| Thermal conductivity measurement of InGaAs/InGaAsP superlattice thin films |
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| 作者姓名： | CHEN Zhen YANG Juekuan ZHUANG Ping CHEN Minhua ZHU Jian CHEN Yunfei |
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| 作者单位： | [1]Department of Mechanical Engineering, Southeast University, Nanjing 210096, China [2]No. 55 Research Institute, China Electronics Technology Group Corporation, Nanjing 210096, China [3]Department of Mechanical Engineering and China Education Council Key Laboratory of MEMS, Southeast University, Nanjing 210096, China |
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| 摘 要： | The thermal conductivities of InGaAs/ InGaAsP superlattices with different period lengths were measured from 100 to 320 K using 3ω method. In this temperature range, the thermal conductivities were found to decrease with an increase in temperature. For the period length-dependant thermal conductivity, the minimum value does exist at a certain period length, which demonstrates that at a short period length, superlattice thermal conductivity increases with a decrease in the period length. When the period is longer than a certain period length, the interface thermal resistance dominates in phonon transport. The experimental and theoretical results confirmed the previous predictions from the lattice dynamics analysis, i.e. with the increase in period length, the dominant mechanisms of phonon transport in superlattices will shift from wave mode to particle mode. This is crucial for the cutoff of the phonons and lays a sound foundation for the design of superlattice structures.
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| 关 键 词： | 3ω method thermal conductivity superlattice thin film. |
| 收稿时间： | 2005-07-30 |
| 修稿时间： | 2005-07-302006-02-28 |
Thermal conductivity measurement of InGaAs/InGaAsP superlattice thin films |
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| CHEN Zhen YANG Juekuan ZHUANG Ping CHEN Minhua ZHU Jian CHEN Yunfei.Thermal conductivity measurement of InGaAs/InGaAsP superlattice thin films[J].Chinese Science Bulletin,2006,51(23):2931-2936. |
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| Authors: | Zhen Chen Juekuan Yang Ping Zhuang Minhua Chen Jian Zhu Yunfei Chen |
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| Institution: | (1) Department of Mechanical Engineering, Southeast University, Nanjing, 210096, China;(2) No. 55 Research Institute, China Electronics Technology Group Corporation, Nanjing, 210096, China;(3) Department of Mechanical Engineering and China Education Council Key Laboratory of MEMS, Southeast University, Nanjing, 210096, China |
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| Abstract: | The thermal conductivities of InGaAs/InGaAsP superlattices with different period lengths were measured from 100 to 320 K using
3θ method. In this temperature range, the thermal conductivities were found to decrease with an increase in temperature. For
the period length-dependant thermal conductivity, the minimum value does exist at a certain period length, which demonstrates
that at a short period length, superlattice thermal conductivity increases with a decrease in the period length. When the
period is longer than a certain period length, the interface thermal resistance dominates in phonon transport. The experimental
and theoretical results confirmed the previous predictions from the lattice dynamics analysis, i.e. with the increase in period
length, the dominant mechanisms of phonon transport in superlattices will shift from wave mode to particle mode. This is crucial
for the cutoff of the phonons and lays a sound foundation for the design of superlattice structures. |
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| Keywords: | 3θ method thermal conductivity superlattice thin film |
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