| 溅射于NiMnCo上的TiO2薄膜的结构与相变 |
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| 引用本文： | 顾广瑞,李哲奎,林景波,李全军,郑伟涛,赵永年,金曾孙.溅射于NiMnCo上的TiO2薄膜的结构与相变[J].吉林大学学报(理学版),2005,43(4):517-520. |
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| 作者姓名： | 顾广瑞 李哲奎 林景波 李全军 郑伟涛 赵永年 金曾孙 |
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| 作者单位： | 1. 延边大学理工学院, 吉林省 延吉 133002; 2. 吉林大学材料科学与工程学院， 长春 130012; 3. 吉林大学超硬材料国家重点实验室, 长春 130012 |
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| 基金项目： | 国家863项目基金(批准号:2002AA305507). |
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| 摘 要： | 利用射频磁控溅射方法以纯金属钛做靶材在氩氧混合气
体中制备了TiO2薄膜. X射线衍射结果表明, 在NiMnCo合金基底上成功地沉积了 具有金红石、 金红石/锐钛矿和锐钛矿结构的TiO2薄膜, 工作气压从0.2 Pa变 化到2 Pa, TiO2薄膜的结构由金红石相变到锐钛矿相. 低于600 nm时, 厚度对T iO2薄膜结构没有明显影响.
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| 关 键 词： | TiO2薄膜 XRD光谱 金红石 锐钛矿 |
| 文章编号： | 1671-5489(2005)04-0517-04 |
| 收稿时间： | 2004-11-17 |
| 修稿时间： | 2004年11月17 |
Structure and Phase Change of TiO2 Films Sputtered on NiMnCo Substrates |
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| GU Guang-rui,LI Zhe-kui,LIN Jing-bo,LI Quan-jun,ZHENG Wei-tao,ZHAO Yong-nian,JIN Zeng-sun.Structure and Phase Change of TiO2 Films Sputtered on NiMnCo Substrates[J].Journal of Jilin University: Sci Ed,2005,43(4):517-520. |
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| Authors: | GU Guang-rui LI Zhe-kui LIN Jing-bo LI Quan-jun ZHENG Wei-tao ZHAO Yong-nian JIN Zeng-sun |
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| Institution: | 1. College of Science and Engineering, Yanbian University, Yanji 133002, Jinlin Province, China;2. College of Materials Science and Engineering, Jilin University, Changchun 130012, China; 3. National Laboratory for Superhard Materials, Jilin University, Changchun 130012, China |
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| Abstract: | Titainum dioxide (TiO_2) films have been successfully deposited on NiMnCo substrates via radio-(frequency) (RF) magnetron reactive sputtering with pure Ti(99.99%) as the target and Ar mixed with O_2 as (reactive) gas. The effects of total gas pressure on the structure and phase transition of TiO_2 films were studied by means of XRD spectra. It is indicated that the film structure changes from rutile to anatase while work total gas pressure changes from 0.2 Pa to 2 Pa. The structure of TiO_2 films is not affected by the film thickness. |
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| Keywords: | TiO_2 film XRD spectrum rutile anatase |
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