| 用PLD法在MgO(100)衬底上生长ZnO薄膜的结构和光学特性 |
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| 引用本文： | 苏凤莲,汪洪,李爱侠,刘艳美,周圣明.用PLD法在MgO(100)衬底上生长ZnO薄膜的结构和光学特性[J].安徽大学学报(自然科学版),2006,30(2):67-70. |
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| 作者姓名： | 苏凤莲 汪洪 李爱侠 刘艳美 周圣明 |
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| 作者单位： | 安徽大学,物理与材料科学学院,安徽,合肥,230039;安徽大学,物理与材料科学学院,安徽,合肥,230039;中国科学院,上海光学精密机械研究所,上海,201800 |
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| 基金项目： | 安徽省优秀青年基金资助项目(00047208)，高等学校安徽省学术技术带头人科研资助项目 |
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| 摘 要： | 用脉冲激光沉积法在MgO(100)衬底上沉积了ZnO薄膜.衬底温度分别为400℃、550℃和700℃.利用X射线衍射(XRD)和光致发光谱(PL)对薄膜的结构和光学性能进行研究.X射线衍射的结果表明,在400℃和550℃下生长的ZnO薄膜具有高度c-轴择优取向,但是当衬底温度升高到700℃时,薄膜由单一的择优取向变为有两个较强的择优取向.通过光致发光谱可以发现,在550℃下生长的ZnO薄膜具有强的紫外发射和窄的FWHM,并且紫外发光峰的强度与ZnO薄膜的结晶质量密切相关.
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| 关 键 词： | ZnO薄膜 脉冲激光沉积 X射线衍射 光致发光谱 |
| 文章编号： | 1000-2162(2006)02-0067-04 |
| 修稿时间： | 2005年3月13日 |
Structural and optical properties of ZnO films deposited on MgO (100) substrates by PLD |
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| SU Feng-lian,WANG Hong,LI Ai-xia,LIU Yan-mei,ZHOU Sheng-ming.Structural and optical properties of ZnO films deposited on MgO (100) substrates by PLD[J].Journal of Anhui University(Natural Sciences),2006,30(2):67-70. |
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| Authors: | SU Feng-lian WANG Hong LI Ai-xia LIU Yan-mei ZHOU Sheng-ming |
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| Institution: | SU Feng-lian~1,WANG Hong~1,LI Ai-xia~1,LIU Yan-mei~1,ZHOU Sheng-ming~2 |
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| Abstract: | ZnO thin films have been fabricated by pulsed laser deposition(PLD) technique on(MgO(100)) substrates.Substrate temperatures were varied in the range of 400-700℃.The structural and optical properties were characterized with X-ray diffraction(XRD) and photoluminescence(PL),respectively.XRD results indicated that the ZnO films grown at 400℃ and 550℃ were all highly c-axis oriented.But the micro-structure of the ZnO film changed to the one with multi-orientation when the substrate temperature(increased) to 700℃. It has been observed that the exciton emission dominates in the photoluminescence spectra,and concluded that the intensity of the UV luminescence strongly depends on the crystalline quality of the ZnO films. |
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| Keywords: | ZnO thin film PLD XRD photoluminescence |
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