| 多层高反膜的理论设计与光学特性分析 |
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| 引用本文： | 沈军,王珊,吴广明,杨帆.多层高反膜的理论设计与光学特性分析[J].同济大学学报(自然科学版),2005,33(5):659-663. |
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| 作者姓名： | 沈军 王珊 吴广明 杨帆 |
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| 作者单位： | 同济大学,物理系,上海,200092 |
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| 基金项目： | 国家自然科学基金重点资助项目(21033040)，国家“八六三”高技术研究发展计划资助项目(2002AA84052)，上海纳米科技与产业促进中心资助项目(0216nm035,0352nm022)，教育部跨世纪优秀人才计划资助项目，上海市重点学科建设资助项目，上海市科委中法合作项目(02SL001) |
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| 摘 要： | 从理论上对光学多层介质反射膜作了设计，用堆积密度的概念模拟了溶胶-凝胶法制备的纳米多孔薄膜的折射率；利用反射率增幅分析与膜层制备难度分析来选择理想的膜系设计；通过计算分析了经典四分之一波长膜系的光学特性，包括薄膜膜层的驻波场分布和镀膜过程中的随机误差对膜层反射率曲线的影响，为多层高反膜的化学法制备与实际应用提供了重要依据。
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| 关 键 词： | 多层介质反射膜 堆积密度 溶胶-凝胶 反射率 |
| 文章编号： | 0253-374X(2005)05-0659-05 |
Design and Analysis of Optical Anti-reflective Multi-layer Coatings Derived from Sol-Gel Process |
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| SHEN Jun,WANG Shan,WU Guang-ming,YANG Fan.Design and Analysis of Optical Anti-reflective Multi-layer Coatings Derived from Sol-Gel Process[J].Journal of Tongji University(Natural Science),2005,33(5):659-663. |
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| Authors: | SHEN Jun WANG Shan WU Guang-ming YANG Fan |
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| Abstract: | The design and performance calculation of optical anti-reflective (AR) multi-layer coatings derived from sol-gel process were made by Essential Macloed program:the concept of packing density was used to modify the nano-porous coatings,and it is also a convenient way of introducing variable refractive index.The best design was chosen by the reflectance and relative sensitivity analysis.Optical performances of quarter-wave layer AR coatings were calculated,for example,the distribution of electric field inside different layers and the influence of thickness errors to the reflectivity.These results can give good guides to the practical coating preparation. |
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| Keywords: | anti-reflective multi-layer coatings packing density sol-gel progress reflectance |
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