| 聚乙烯促进低压气相金刚石成核的机理 |
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| 引用本文： | 王建军,吕反修.聚乙烯促进低压气相金刚石成核的机理[J].北京科技大学学报,1994,16(2):135-138. |
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| 作者姓名： | 王建军 吕反修 |
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| 作者单位： | 北京科技大学材料科学与工程系 |
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| 摘 要： | 研究了在微波等离子体化学气相沉积条件下，聚乙烯对金刚石在单晶硅衬底上形核的影响，发现预发覆在硅衬底的聚乙烯显著地促进了金刚石的形核；提出了聚忆核的机理和具有ＳＰ＾３杂化结构的含碳活化粒子饱和度概念及其促进金刚石形核的观点。
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| 关 键 词： | 晶核 聚乙烯 金刚石膜 成核 |
Effect of Polyethylene on Low Pressure Diamond Growth from the Vapour Phase |
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| Wang Jianjun, Lu Fanxiu, Yang Baoxiong.Effect of Polyethylene on Low Pressure Diamond Growth from the Vapour Phase[J].Journal of University of Science and Technology Beijing,1994,16(2):135-138. |
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| Authors: | Wang Jianjun Lu Fanxiu Yang Baoxiong |
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| Abstract: | Effect of polyethylene on low pressure diamond growth from the vapour phase was studied. It was found that diamond nucleation on polyethylene coated, un-polished single crystal silicon substrate was greatly enhanced. The mechanism of the observed enhancement and a new concept of the super-saturation of carbonaceous radicales with the SP3 hybridstructure which enhance the nucleation of diamond film have been proposed. |
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| Keywords: | diamond-films formation-crystal nucleons polyethylene |
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