜、能量散射Ｘ－射线分析及金相显微镜等方法，研究了Ｈｇ１－ｘＣｄｘＴｅ液相外延薄膜的表面形貌与衬底沾污等的关系，以及外延层夹杂和晶界存在的影响。结果表明，衬底沾污及晶界的存在会使外延薄膜的貌相变差；生长前衬底表面覆盖可以减轻其表面沾污，用适当的回熔ＬＰＥ工艺，可以改进外延层表面形貌及质量     

MOCVD生长的InP外延层的输运及发光特性

使用ＭＯＣＶＤ生长技术，在ｎ型及半绝缘衬底上生长了ＩｎＰ外延层，通过对迁移率和低温光致发光，光反射谱的分析，得出了样品纯度与有关生长条件的关系。比较两种不同衬底上外延层的光荧光谱，发现杂质ｓ在ＩｎＰ外延层中的扩散是不容忽视的。     

GaP:N外延层特性的研究

本文研究了生长条件对GaP:N外延层的形貌、生长速率、位错密度、S坑密度、氮浓度、少子寿命的影响。实验表明,外延层中的氮浓度、少子寿命随外延生长起始温度的升高而增大。用GaN作为掺杂氮源,在1037—980℃温度范围生长的外延层中氮浓度不高于5.6×10~(17)cm~(-3);LEC GaP衬底(τ_m～5ns)上在995—900℃温度范围生长的外延层,其少子寿命可达～130ns。外延层中的位错密度和衬底中大体相同,但S坑密度降低一个数量级。     

凸曲率衬底外延生长界面演化的晶体相场模拟

【目的】采用晶体相场模型模拟衬底分别为平面和凸面时外延层的生长过程。【方法】研究晶格错配度较大(ε=0.10)且衬底倾角较小(2~5°)时,系统自由能和外延层总原子数的变化,分析衬底曲率和衬底倾角对系统自由能曲线和总原子数曲线的影响。【结果】研究表明:衬底曲率为平面时,系统自由能随着倾角的增加而增加,外延层总原子数也随着倾角的增加而增加;衬底曲率为凸面时,系统自由能随着倾角的增加而减少,外延层总原子数也随着倾角的增加而减少。【结论】通过微调衬底的倾角能改变系统的自由能和外延层总原子数。     

分解GaP源固态分子束外延生长InGaP/GaAs的结构和性能

采用分解GaP这一新型固态P源分子束外延在GaAs衬底成功制备了InGaP外延薄膜.3μm厚的InGaP外延层低温荧光峰位是1.998 eV,半峰宽为5.26 meV.双晶摇摆曲线的线宽同GaAs衬底相近.霍尔测量非故意掺杂InGaP外延层的室温迁移率同其他源或其他方法生长的外延层结果类似.     

CVD法制备高质量硅外延片的工艺研究

本文采用化学气相沉积(CVD)法在单晶硅衬底上沉积硅外延层,同时研究了沉积工艺对外延层电阻率和厚度的影响规律。研究发现采用H2气变流量吹扫后可以有效抑制非主动掺杂,提高外延层电阻率的均匀性;衬底表面气流边界层厚度会对外延层的沉积速率有显著的影响。通过对沉积工艺的控制可以得到电阻率和厚度均匀性良好的硅外延层。     

氮化衬底对MOCVD生长GaN的影响

采用MOCVD生长技术以Al2O3为衬底对GaN生长进行了研究．用霍尔测量技术、光致发光技术以及光学显微镜测量了GaN的电学性能、光学性能以及表面形貌．研究表明，GaN低温缓冲层生长之前的氮化衬底工艺对GaN外延层表面形貌、发光性能、电学性能有显著影响．合适的氮化衬底条件可得到表面形貌、发光性能和电学性能均较好的GaN外延膜．研究表明长时间氮化衬底使GaN外延膜表面粗糙的原因可能是由于氮化衬底影响了后续高温GaN的生长模式，促使GaN三维生长所导致的．     

CH4／CO2体系化学气相淀积金刚石的非平衡定态相图计算

用非平衡热力学耦合模型首次获得了由ＣＨ４／ＣＯ２体系化学气相淀积金刚石的相图。该相图与用经典平衡热力学得 结果不同,相图中出现了１个金刚石的生长区,相图中的金刚石生长区是实现金刚石气相生长的热力学基础,它的存在体现了超平衡氢原子等激活粒子对石墨的激活和对金刚石的稳定作用。     

Synthesis of high quality type-Ib diamond crystals in carats grade

High quality type-Ib tower-shape gem-diamond crystals in carats grade were synthesized in cubic anvil high pressure apparatus (SPD-6×1200) at 5.4 GPa and 1250-1450°C. The relationship between the growth time and the weight of growth diamond has been gained. The faces of {110} and {113} were found in the synthetic diamond crystals frequently. We found that the relative growth rate of {113} face was descending with the increase of growth temperature, and that of {110} face had no obvious change with the incre...     

Microstructures of metallic film and diamond growth from Fe-Ni-C system

The microstructures of metallic film surrounding diamond have been systemically studied using the transmission electron microscopy (TEM) and the atom force microscopy (AFM). The film can be divided into three layers (inner layer near diamond, external layer near graphite and middle layer). The graphite cannot be directly transformed into diamond in the film at HTHP; there exists a parallel relationship between (−111) of γ-(Fe,Ni) and (110) of Fe₃C in the inner layer; the sawtooth-like step morphology found by AFM on the film is similar to that of corresponding diamond surface. A new model for diamond growth at HPHT is proposed from the parallel relationship and sawtooth-like step morphology. It is believed that Fe₃C may be a transitional phase in the course of diamond growth, γ-(Fe,Ni) in the inner layer can absorb carbon atom groups with lamella structure from Fe₃C, and then the carbon groups stack on growing diamond.     

Growth and characterization of large, high quality cubic diamond crystals

High quality cubic diamond crystals were grown using the temperature gradient method at high pressure and high temperature(HPHT),in a new FeNi alloy as solvent.The crystals were grown at relatively low temperatures suitable for the growth of {100} faces.An increase in the radial growth rate,and inhibition of the axial growth caused the growth of large,high quality cubic diamond single crystals at high growth rates.For example,over 33 h,the radial growth rate was 0.22 mm/h,while the axial growth rate was only 0.08 mm/h;the growth rate by weight was also increased to 7.3 mg/h.The yellow color of our crystal samples was more uniform than samples from Sumitomo Corporation of Japan and Element Six Corp.The Raman FWHW of the 1332 cm 1 peak in our diamond sample was smaller than the Element Six Corp.sample,but larger than that of the Sumitomo Corp.sample.The nitrogen content of our diamond samples was 240 ppm,which was much higher than the Sumitomo and Element Six samples because of the higher growth rate of our diamond samples.     

Study on growth of coarse grains of diamond with high quality under HPHT

The growth of coarse grains of diamond was observed with graphite as carbon source and Fe₈₀Ni₂₀ alloy powder as catalyst at HPHT in a China-type SPD 6×1670T cubic high-pressure apparatus with highly exact control system. To synthesize coarse grains of diamond crystal with high quality, advanced indirect heat assembly, powder catalyst technology and catalyst with optimal granularity were used. Especially the nucleation of diamond and the growth rate were strictly controlled by the optimized synthesis craft. At last, diamond crystals (about 0.85 mm) in the perfect hex-octahedron shape were successfully synthesized at ~5.4 GPa and ~1360℃ in 60 min. The characteristic of crystal growth with powder catalyst technology under HPHT was discussed. The results and techniques might be useful for production of coarse grains of diamond.     

Mechanism of diamond-to-graphite transformation at diamond-stable conditions

The diamond-to-graphite transformation at diamond-stable conditions is studied by temperature gradient method （TGM） under high pressure and high temperature （HPHT）, although it is unreasonable from the view of thermodynamic considerations. It is found that, at diamond-stable conditions, for example, at 5.5 GPa and 1550 K, with fine diamond grits as carbon source and NiMnCo alloy as metal solvent assisted, not only large diamond crystals, but metastable regrown graphite crystals would be grown by layer growth mechanism, and the abundance of carbon source in the higher temperature region is indispensable for the presence of metastable regrown graphite crystals. From this transformation, it is concluded that, with metal solvent assisted, although the mechanism of crystal growth could be understood by the macro-mechanism of solubility difference between diamond and graphite in metal solvents, from the point of micro-mechanism, the minimum growth units for diamond or graphite crystals should be at atomic level and unrelated to the kinds of carbon source （diamond or graphite）, which could be accumulated free-selectively on the graphite with Sp2Tr or diamond crystals with sp3 bond structure.     

CVD金刚石膜{100}取向生长的原子尺度仿真

运用动力学蒙特卡洛(KMC)方法从原子尺度对CVD金刚石膜{100}取向在3种不同化学反应模型下的生长进行了仿真.结果表明:(1)以CH3为主要生长组元的生长机制比较适合于{100}取向金刚石膜的生长;(2) 对金刚石{100}取向而言,含有双碳基团的模型沉积速度并不比含有单碳基团的模型沉积速度大;(3)在高的生长速率下仍有可能获得表面粗糙度较小的金刚石膜;(4)对Harris模型的仿真结果与其本人的预测结果一致,并与实验结果符合良好.     

Atomic scale KMC simulation of {100} oriented CVD diamond film growth under low substrate temperature-Part II Simulation of CVD diamond film growth in C-H system and in Cl-containing systems

The growth of {100}-oriented CVD diamond film under two modifications of J-B-H model at low substrate temperatures was simulated by using a revised KMC method at atomic scale. The results were compared both in Cl-containing systems and in C-H system as follows: (1) Substrate temperature can produce an important effect both on film deposition rate and on surface roughness; (2) Aomic Cl takes an active role for the growth of diamond film at low temperatures; (3) {100}-oriented diamond film cannot deposit under single carbon insertion mechanism, which disagrees with the predictions before; (4) The explanation of the exact role of atomic Cl is not provided in the simulation results.     

活性碳,碳黑,石墨与金刚石晶种的生长

介绍了活性碳、碳黑与石墨在过剩压驱动下金刚石晶种的生长．对两种无定形碳以及石墨在触媒中的分散溶解输运与再结晶进行了观察，对活性碳、碳黑在金刚石晶种生长中的机理作了探索性的讨论．三种碳片上的晶种均有明显长大，无定形碳作晶种生长的碳源是可行的     

Analysis of the carbon source for diamond crystal growth

The lattice constants of diamond and graphite at high pressure and high temperature （HPHT） were calculated on the basis of linear expansion coefficient and elastic constant. According to the empirical electron theory of solids and molecules （EET）, the valence electron structures （VESs） of diamond, graphite crystal and their common planes were calculated. The relationship between diamond and graphite structure was analyzed based on the boundary condition of the improved Thomas-Fermi-Dirac theory by Cheng （TFDC）. It was found that the electron densities of common planes in graphite were not continuous with those of planes in diamond at the first order of approximation. The results show that during the course of diamond single crystal growth at HPHT with metal catalyst, the carbon sources forming diamond structure do not come from the graphite structure directly. The diamond growth mechanism was discussed from the viewpoint of valence electron structure.