硅中离子注入层的卤钨灯辐照快速退火研究

本文研究了硅中离子注入层的卤钨灯辐照快速退火,对注B 和注P 样品分别测量了经1100℃、15秒和1050℃、12秒退火后注入层的载流子浓度分布,并与950℃、30分钟常规热退火样品作了比较;结果表明,卤钨灯辐照快速退火具有电激活率高、注入杂质再分布小及易于推广使用等优点.对于100keV、1×10~(15)cm~(-2)P 注入样品,经1050、10秒卤钨灯辐照退火后,表面薄层电阻为74.8Ω/□;对通过920(?)SiO_2膜,25keV、1×10~(15)cm~(-2)B 注入样品,经1100℃、15秒卤钨灯辐照快速退火后表面薄层电阻为238.0Ω/□;而经过950℃、30分钟常规热退火后,以上两种样品的表面薄层电阻分别为72.0Ω/□和245.8Ω/□.采用这种退火方法制作出了结深为0.10μm 的近突变P~ N 结,并测量了结深与退火时间的关系.     

离子注入硅的碘钨灯快速热退火温度计算

离子注入并通过快速热退火引发固相外延生长,退火温度及温度分布对固相外延生长的结晶速率及退火材料的性质有很大影响.利用等温模型,根据入射能流密度与辐射损失能流密度之间的平衡,得出了离子注入硅的碘钨灯快速热退火的退火温度与衬底温度以及碘钨灯功率的关系.研究结果表明:在300～1 070 K的衬底温度范围内,退火温度主要由碘钨灯功率决定,而衬底温度对其影响不大;发生固相外延生长的最大碘钨灯功率或液相熔融再结晶的理论临界碘钨灯功率为2.6 kW,与实测值基本相符.     

六角排列碳纳米管阵列的场增强因子的计算

通过求解Laplace方程得到六角排列的碳纳米管(CNTs)阵列的管尖端电场强度和场增强因子,具体研究CNTs的自身线度、阵列密度及阵列形状对CNTs的场增强因子的影响.研究结果表明,场增强因子随CNTs长径比的增加而增加,对于长径比一定的CNTs阵列,对应着一个最佳阵列密度,如管长为 6 μm、管径分别为5 nm、13 nm、20 nm的CNTs阵列对应的最佳阵列密度为3.05×1011 cm-2、4.83×1010 cm-2、2.12×1010 cm-2.在相同的阵列密度下,六角排列CNTs阵列的场发射性能要优于四方排列的CNTs阵列.计算得到六角排列CNTs阵列上端面的电势分布曲线.     

退火温度对用PⅢ方法制备共掺杂p型ZnO薄膜结构和性能的影响

采用射频磁控共溅射的方法制备出ZnO:Al薄膜,以NO和O2为源气体(V(O2)/V(O2+NO)=75%),采用等离子体浸没离子注入(PⅢ)方法对薄膜进行注入得到ZnO:Al:N薄膜,注入剂量为2.23×1015 cm-2,并在N2氛围下对样品进行了不同温度的退火处理.通过XRD图谱、霍尔效应(Hall)测试结果、紫外-可见光透射光谱等对样品的结构和性能进行了分析,着重研究了退火温度对ZnO:Al:N薄膜性质的影响.结果表明,退火可以使注人产生的ZnO(N2)3团簇分解,并且使N以替位O的方式存在.当退火温度达到850℃时,ZnO薄膜实现了p型反转,实现p型反转的ZnO:AliN薄膜载流子浓度可达3.68×1012cm-3,电阻率为11.2 Ω·cm,霍耳迁移率为31.4 cm2·V-1·s-1.     

Si^＋和S^＋注入SI—GaAs白光快速退火特性

研究了 Si~+和 S~+注入 SI-GaAs 经白光瞬态退火后的电特性,得出最佳的退火条件为930～960℃,5s.在适当的注入和退火条件下,得到了陡峭的载流子剖面分布没有拖长的尾巴.发现Si~+注入白光快速退火样品比常规热退火样品有较好的电特性.使用 Si~+注入白光快速退火制作出了性能良好的全离子注入平面型 MESFET.     

高温后退火对薄膜太阳能电池光电性能的影响

应用SILVACO仿真软件,对N、P区杂质浓度分别为1×1016和1×1017cm-3的非晶硅薄膜太阳能电池进行了后退火工艺仿真研究.结果表明:非晶硅薄膜太阳能电池的光谱响应特性随着后退火温度的升高和退火时间的增加而提高.与未后退火电池相比,保持后退火时间1 min,退火温度分别为900,950和1 000℃时,电池的短路电流(Isc)增加约5.39%;保持后退火温度为950℃,退火时间从1 min增加到5 min,电池的短路电流(Isc)提高约6.37%.但是,电池的光谱响应特性的提高与后退火工艺参数不成正比关系.为了减小后退火对电池杂质再分布的影响,确定最佳后退火工艺参数为950℃和4 min.研究表明在薄膜电池的生产中增加后退火工艺可以有效地提高薄膜太阳能电池的光谱响应性能.     

单晶硅中离子注入及快速热退火后浓度分布模型

在考虑B，P，As离子注入单晶硅中的浓度分布模型的基础上，讨论了快速热退火对3种注入离子浓度分布的影响，提出了3种离子在快速热退火后浓度分布的修正模型，由修正后的模型得到的多次离子注入模拟结果与实验结果符合很好。     

离子注入对花生M2代生物学效应的影响

对已分别接受0、1×1012cm-2Cu+2、1×1011cm-2Cu+2、4×1011cm-2P+2、9×1011cm-2P+2离子注入的山东烟台"栖选1号"花生(Arachis hypogaeaL.)种子进行了栽培,研究比较各组花生M2代营养生长、生殖生长及产量的情况.综合各项指标表明:与对照组相比,9×1011cm-2P+2离子注入组在M1和M2代中保持了稳定的优势,1×1011cm-2Cu+2离子注入组的M2代的生物学效应作用最佳.     

确定小剂量离子注入均匀性的新方法

提出一种测量小剂量离子注入样品均匀性的新方法——多探针Ｃ－Ｖ法．研制了相关的硬件和软件．此方法基于以下２个新颖的思想：１）采用多根探针测量，由微机通过开关矩阵进行控制，自动轮流切换，大大提高了速度、效率和可靠性．２）采用深浅不同的彩色地图（ＭＡＰ）来表示大硅片上各测量点的注入剂量，从而形象直观地显示出离子注入的均匀性，既容易理解，又容易记忆．通过对双注入ＭＯＳ样品上的８×８测试点阵列进行的测量分析证明：此系统及此新方法可用于离子注入工艺的在线监测     

Characterization of Ordovician carbonate reservoirs, southeastern Saskatchewan, Canada

The discovery of the prolific Ordovician Red River reservoirs in 1995 in southeastern Saskatchewan was the catalyst for extensive exploration activity which resulted in the discovery of more than 15 new Red River pools. The best yields of Red River production to date have been from dolomite reservoirs. Understanding the processes of dolomitization is, therefore, crucial for the prediction of the connectivity, spatial distribution and heterogeneity of dolomite reservoirs.The Red River reservoirs in the Midale area consist of 3～4 thin dolomitized zones, with a total thickness of about 20 m, which occur at the top of the Yeoman Formation. Two types of replacement dolomite were recognized in the Red River reservoir: dolomitized burrow infills and dolomitized host matrix. The spatial distribution of dolomite suggests that burrowing organisms played an important role in facilitating the fluid flow in the backfilled sediments. This resulted in penecontemporaneous dolomitization of burrow infills by normal seawater. The dolomite in the host matrix is interpreted as having occurred at shallow burial by evaporitic seawater during precipitation of Lake Almar anhydrite that immediately overlies the Yeoman Formation. However, the low δ18O values of dolomited burrow infills (-5.9‰～ -7.8‰, PDB) and matrix dolomites (-6.6‰～ -8.1‰, avg. -7.4‰ PDB) compared to the estimated values for the late Ordovician marine dolomite could be attributed to modification and alteration of dolomite at higher temperatures during deeper burial, which could also be responsible for its 87Sr/86Sr ratios (0.7084～0.7088) that are higher than suggested for the late Ordovician seawaters (0.7078～0.7080). The trace amounts of saddle dolomite cement in the Red River carbonates are probably related to "cannibalization" of earlier replacement dolomite during the chemical compaction.     

An Index mechanism for multi-scale view in spatial databases

There are numerous geometric objects stored in the spatial databases. An importance function in a spatial database is that users can browse the geometric objects as a map efficiently. Thus the spatial database should display the geometric objects users concern about swiftly onto the display window. This process includes two operations:retrieve data from database and then draw them onto screen. Accordingly, to improve the efficiency, we should try to reduce time of both retrieving object and displaying them. The former can be achieved with the aid of spatial index such as R-tree, the latter require to simplify the objects. Simplification means that objects are shown with sufficient but not with unnecessary detail which depend on the scale of browse. So the major problem is how to retrieve data at different detail level efficiently. This paper introduces the implementation of a multi-scale index in the spatial database SISP (Spatial Information Shared Platform) which is generalized from R-tree. The difference between the generalization and the R-tree lies on two facets: One is that every node and geometric object in the generalization is assigned with a importance value which denote the importance of them, and every vertex in the objects are assigned with a importance value,too. The importance value can be use to decide which data should be retrieve from disk in a query. The other difference is that geometric objects in the generalization are divided into one or more sub-blocks, and vertexes are total ordered by their importance value. With the help of the generalized R-tree, one can easily retrieve data at different detail levels.Some experiments are performed on real-life data to evaluate the performance of solutions that separately use normal spatial index and multi-scale spatial index. The results show that the solution using multi-scale index in SISP is satisfying.     

A computer generator for randomly layered structures

AcomputergeneratorforrandomlylayeredstructuresYUJia shun1,2,HEZhen hua2(1.TheInstituteofGeologicalandNuclearSciences,NewZealand;2.StateKeyLaboratoryofOilandGasReservoirGeologyandExploitation,ChengduUniversityofTechnology,China)Abstract:Analgorithmisintrod…     

海南岛地体及其毗邻陆缘晚中生代—新生代古地磁研究和构造演化

本文叙述了对海南岛及其毗邻大陆边缘白垩纪到第四纪地层岩石进行古地磁研究的全部工作过程。通过分析岩石中剩余磁矢量的磁偏角及磁倾角的变化,提出海南岛白垩纪以来经历的构造演化模式如下:早期伴随顺时针旋转而向南迁移,后期伴随逆时针转动并向北运移。联系该地区及邻区的地质、地球物理资料,对海南岛上述的构造地体运动提出以下认识:北部湾内早期有一拉张作用,主要是该作用使湾内地壳显著伸长减薄,形成北部湾盆地。从而导致了海南岛的早期构造运动,而海南岛后期的构造运动则主要是受南海海底扩张的影响。海南地体运动规律的阐明对于了解北部湾油气盆地的形成演化有重要的理论和实际意义。     

Exciton Seebeck in Molecular Systems

Various applications relevant to the exciton dynamics,such as the organic solar cell,the large-area organic light-emitting diodes and the thermoelectricity,are operating under temperature gradient.The potential abnormal behavior of the exicton dynamics driven by the temperature difference may affect the efficiency and performance of the corresponding devices.In the above situations,the exciton dynamics under temperature difference is mixed with     

Achieving Unusual States of Matter Under High Pressure

The elongation method,originally proposed by Imamura was further developed for many years in our group.As a method towards O(N)with high efficiency and high accuracy for any dimensional systems.This treatment designed for one-dimensional(ID)polymers is now available for three-dimensional(3D)systems,but geometry optimization is now possible only for 1D-systems.As an approach toward post-Hartree-Fock,it was also extended to     

《Chinese Science Bulletin》SUBJECT INDEX TO VOLUME 59(2014)

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An on-line scaling method for improving scalability of a database cluster

The explosive growth of the Internet and database applications has driven database to be more scalable and available, and able to support on-line scaling without interrupting service. To support more client's queries without downtime and degrading the response time, more nodes have to be scaled up while the database is running. This paper presents the overview of scalable and available database that satisfies the above characteristics. And we propose a novel on-line scaling method. Our method improves the existing on-line scaling method for fast response time and higher throughputs. Our proposed method reduces unnecessary network use, i.e. , we decrease the number of data copy by reusing the backup data. Also, our on-line scaling operation can be processed parallel by selecting adequate nodes as new node. Our performance study shows that our method results in significant reduction in data copy time.     

An improved R-tree based on childnode''s probability

R-Tree is a good structure for spatial searching. But in this indexing structure,either the sequence of nodes in the same level or sequence of traveling these nodes when queries are made is random. Since the possibility that the object appears in different MBR which have the same parents node is different, if we make the subnode who has the most possibility be traveled first, the time cost will be decreased in most of the cases. In some case, the possibility of a point belong to a rectangle will shows direct proportion with the size of the rectangle. But this conclusion is based on an assumption that the objects are symmetrically distributing in the area and this assumption is not always coming into existence. Now we found a more direct parameter to scale the possibility and made a little change on the structure of R-tree, to increase the possibility of founding the satisfying answer in the front sub trees. We names this structure probability based arranged R-tree (PBAR-tree).     

Integrating GIS Web services based on mediating architecture

The geographic information service is enabled by the advancements in general Web service technology and the focused efforts of the OGC in defining XML-based Web GIS service. Based on these models, this paper addresses the issue of services chaining,the process of combining or pipelining results from several interoperable GIS Web Services to create a customized solution. This paper presents a mediated chaining architecture in which a specific service takes responsibility for performing the process that describes a service chain. We designed the Spatial Information Process Language (SIPL) for dynamic modeling and describing the service chain, also a prototype of the Spatial Information Process Execution Engine (SIPEE) is implemented for executing processes written in SIPL. Discussion of measures to improve the functionality and performance of such system will be included.