场致发射硅尖阵列的研制

研究真空微电子器件场致发射硅尖阵列的制作工艺.利用HNA湿法腐蚀工艺制作场致发射硅尖阵列,比较带胶腐蚀与不带胶腐蚀的不同.采用氧化削尖技术对硅尖进行锐化处理.制作了50×60硅尖阵列,同时给出了硅尖阵列的I-V特性.利用HNA湿法腐蚀制备的硅尖结构与理论分析一致,锐化处理改善了硅尖阴极阵列的场致发射特性.     

Field emission characteristics of ZnO nanotetrapods and the effect of thermal annealing in hydrogen

Large-scale tetrapod-like ZnO nanostructures have been synthesized using a thermal chemical vapor deposition method on a silicon substrate. The high-purity nanotetrapods show sharp tips geometry with a wurtzite structure. The field emission properties of the uniform ZnO nanostructural material are investigated at different anode-cathode distances. The turn-on field for the ZnO nanotetrapods is found to be about 3.7 V/μm at a current density of 1 μA/cm^2. The field emission behavior obeys Fowler-Nordheim relationship. More importantly, the field emission properties are improved after annearing in hydrogen, and therefore high emission current and low turn-on field are obtained. These results indicate that tetrapod-like ZnO nanostructures are a promising candidate for cold cathode emitters.     

Silicon field emission arrays coated with CN<Subscript>x</Subscript> thin films

Arrays of silicon micro-tips were made by etching the p-type (1 0 0) silicon wafers which had SiO₂ masks with alkaline solution. The density of the micro-tips is 2×10⁴ cm⁻². The Scanning Electron Microscope (SEM) photos showed that the tips in these arrays are uniform and orderly. The CN_x thin film, with the thickness of 1.27 μm was deposited on the silicon micro-tip arrays by using the middle frequency magnetron sputtering technology. The SEM photos showed that the films on the tips are smoothly without particles. Keeping the sharpness of the tips will benefit the properties of field emission. The X-ray photoelectron spectrum (XPS) showed that carbon, nitrogen and oxygen are the three major elements in the surfaces of the films. The percents of them are C: 69.5%, N: 12.6% and O: 17.9%. The silicon arrays coated with CN_x thin films had shown a good field emission characterization. The emission current intensity reached 3.2 mA/cm² at 32.8 V/μm, so it can be put into use. The result showed that the silicon arrays coated with CN_x thin films are likely to be good field emission cathode. The preparation and the characterization of the samples were discussed in detail. Foundation item: Supported by the National Natural Science Foundation of China (19975035) Biography: Chen Ming an (1978-), male, Ph. D candidate, research direction: novel functional materials film and ion beam modification of materials.     

Field emission of SiCN thin films bombarded by Ar<Superscript>+</Superscript> ions

SiCN thin films were synthesized by a radio frequency chemical vapor deposition (RFCVD) system on P-type Si (1 0 0) wafers using C₂H₄, SiH₄ and N₂ as raw materials, In order to get rid of the oxygen absorbed on the surface and improve the characteristics of electron field emission, Ar⁺ ions of low energy were used to bombard the samples. The field emission characteristics of SiCN thin films before and after Ar⁺ bombardment were studied in the super vacuum environment of 10⁻⁶ Pa. It was showed that the turn-on field (defined as the point where the current-voltage curve shows a sharp increase in the current density) decreased from 38 V/μm before bombardment to 25 V/μm after bombardment. And the maximum emission current density increased from 159.2 to 267.4 μA/cm². The composition before and after Ar⁺ bombardment was compared using X-ray photoelectron spectroscopy (XPS). Our results illustrated that the field emission characteristics were improved after the bombardment of Ar⁺. Foundation item: Supported by the National Natural Science Foundation of China (19975035) Biography: Ma You-peng (1978), male, Master candidate, research direction: novel functional materials film and ion beam modification of materials.     

Simple method to rapidly fabricate chain-like carbon nanotube films and its field emission properties

A simple process to fabricate chain-like carbon nanotube (CNT) films by microwave plasma-enhanced chemical vapor deposition (MPCVD) was developed successfully. Prior to deposition, the Ti/Al₂O₃ substrates were ground with Fe-doped SiO₂ powder. The nano-structure of the deposited films was analyzed by scanning electron microscopy (SEM), transmission electron microscopy (TEM), and Raman spectroscopy. The field electron emission characteristics of the chain-like carbon nanotube films were measured under the vacuum of 10-5 Pa. The low turn-on field of 0.80 V/μm and the emission current density of 8.5 mA/cm2 at the electric field of 3.0 V/μm are obtained. Based on the above results, chain-like carbon nanotube films probably have important applications in cold cathode materials and electrode materials.     

无掩模选择性制备硅纳米线阵列及其光致发光

基于金属辅助硅化学刻蚀发展了一种无掩模选择性区域制备硅纳米线阵列的方法, 并利用该方法成功制备了图形化的硅纳米线阵列. 扫描电子显微镜(scanning electron microscope, SEM) 分析表明, 所制备的硅纳米线阵列是高质量的多孔微纳米结构, 并利用拉曼光谱仪研究了室温下硅纳米线阵列的光致发光特性. 结果表明, 硅纳米线阵列可实现有效的光发射, 发光波峰为663 nm. 该方法工艺简单、有效, 可潜在地应用于构筑硅基光电集成器件.     

Fabrication and magnetic properties of Co nanowire arrays of different crystal structures

It is important to find some developing high-density magnetic recording materials in magnetic recording field with the development of information and technique, in which vertical magnetic recording is a very important way and has received considerable attention[1—3]. The vertical magnetic recording materials require high squareness, suitable coercivity, and small size of storage element[4]. Someone used nanoporous anodic aluminum oxide as templates to fabricate uniform arrays of multi magneti…     

A field-emission pressure sensor of nano-crystalline silicon film

The prototype of a field-emission pressure sensor with a novel structure based on the quantum tunnel effect is designed and manufactured, where a cathode emitter array is fabricated on the same silicon plate as the sensible film. For an integrated structure, not only the alignment and vacuum bonding between the anode and cathode are easy to be realized, but also a fine sensibility is guaranteed. For example, the measured current density emitted from the effective area of the sensor can reach 53.5 A/m2 when the exterior electric field is 5.6 x 105 V/m. Furthermore, it is demonstrated by finite element method simulation that the reduction in sensor sensitivity caused by emitters on the sensible film is negligible. The difference between the maximum deflections of the sensible films with and without emitters under specified pressure is less than 0.4 %. Therefore, it can be concluded that the novel field-emission sensor structure is reasonable.     

碳纳米管/纤维阴极场发射平板显示器研制

探索了从碳纳米管/纳米纤维（CNT/CNF）的制备到CNT/CNF阴极场发射平面显示器(c-FED)封装的工艺流程.用化学气相沉积方法,优化制备条件获得了纯度较高的CNT/CNF;以 CNT/CNF和低压荧光粉为原料,采用丝网印刷工艺制作显示器的阴极和阳极;采用类真空荧光显示器的封装工艺封装了c-FED样管.所研制的c-FED具有优良的场发射性能,较好的均匀性及发光密度,黄色荧光粉的c-FED在电场为 2.7 V/μm时的亮度可达600 cd/m².因该显示器使用普通玻璃作为阴阳极基板,整个工艺流程在大面积和实用化方面有很好的应用潜力.      

Field Emission Characterization of 1D-Nanostructural ZnO Grown at Low Temperature

Ondeu-ctdio rmse nhsaivoen aaltt rwaicdteed b aan gdr-egaatp d neaaln oosft uartctteunrtialon se bmeiccaounse-of their remarkable physical and chemical properties[1 ,2].Amongthose properties ,the highaspect ratio of these materi-als makes them genuine can…     

Size distribution and element composition of dust aerosol in Chinese Otindag Sandland

Dust aerosol is one important component of atmos-pheric aerosols, and plays important roles in the Earth’s climate system and the biogeochemical cycle. Large amounts of dust aerosols produced from windblown soils and deserts are emitted annually into the atmosphere and transported over long distance to downwind land and ocean areas[1]. The deserts and desertification soils in northern China are important sources of East Asia dust aerosols. It is estimated that 800 Mt of dust aerosols emit-t…     

高性能Fe—Co合金有序纳米线阵列的制备与磁性研究

采用两步电化学阳极氧化方法制备了有序多孔氧化铝模板,通过交流电化学沉积方法在模板中合成了线间距约为62nm、直径约为25nm的Fe48Co52合金纳米线阵列,细致研究了阵列的晶体结构与磁性能．研究表明：沉积态阵列具有体心立方结构．氢气退火处理对阵列的晶体结构没有影响,但是会显著提高阵列的磁性能．退火后,Fe—Co合金纳米线阵列显示了较高的永磁性能,其易磁化方向的矫顽力、矩形度以及单根纳米线的最大磁能积分别约为3．63kOe、0．971以及33．7mol／dm^3 GOe．     

基底偏压对氮化硼薄膜场发射特性的影响

利用射频磁控溅射方法, 在n型（100）Si（0.008～0.02 Ω·m）基底上沉积了氮化 硼（BN）薄膜. 红外光谱分析表明, BN薄膜结构均为六角BN（h-BN）相. 在超高真空系统中 测量了BN薄膜的场发射特性, 发现BN薄膜的场发射特性与基底偏压关系很大, 阈值电场随基 底偏压的增加先增加后减小. 基底偏压为-140 V时BN薄膜样品场发射特性要好于其他样品, 阈值电场低于8 V/μm. F~N曲线表明, 在外加电场的作用下, 电子隧穿BN薄膜表面势垒发射 到真空.     

细胞色素C在纳米银线阵列传感器上的电化学研究

在自制的多孔阳极氧化铝模板辅助下,用直流电解法在玻碳电极表面成功生长了大面积的纳米银线阵列。高分辨扫描电镜照片显示,银纳米线阵列均匀有序,单根纳米线的直径约40 nm,这与所用氧化铝模板的平均孔径(40 nm)相当吻合。将银纳米线阵列传感器用于细胞色素C的电化学研究,灵敏度大大提高,检测限达到0.1 mg/mL。     

Generating 0.42 THz radiation from a second harmonic gyrotron

Gyrotrons are high powered coherent electromagnetic radiation sources, and are considered to be available powerful sources that have the potential to bridge the so-called terahertz gap. In the University of Electronic Science and Technology of China, a second harmonic gyrotron has been designed, manufactured, and tested. The gyrotron generated radiation at a 0.423 THz frequency in 5μs pulses with an 8.1 Tesla magnetic field, with a power per pulse of about 4.4 kW. To date this is the highest frequency recorded for vacuum electronic devices in China. The gyrotron design, operation and measurements are presented.     

电沉积Ni纳米线阵列及其磁学性能研究

为了解决因受阳极氧化铝(AAO)孔道直径限制导致合成的金属纳米线尺寸单一、磁性受限的问题,采用二次阳极氧化法制备了不同孔径的阳极氧化铝(AAO)模板,依据模板辅助电沉积法,在不同孔径AAO模板内生长了Ni纳米线阵列,利用SEM,TEM,XRD和EDS等技术对制备的Ni纳米线阵列形貌、微观结构和成分进行表征,通过物理性能...     

铁钴合金纳米线有序阵列的制备及其磁性表征

用电化学法制备了高度有序的多孔阳极氧化铝（AAO）模板，选摩尔比为1：1的CoSO4和FeSO4混合溶液为电解液，用交流电化学沉积法在多孔阳极氧化铝的柱形微孔内制备Fe0.5 Co0.5合金磁性纳米线有序阵列．分别用扫描电镜、透射电镜、X射线衍射仪对多孔氧化铝模板和纳米线阵列的微观形貌和结构进行分析，用振动样品磁强计（VSM）对样品的磁学性能进行测试．结果显示，制备的磁性合金纳米线表面光滑、均匀，纳米线中的晶粒在生长过程中有（200）晶面的择优取向．VSM测试结果表明，纳米线阵列结构具有较高的垂直磁各向异性，当外场沿纳米线轴向磁化时，纳米线阵列有很大的剩磁比（Mr／Ms=0．7）和很大的矫顽力（饱和Hc=1700 Oe），说明样品经适当热处理后，剩磁比和纵向矫顽力普遍得到提高．     

三极CNT-FED的封装技术制作研究

通过采用低熔点玻璃封接技术和高温烧结工艺，实现了稳定可靠的场致发射平板显示器高真空封装。新型的阴极粘贴技术可以实现对各种片状阴极材料进行装配，避免了碳纳米管阴极的损伤，具有制作大面积显示器件的潜力。所制作的三极结构平板显示器样品具有良好的场致发射特性以及大的阳极电流。     

Generation of single optical plasmons in metallic nanowires coupled to quantum dots

Control over the interaction between single photons and individual optical emitters is an outstanding problem in quantum science and engineering. It is of interest for ultimate control over light quanta, as well as for potential applications such as efficient photon collection, single-photon switching and transistors, and long-range optical coupling of quantum bits. Recently, substantial advances have been made towards these goals, based on modifying photon fields around an emitter using high-finesse optical cavities. Here we demonstrate a cavity-free, broadband approach for engineering photon-emitter interactions via subwavelength confinement of optical fields near metallic nanostructures. When a single CdSe quantum dot is optically excited in close proximity to a silver nanowire, emission from the quantum dot couples directly to guided surface plasmons in the nanowire, causing the wire's ends to light up. Non-classical photon correlations between the emission from the quantum dot and the ends of the nanowire demonstrate that the latter stems from the generation of single, quantized plasmons. Results from a large number of devices show that efficient coupling is accompanied by more than 2.5-fold enhancement of the quantum dot spontaneous emission, in good agreement with theoretical predictions.     

Silicon-based micro direct methanol fuel cell with an N-inputs-N-outputs anode flow pattern

A micro direct methanol fuel cell(μDMFC) is suitable for use in notebook computers,mobile phones,and other digital products.To resolve the poor mass-transport efficiency problem in the anode flow channel,this paper presents an N-inputs-N-outputs parallel flow pattern with rectangular convexes to reinforce methanol mass transport and reduce concentration polarization.The simulation results show that the N-inputs-N-outputs parallel flow channels with the rectangle convexes improve the performance.μDMFCs,which have four anode flow patterns,are fabricated using MEMS(microelectromechanical systems) technology.The experimental results show that the μDMFC with the rectangle convexes has a performance better than previously reported systems,and has a peak power density of 19.96 mW/cm2.The simulation and experimental results are in good agreement.