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| 不同衬底生长ZnO薄膜的结构与发光特性研究 | |
| 引用本文： | 戴建明,冯建强,张瑞丽,袁广宇,刘强春,王红艳.不同衬底生长ZnO薄膜的结构与发光特性研究[J].淮北煤炭师范学院学报(自然科学版),2004,25(1):10-13. |
| 作者姓名： | 戴建明 冯建强 张瑞丽 袁广宇 刘强春 王红艳 |
| 作者单位： | 1. 淮北煤炭师范学院物理系,安徽,淮北,235000;中科院固体物理研究所内耗与固体缺陷开放实验室,安徽,合肥,230031 2. 淮北煤炭师范学院物理系,安徽,淮北,235000 3. 中科院固体物理研究所内耗与固体缺陷开放实验室,安徽,合肥,230031 |
| 基金项目： | 国家自然科学基金项目(10374033)，安徽省自然科学基金项目(03046201)，安徽省教育厅自然科学重点研究项目(2002kj253ZD) |
| 摘 要： | 采用射频磁控溅射方法分别在蓝宝石(Al2O3)(0001)和硅(100)衬底上制备ZnO薄膜．通过X-光衍射测量与分析表明两者都沿C轴方向生长，在Al2O3衬底上的ZnO薄膜结晶质量优于在Si衬底上的薄膜样品．然而，由原子力显微镜观测发现在Al2O3衬底上的薄膜晶粒呈不规则形状，且有孔洞，致密性较差；而在Si衬底上的ZnO薄膜表面呈较规则的三维晶柱，致密性好．光致发光测量表明，不同衬底上生长的ZnO薄膜表现出明显不同的发光行为． |
| 关 键 词： | ZnO薄膜 射频磁控溅射 蓝宝石 硅 X-光衍射测量 光致发光 结构表征 |
| 文章编号： | 1672-7177(2004)01-0010-04 |
| 修稿时间： | 2003年8月29日 |
The Structure and PL Spectrum of ZnO Films Grown on Different Substrates |
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| DAI Jian-ming,FENG Jian-qiang,ZHANG Rui-li,YUAN Guang-yu,LIU Q iang-chun,WANG Hong-yan.The Structure and PL Spectrum of ZnO Films Grown on Different Substrates[J].Journal of Huaibei Coal Industry Teachers College(Natural Science edition),2004,25(1):10-13. | |
| Authors: | DAI Jian-ming FENG Jian-qiang ZHANG Rui-li YUAN Guang-yu LIU Q iang-chun WANG Hong-yan |
| Institution: | DAI Jian-ming1,2,FENG Jian-qiang1,ZHANG Rui-li2,YUAN Guang-yu1,LIU Q iang-chun1,WANG Hong-yan1 |
| Abstract: | ZnO thin films are epitaxially grown on sapphire (Al2O3)(0001) and Si (100) single-crystal substrates by the method of Radio Frequency Magnetron Sput tering. The crystal structure and the features of surface of the ZnO films are a nalyzed by X-ray diffraction and atomic force microscope (AFM). It shows that b oth kinds of the samples with different substrates are grown along the direction of C axis. However, the XRD measuring exhibits that the quality of growth for t he thin films grown on sapphire are better than that grown on Si substrates. The AFM patterns and photoluminescence (PL) spectrum of ZnO films are also measured , which indicates that the films grown on the different substrates have very dif ferent properties. |
| Keywords: | ZnO thin films radio frequency magnetron sputtering structural chara cterization photoluminescence (PL) |
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