| 用不同靶材制备B-C-N薄膜及其红外表征 |
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| 引用本文： | 王健,白亦真,张东,潘丽,柳浩,管昌雨,吴占玲,赵纪军.用不同靶材制备B-C-N薄膜及其红外表征[J].吉林大学学报(理学版),2010,48(6):1027-1030. |
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| 作者姓名： | 王健 白亦真 张东 潘丽 柳浩 管昌雨 吴占玲 赵纪军 |
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| 作者单位： | 1. 大连理工大学 物理与光电工程学院, 辽宁 大连 ,116024,2. 大连理工大学 三束材料改性教育部重点实验室, 辽宁 大连 ,116024,3. 大连工业大学 艺术与信息工程学院, 辽宁 大连 ,116023 |
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| 基金项目： | 科技部973计划前期研究专项基金，高等学校科技创新工程重大项目基金 |
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| 摘 要： | 采用射频磁控溅射方法,分别利用六方氮化硼(h-BN)、硼(B)和石墨(C)靶,在氩气和氮气的氛围中,沉积B-C-N薄膜.傅里叶变换红外光谱(FTIR)分析表明:在1200～1800cm-1和1000～1750cm-1处出现了较宽的吸收峰;在2200cm-1处出现了CN键的特征吸收峰.表明在沉积的薄膜中,C原子与N原子相结合.分别溅射C和h-BN靶,红外光谱分析表明,B—C键在1100cm-1处未产生吸收峰,即利用h-BN和C靶沉积的B-C-N薄膜倾向于相分离,利用B和C靶沉积的B-C-N薄膜中的原子实现了原子量级的化合.
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| 关 键 词： | B-C-N薄膜 N2流量 傅里叶变换红外光谱 射频磁控溅射 |
| 收稿时间： | 2009-12-10 |
Perparation and FTIR Spectra of B-C-N Films via Different Targets |
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| WANG Jian,BAI Yi-zhen,ZHANG Dong,PAN Li,LIU Hao,GUAN Chang-yu,WU Zhan-ling,ZHAO Ji-jun.Perparation and FTIR Spectra of B-C-N Films via Different Targets[J].Journal of Jilin University: Sci Ed,2010,48(6):1027-1030. |
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| Authors: | WANG Jian BAI Yi-zhen ZHANG Dong PAN Li LIU Hao GUAN Chang-yu WU Zhan-ling ZHAO Ji-jun |
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| Institution: | 1. School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, Liaoning Province, China|2. Key Laboratory of Materials Modification by Laser, Ion and Electron Beams, Ministry of Education, Dalian University of Technology, Dalian 116024, Liaoning Province, China|3. School of Art and Information Engineering, Dalian Polytechnic University, Dalian 116023, Liaoning Province, China |
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| Abstract: | Boron-carbon-nitrogen (B-C-N) films were deposited by means of radio frequency (RF) magnetron sputtering from different targets, which were hexagonal boron nitride, boron and graphite targets in the atmosphere of nitrogen and argon. The results of FTIR spectra indicate that there were two wide absorption bands at 1 200~1 800 cm-1 and 1 000~1 750 cm-1 separately, and there existed characteristic absorption peak of bond at 2 200 cm-1. That is to say, C atom and N atom were combined in the deposited films. Graphite and h-BN targets were sputtered respectively, the results of FTIR spectra reveal that the absorption at 1 100 cm-1 was not due to the stretching B-C bond, B-C-N films were deposited from h-BN and C targets inclined to phase separation, and there was hybridization of atomic level in the deposited B-C-N films via B and C targets. |
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| Keywords: | B-C-N films nitrogen flux Fourier-transformed infrared spectrum radio frequency magnetron sputtering |
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