| 一种简便方法制备ZnO薄膜及其特性研究 |
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| 引用本文： | 汪壮兵,梁齐.一种简便方法制备ZnO薄膜及其特性研究[J].合肥工业大学学报(自然科学版),2004,27(3):310-312. |
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| 作者姓名： | 汪壮兵 梁齐 |
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| 作者单位： | 合肥工业大学,理学院,安徽,合肥,230009;合肥工业大学,理学院,安徽,合肥,230009 |
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| 摘 要： | 该文介绍了一种制备ZnO薄膜的简便方法:先在真空中蒸发沉淀Zn薄膜,再在空气中进行加热退火处理,使薄膜结晶变成ZnO薄膜。薄膜的X射线衍射谱(XRD)表明使用上述方法得到的是结晶良好的ZnO薄膜,对薄膜的发光特性研究表明,薄膜的光致发光谱(PL)与薄膜的制备条件密切相关。同时还系统研究了薄膜的PL谱与退火温度、退火时间和通气与否的关系,对实验结果给出了初步的解释。
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| 关 键 词： | X射线衍射谱 光致发光谱 ZnO薄膜 制备方法 |
| 文章编号： | 1003-5060(2004)03-0310-03 |
| 修稿时间： | 2003年5月19日 |
A simple method to prepare ZnO thin film and its characteristic study |
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| WANG Zhuang-bing,LIANG Qi.A simple method to prepare ZnO thin film and its characteristic study[J].Journal of Hefei University of Technology(Natural Science),2004,27(3):310-312. |
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| Authors: | WANG Zhuang-bing LIANG Qi |
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| Abstract: | A simple method to prepare ZnO thin film is introduced. Zn film is firstly deposited in vacuum, then the film is annealed in atmosphere to make it to be ZnO crystal. The XRD shows that the film got by the above method is ZnO crystal. The characteristic of luminescence indicates that the photoluminescence(PL) spectrum of the film is influenced by the preparation conditions, including the annealing temperature,the annealing time and annealing in atmosphere or vacuum.The relationship of these factors to the PL spectrum is studied,and a preliminary explanation is given. |
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| Keywords: | X-ray diffraction(XRD) spectrum photoluminescence(PL) spectrum ZnO thin film preparation method |
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