| 氮化钛薄膜的制备及其机械性能的研究 |
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| 引用本文： | 刘谦祥,李德军.氮化钛薄膜的制备及其机械性能的研究[J].天津师范大学学报(自然科学版),2001,21(1):19-22. |
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| 作者姓名： | 刘谦祥 李德军 |
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| 作者单位： | 天津师范大学物理系, |
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| 基金项目： | 国家自然科学基金资助项目（10075034）,天津市教委自然科学基
金资助项目(20010304) |
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| 摘 要： | 氮化钛（TiN）薄膜独特的性能不仅在机械工业和商品的表面装饰行业上有着广泛的应用，而且在临床制品及人工器官领域也展示了潜在的应用前景.研究利用大功率偏压电源的多弧离子镀技术，采用工具镀工艺，在Ti-6Al-4V合金材料表面制备了TiN薄膜.用X射线光电子能谱检测证明了所制备的薄膜确为TiN.机械性能测试表明具有TiN涂层样品的显微硬度大大高于Ti合金基材，同时耐磨性能也明显得到改善.
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| 关 键 词： | 多弧离子镀 氮化钛 机械性能 |
| 文章编号： | 1001-7720(2001)01-0019-04 |
| 修稿时间： | 2000年11月20 |
Synthesis and Mechanical
Properties of TiN Coating |
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| LIU Qian-xiang,LI De-jun -Dept. of Physics,Tianjin Normal University,Tianjin ,China.Synthesis and Mechanical
Properties of TiN Coating[J].Journal of Tianjin Normal University(Natural Science Edition),2001,21(1):19-22. |
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| Authors: | LIU Qian-xiang LI De-jun -Dept of Physics Tianjin Normal University Tianjin China |
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| Institution: | LIU Qian-xiang,LI De-jun -Dept. of Physics,Tianjin Normal University,Tianjin 300074,China) |
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| Abstract: | TiN with unique properties has been used in mechanical industry and surface decoration for commercial goods. It also has potential as a coating for clinical devices and artificial organs. TiN coatings are synthesized on the surface of Ti-6Al-4V using tool coating technique by means of multi-arc ion-plated system with high voltage bias power. X-ray photoelectron spectroscopic analysis proved the coatings to be TiN. The measurements of the mechanical properties show that the hardness and wear resistance of the samples with TiN coatings are obviously higher than those of the control Ti-6Al-4V. |
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| Keywords: | multi-arc ion-plated TiN mechanical property |
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