In2O3多孔有序薄膜的制备及其对丁酮气敏特性

利用气/液界面自组装法和溶液浸渍转移法制备了单层和双层氧化铟多孔有序气敏薄膜，并对其进行了气敏特性测试，同时利用多物理场耦合进行气敏特性仿真研究.结果表明，制备的气敏薄膜具有规则的孔道结构，孔壁呈现为具有大比表面积的片状结构.基于该气敏材料的气体传感器对丁酮表现出优良的气敏特性，单层In₂O₃多孔有序气体传感器在最佳工作温度350℃的条件下对质量分数为100×10^-6的丁酮的灵敏度为15.37，响应时间仅为4.3s；双层In₂O₃多孔有序气体传感器在最佳工作温度375℃的条件下对质量分数为100×10^-6的丁酮的灵敏度为20.45，响应时间为22.7s.仿真结果与气敏特性测试结果吻合较好.

Preparation of Porous Ordered Films of In2O3 and Its Gas Sensitive Characteristics to Butanone

Monolayer and bilayer porous ordered gas sensitive films of In₂O₃ were prepared by gas/liquid interfacial self-assembly method and solution impregnation transfer method， and the gas sensitive characteristics of the films were tested. At the same time， coupling of multiple physical fields was used to simulate the gas sensitive characteristics. The results show that the gas sensitive film has regular pore structure and the pore wall is a flake structure with large specific surface area. The gas sensors based on the gas sensitive material show excellent gas sensitive characteristics to butanone. The monolayer In₂O₃ porous ordered gas sensor has a sensitivity of 15.37 to the mass fraction of 100×10^-6 butanone at the optimal operating temperature of 350℃， and the response time is only 4.3s. The sensitivity of the bilayer In₂O₃ porous ordered gas sensor to the mass fraction of 100×10^-6 butanone is 20.45， and the response time is 22.7s at the optimal operating temperature of 375℃. The simulation results are in good agreement with the test results of gas sensitive characteristics.