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1.
为了探究沉积气压对ZrO2薄膜光学特性的影响规律,以玻璃和硅片为基底,利用射频磁控溅射的方法在不同沉积气压下制备ZrO2薄膜样品.通过分光光度计测定薄膜在可见光波段的透射光谱,利用椭圆偏振谱仪表征薄膜的折射率、消光系数、厚度等光学参量,利用原子力显微镜观测薄膜表面的微观结构等.结果表明:(1)薄膜的沉积速率随沉积气压的增大而减小,沉积气压为0.4 Pa时沉积速率最大,为0.033 nm/s,沉积气压为1.0 Pa时沉积速率最小,为0.011 nm/s;(2)当沉积气压为1.0 Pa时,200~1 000 nm波段薄膜的平均透射率和折射率均最高,分别为82.71%和2.35,表现出良好的透光性;(3)沉积气压对薄膜消光系数的影响较小;(4)不同沉积气压下制备薄膜的表面粗糙度也不同,沉积气压为1.0 Pa时薄膜的粗糙度最低,为5.5 nm,沉积气压为0.6 Pa时薄膜的粗糙度最高,为25.2 nm.  相似文献   

2.
《大连民族学院学报》2007,9(5):F0002-F0002,F0003
一、“利用辉光介质阻挡放电沉积多种功能性薄膜”(编号:10405005) 项目主持人:刘东平 利用介质阻挡放电在沉积DLC薄膜方面的优势,将该方法移植至其他功能,性薄膜(如a-Si:H、SiO2、a-C:N、TiO2等)的制备研究中,分析薄膜特性,开创新的研究工作;对脉冲辉光放电形成过程及等离子体鞘层活性物种种类、能量及密度进行模拟,结合对薄膜在原子水平上的分析结果,研究薄膜的低能沉积和高能溅射过程,分析薄膜沉积机理。  相似文献   

3.
脉冲激光沉积(PLD)技术及其应用研究   总被引:9,自引:1,他引:9       下载免费PDF全文
综述了脉冲激光沉积(PLD)薄膜技术的原理、特点,着重分析了脉冲激光沉积技术的研究现状和在功能薄膜制备中的应用前景。大量研究表明,脉冲激光沉积技术是目前最好的制备薄膜方法之一。  相似文献   

4.
顺序沉积薄膜制备技术包括前驱薄膜制备和后期薄膜热处理技术,特别适合复杂组分的薄膜制备.采用IM100离子束材料芯片沉积仪在MgO(100)基片上顺序沉积Gd2O3和Al单层薄膜,经后续低温扩散和高温晶化两步热处理得到GdAlO3单一晶相薄膜.以X射线衍射(XRD)、扫描电镜(SEM)等手段,分析所得GdAlO3薄膜的晶体结构和微观形貌,考察热处理过程对GdAlO3薄膜生长过程及微观结构的影响.实验结果表明顺序沉积薄膜制备技术具有化学计量比控制精确的优点,两步热处理可以得到结晶状况良好的单相结晶薄膜.  相似文献   

5.
在脉冲激光沉积类金刚石薄膜过程中,针对薄膜均匀性差的问题,提出偏轴沉积、脉冲激光扫描沉积、双光束沉积和多光束沉积等模式来改善薄膜的均匀性。初步建立了脉冲激光沉积类金刚石薄膜厚度均匀性模型,并分别进行了薄膜厚度分布的模拟,在模拟过程中,强调了在不影响薄膜性能的基础上改善薄膜均匀性,并讨论了沉积模式对薄膜颗粒物问题的影响。结果表明,采用多光束沉积薄膜,厚度均匀性得到极大改善,而且颗粒物问题也得到了改善。最后提出模型改良意见。  相似文献   

6.
氩离子束溅射沉积PTFE高分子膜   总被引:1,自引:1,他引:0  
用氩离子束溅射聚四氟乙烯靶材,在黄铜上沉积聚四氟乙烯薄膜,用XPS和IRS分析方法确定了聚四氟乙烯高分子膜的存在,并依据沉积膜形成过程对沉积膜与靶材在IRS谱图上的差异给予了解释,结果表明,这种溅射沉积方法形成高分子薄膜是有效的。  相似文献   

7.
采用简单表面反应模式,对化学气相沉积金刚石薄膜的表面动力学过程进行了研究,得到了金刚石薄膜的沉积速率公式,揭示了影响薄膜生长的因素并由此讨论了金刚石薄膜生长的机制和规律。  相似文献   

8.
在氮氧混合气体中,通过离子束辅助,采用真空电弧沉积了氮掺杂的TiO2薄膜样品,研究了离子束流对掺氮二氧化钛薄膜的结构、光学性质和光催化性能的影响。实验结果表明:离子束辅助沉积的薄膜为非品态结构,薄膜经500℃热处理后向锐钛矿转变,且锐钛矿的(101)面的峰最强。通过UV分析发现离子束辅助沉积的掺氮二氧化钛薄膜的吸收峰发生红移,其光催化活性随着离子束流的增大而减小。  相似文献   

9.
热处理条件对热蒸镀WO3薄膜结构的影响   总被引:4,自引:0,他引:4  
采用高真空热蒸发沉积技术在硅单晶Si(111)衬底上沉积了WO3薄膜,借助化学刻蚀,SEM,XRD和Raman光谱分析等手段,了不同的热处理条件对WO3薄膜结构的影响,结果表明,在真空条件下或干燥Ar气氛条件下对薄膜进行退火热处理有利于控制薄膜晶粒的生长,同时有利于增强薄膜的稳定性。  相似文献   

10.
利用直流-射频等离子化学气相沉积技术在玻璃、硅和钢表面沉积得到了薄膜,并用拉曼光谱和原子力对薄膜的结构和形貌进行了表征,用静动摩擦实验机对薄膜的摩擦学性能进行了测试.结果表明:沉积在硅和钢表面的薄膜具有典型类金刚石薄膜的特征,而沉积在玻璃表面的薄膜呈现类聚合物结构的特征,且沉积在玻璃表面的薄膜具有比较粗糙的表面,而沉积在硅表面的薄膜则比较光滑致密.摩擦学实验表明,沉积在硅表面的薄膜具有良好的摩擦学性能.  相似文献   

11.
The discovery of the prolific Ordovician Red River reservoirs in 1995 in southeastern Saskatchewan was the catalyst for extensive exploration activity which resulted in the discovery of more than 15 new Red River pools. The best yields of Red River production to date have been from dolomite reservoirs. Understanding the processes of dolomitization is, therefore, crucial for the prediction of the connectivity, spatial distribution and heterogeneity of dolomite reservoirs.The Red River reservoirs in the Midale area consist of 3~4 thin dolomitized zones, with a total thickness of about 20 m, which occur at the top of the Yeoman Formation. Two types of replacement dolomite were recognized in the Red River reservoir: dolomitized burrow infills and dolomitized host matrix. The spatial distribution of dolomite suggests that burrowing organisms played an important role in facilitating the fluid flow in the backfilled sediments. This resulted in penecontemporaneous dolomitization of burrow infills by normal seawater. The dolomite in the host matrix is interpreted as having occurred at shallow burial by evaporitic seawater during precipitation of Lake Almar anhydrite that immediately overlies the Yeoman Formation. However, the low δ18O values of dolomited burrow infills (-5.9‰~ -7.8‰, PDB) and matrix dolomites (-6.6‰~ -8.1‰, avg. -7.4‰ PDB) compared to the estimated values for the late Ordovician marine dolomite could be attributed to modification and alteration of dolomite at higher temperatures during deeper burial, which could also be responsible for its 87Sr/86Sr ratios (0.7084~0.7088) that are higher than suggested for the late Ordovician seawaters (0.7078~0.7080). The trace amounts of saddle dolomite cement in the Red River carbonates are probably related to "cannibalization" of earlier replacement dolomite during the chemical compaction.  相似文献   

12.
AcomputergeneratorforrandomlylayeredstructuresYUJia shun1,2,HEZhen hua2(1.TheInstituteofGeologicalandNuclearSciences,NewZealand;2.StateKeyLaboratoryofOilandGasReservoirGeologyandExploitation,ChengduUniversityofTechnology,China)Abstract:Analgorithmisintrod…  相似文献   

13.
本文叙述了对海南岛及其毗邻大陆边缘白垩纪到第四纪地层岩石进行古地磁研究的全部工作过程。通过分析岩石中剩余磁矢量的磁偏角及磁倾角的变化,提出海南岛白垩纪以来经历的构造演化模式如下:早期伴随顺时针旋转而向南迁移,后期伴随逆时针转动并向北运移。联系该地区及邻区的地质、地球物理资料,对海南岛上述的构造地体运动提出以下认识:北部湾内早期有一拉张作用,主要是该作用使湾内地壳显著伸长减薄,形成北部湾盆地。从而导致了海南岛的早期构造运动,而海南岛后期的构造运动则主要是受南海海底扩张的影响。海南地体运动规律的阐明对于了解北部湾油气盆地的形成演化有重要的理论和实际意义。  相似文献   

14.
Various applications relevant to the exciton dynamics,such as the organic solar cell,the large-area organic light-emitting diodes and the thermoelectricity,are operating under temperature gradient.The potential abnormal behavior of the exicton dynamics driven by the temperature difference may affect the efficiency and performance of the corresponding devices.In the above situations,the exciton dynamics under temperature difference is mixed with  相似文献   

15.
The elongation method,originally proposed by Imamura was further developed for many years in our group.As a method towards O(N)with high efficiency and high accuracy for any dimensional systems.This treatment designed for one-dimensional(ID)polymers is now available for three-dimensional(3D)systems,but geometry optimization is now possible only for 1D-systems.As an approach toward post-Hartree-Fock,it was also extended to  相似文献   

16.
17.
The explosive growth of the Internet and database applications has driven database to be more scalable and available, and able to support on-line scaling without interrupting service. To support more client's queries without downtime and degrading the response time, more nodes have to be scaled up while the database is running. This paper presents the overview of scalable and available database that satisfies the above characteristics. And we propose a novel on-line scaling method. Our method improves the existing on-line scaling method for fast response time and higher throughputs. Our proposed method reduces unnecessary network use, i.e. , we decrease the number of data copy by reusing the backup data. Also, our on-line scaling operation can be processed parallel by selecting adequate nodes as new node. Our performance study shows that our method results in significant reduction in data copy time.  相似文献   

18.
R-Tree is a good structure for spatial searching. But in this indexing structure,either the sequence of nodes in the same level or sequence of traveling these nodes when queries are made is random. Since the possibility that the object appears in different MBR which have the same parents node is different, if we make the subnode who has the most possibility be traveled first, the time cost will be decreased in most of the cases. In some case, the possibility of a point belong to a rectangle will shows direct proportion with the size of the rectangle. But this conclusion is based on an assumption that the objects are symmetrically distributing in the area and this assumption is not always coming into existence. Now we found a more direct parameter to scale the possibility and made a little change on the structure of R-tree, to increase the possibility of founding the satisfying answer in the front sub trees. We names this structure probability based arranged R-tree (PBAR-tree).  相似文献   

19.
There are numerous geometric objects stored in the spatial databases. An importance function in a spatial database is that users can browse the geometric objects as a map efficiently. Thus the spatial database should display the geometric objects users concern about swiftly onto the display window. This process includes two operations:retrieve data from database and then draw them onto screen. Accordingly, to improve the efficiency, we should try to reduce time of both retrieving object and displaying them. The former can be achieved with the aid of spatial index such as R-tree, the latter require to simplify the objects. Simplification means that objects are shown with sufficient but not with unnecessary detail which depend on the scale of browse. So the major problem is how to retrieve data at different detail level efficiently. This paper introduces the implementation of a multi-scale index in the spatial database SISP (Spatial Information Shared Platform) which is generalized from R-tree. The difference between the generalization and the R-tree lies on two facets: One is that every node and geometric object in the generalization is assigned with a importance value which denote the importance of them, and every vertex in the objects are assigned with a importance value,too. The importance value can be use to decide which data should be retrieve from disk in a query. The other difference is that geometric objects in the generalization are divided into one or more sub-blocks, and vertexes are total ordered by their importance value. With the help of the generalized R-tree, one can easily retrieve data at different detail levels.Some experiments are performed on real-life data to evaluate the performance of solutions that separately use normal spatial index and multi-scale spatial index. The results show that the solution using multi-scale index in SISP is satisfying.  相似文献   

20.
The geographic information service is enabled by the advancements in general Web service technology and the focused efforts of the OGC in defining XML-based Web GIS service. Based on these models, this paper addresses the issue of services chaining,the process of combining or pipelining results from several interoperable GIS Web Services to create a customized solution. This paper presents a mediated chaining architecture in which a specific service takes responsibility for performing the process that describes a service chain. We designed the Spatial Information Process Language (SIPL) for dynamic modeling and describing the service chain, also a prototype of the Spatial Information Process Execution Engine (SIPEE) is implemented for executing processes written in SIPL. Discussion of measures to improve the functionality and performance of such system will be included.  相似文献   

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