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1.
利用自制高纯ZnO陶瓷靶材进行了ZnO薄膜的激光分子束外延(L-MBE)生长, 发现ZnO薄膜的L-MBE生长的沉积速率远低于脉冲激光沉积(PLD)的沉积速率, 并且基于ZnO薄膜生长过程中ZnO靶材与纳秒脉冲激光的刻蚀实验现象, 利用脉冲激光烧蚀ZnO陶瓷靶材的热控制理论对ZnO靶材的低刻蚀速率和ZnO薄膜的低生长速率进行了分析讨论, 对实验结果进行了合理的解释. 分析了等离子体羽辉的形成过程及其动力学特征, 揭示了ZnO薄膜L-MBE生长所具有的独特动力学特性, 即高能等离子体冲击过程中的超饱和超快生长和脉冲间隙的热平衡弛豫的交替过程. 高能沉积粒子和低生长速率对于高结晶质量ZnO薄膜的外延制备是十分有利的.  相似文献   

2.
Al2O3/Si(001)衬底上GaN外延薄膜的制备   总被引:1,自引:0,他引:1  
利用低压金属有机物化学气相沉积方法在Al2O3/Si(001)衬底上制备出了六方结构的GaN单晶薄膜。厚度为1.1μm的GaN薄膜的(0002)X射线衍射峰半高宽是72arcmin,薄膜的玛赛克(mosaic)结构是X射线衍射峰展宽的主要原因,室温下GaN光致发光谱的带边峰位于365nm。  相似文献   

3.
利用自制的在位监测系统, 研究了用金属有机物化学气相外延法(MOCVD)在蓝宝石衬底上生长GaN时, GaN低温缓冲层的生长压力对高温生长GaN外延层性能的影响规律. 在位监测曲线及扫描电子显微镜(SEM)分析结果表明, 缓冲层生长压力越大, GaN缓冲层退火后成核中心体积越小, 表面粗糙度越大, 高温生长GaN岛间合并延迟. X射线衍射(XRD)和光致发光谱(PL)测量结果表明, GaN缓冲层生长压力增大时外延的GaN结晶质量得到改善.  相似文献   

4.
利用外延片焊接技术, 把Si(111)衬底上生长的GaN 蓝光LED外延材料压焊到新的Si衬底上. 在去除原Si衬底和外延材料中缓冲层后, 制备了垂直结构GaN 蓝光LED. 与外延材料未转移的同侧结构相比, 转移后的垂直结构GaN 蓝光LED的电学性能、发光性能和结构性能明显改善, 光输出功率显著提高. 垂直结构LED的GaN层受到的张应力比同侧结构LED小.  相似文献   

5.
利用电感耦合等离子体(ICP)及电子束探针微分析(EPMA)装置对等离子体辅助的分子束外延(MBE)法在蓝宝石衬底上生长的Zn1-xMgxO薄膜的Mg组分进行了测试.经理论分析,导出适合于生长过程中Zn过剩和Zn不足两种情况下进行Mg组分分析的理论模型.进一步针对Zn过剩的生长条件,得出表示薄膜的Mg组分与薄膜生长过程中Mg坩埚温度之间关系的数学表达式,并通过实验测试验证了这一表达式的正确性.  相似文献   

6.
大面积薄膜的组分和厚度分布是实际工艺中最为关心的问题之一. 利用实验和直接模拟Monte Carlo(DSMC)方法, 分别研究了双电子束和三电子束物理气相沉积(EBPVD)中, 钇和钛蒸气原子的三维低密度、非平衡射流, 获得了它们在100和150 mm单晶硅基片表面的沉积厚度和组分的分布. DSMC结果与钇和钛的蒸发速率的石英晶振探头原位测量值, 沉积薄膜厚度分布的台阶仪和Rutherford背散射仪的测量数据, 沉积薄膜组分分布的Rutherford背散射仪和电感耦合等离子体原子发射光谱仪测量值, 均相符甚好. 这表明通过DSMC方法与精细测量相结合, 可在原子水平上实现EBPVD输运工艺的定量预测和设计.  相似文献   

7.
采用2D轴对称瞬态模型对热梯度化学气相渗积(TCVI)22艺制备高性能C/C复合材料过程进行模拟.模型包括对流、热传导、扩散、沉积反应和孔隙演变等物理化学过程.采用有限元方法实现了多物理场迭代耦合计算,得到了各时刻流场、温度场和密度分布规律,研究表明对流对温度场分布具有重要影响.对于采用TCVI工艺致密化100h的C/C复合材料,对比实验测得的预制体平均密度径向分布,计算结果与实验结果符合一致规律,验证了模型的可靠性和模拟计算的预测能力.  相似文献   

8.
研究了利用电化学原子层外延法(electrochemical atomic layer epitaxy, ECALE)在Pt电极上生长Sb2Te3化合物半导体薄膜热电材料的过程. 采用循环伏安扫描分别研究了Te和Sb在Pt衬底上以及在覆盖了一层元素之上的电沉积特性, 在此基础上使用自动沉积系统交替电化学沉积了400个Te和Sb原子层. 采用XRD, FESEM和FTIR等多种分析测试手段对沉积薄膜的结构、形貌、禁带 宽等进行了表征. XRD结果表明, 沉积物是Sb2Te3化合物, 与EDX定量分析和 电量计算结果吻合; FESEM对薄膜表面及断面形貌检测表明沉积颗粒排列紧 密、大小均匀, 平均粒径约为20 nm, 薄膜均匀平坦, 膜厚约190 nm; 由于沉积薄膜的纳米结构, FTIR吸收谱出现蓝移, 测得Sb2Te3薄膜禁带宽为0.42 eV.  相似文献   

9.
研究了利用有机化学气相沉积外延方法在c面宝石(α-A1203)衬底上两步法外延生长的氮化铝薄膜.缓冲层采用氮化铝成核层.原位反射谱表明氮化铝成核过程有别于氮化镓缓冲层成核,在优化的条件下显示出单一晶面取向.同时,X射线衍射分析表明氮化铝初始成核过程中,缓冲层存在着压应变;随着成核时间的增加及退火,压应变逐渐得到驰豫.结合透射光谱分析发现,在外廷层的生长过程中,较高的的Ⅴ/Ⅲ比能够提高氮化铝薄膜的晶体质量,但是生长速率下降,可能是由于三甲基铝与氨气的寄生反应加剧造成的;另外,对氮化铝外延层进行适度的Si掺杂能够在一定程度上改善薄膜表面形貌.  相似文献   

10.
通过化学气相沉积法(CVD),以三氧化钼(MoO_3)粉末和硫(S)粉末作为反应物,将二硫化钼(MoS_2)纳米薄膜直接沉积到石英衬底上.通过光学显微镜、扫描电子显微镜(SEM)和原子力显微镜(AFM)对薄膜的表面形貌进行了观察.发现所生长的MoS_2薄膜为纳米层状结构.通过拉曼光谱和光致发光光谱对生长的薄膜进行结构及光学性能分析.结果表明生长的纳米薄膜中有单层、双层和三层MoS_2薄膜的存在,同时在单层、双层和三层MoS_2薄膜中观察到了光致发光现象.并分析解释了MoS_2纳米薄膜从体材料向单层转变时能带结构的变化.  相似文献   

11.
We studied the impact of the thickness of GaN buffer layer on the properties of distributed Bragg reflector (DBR) grown by metalorganic chemical vapor deposition (MOCVD). The samples were characterized by using metallographic microscope, transmission electron microscope (TEM), atomic force microscopy (AFM), X-ray diffractometer (XRD) and spectrophoto- meter. The results show that the thickness of the GaN buffer layer can significantly affect the properties of the DBR structure and there is an optimal thickn...  相似文献   

12.
In order to reduce the cost of solar cells or flat-panel display,it is very important to synthesis polycrystalline silicon films on low cost substrate such as glass at low temperature.In this work,electron cyclotron resonance(ECR)plasma enhanced chemical vapor deposition(PECVD)system was successfully applied to synthesize poly-Si thin-film on common glass substrate using H2 as the plasma source and SiH4(Ar:SiH4=19:1)as the precursor gas at low temperature.Since the multicusp cavity-coupling ECR plasma sourc...  相似文献   

13.
Summary Multiple faceted gallstones with an internal fissure have been examined by gas chromatography-mass spectrometry. In vivo. the fissures probably contain only water vapor. The fissure may be produced by dehydration or water trapping during the stone formation process.  相似文献   

14.
Ultrastruttura della calcificazione distrofica renale da sublimato   总被引:2,自引:0,他引:2  
Summary Carrying on the researches on the biological process of calcium deposition, the role of the substructures in the precipitation of calcium salts in the loci of distrophic calcification of kidney tubules following sublimate injections has been investigated. In agreement with the histochemical data previously found, the presence of collagen fibres in these sites is excluded; the morphological appearance of crystal deposits is described. The importance of mitochondria in the calcium ion deposition in kidney tubules is discussed.  相似文献   

15.
Summary Through their catalytic abilities microbes can increase rates of chemical reactions which would take a very long time to reach equilibrium under abiotic conditions. Microbes also alter the concentration and composition of chemicals in the environment, thereby creating new conditions for further biological and chemical reactions. Rates of degradation and possible indirect consequences on leaching rates in waste repositories are a function of the presence or absence of microbes and of the conditions which allow them to become catalytically active.Microbially mediated reactions are no exception to the rule that all chemical processes are basically governed by thermodynamic laws. Naturally occurring processes proceed in the direction that leads to the minimal potential energy level attained when equilibrium is reached. A continuous supply of energy to an ecosystem in the form of biochemically unstable compounds maintains non-equilibrium conditions, a prerequisite for all chemotrophic life. Energy is released as a chemical reaction progresses towards equilibrium. Microbes scavenge that portion of the free energy of reaction (Gr) which can be converted into biochemically usable forms during the chemical oxidation processes. As electrontransfer catalysts, the microorganisms mediate reactions which are thermodynamically possible thereby stimulating reaction rates. Decomposition and mineralization in systems without a continuous supply of substrates and oxidants will lead to equilibria with minimal free energy levels at which point further microbial action would cease. The differences in the free energy levels of reactions (Gr), represent the maximal energy which is available to microorganisms for maintenance and growth. How much of the released free energy will be conserved in energy-rich bonds, compounds (e.g. ATP), and chemical potentials (e.g. emf) useful for biosynthesis and biological work is characteristic for the microbes involved and the processes and metabolic routes employed.Materials whose elements are not present in the most oxidized form attainable in the oxic environment of our planet are potentially reactive. Microbial activities are associated only with chemical reactions whose free energy changes are exergonic. This should be kept in mind for all investigations related to the role of microbes in repositories or in the layout of proper waste storage conditions. Rigorous application of thermodynamic concepts to environmental microbiology allows one to develop models and design experiments which are often difficult to conceive of in complex natural systems from physiological information alone. Thermodynamic considerations also aid in selecting proper deposition conditions and in carrying out thoughtful experiments in areas related to microbial ecology of waste repositories.  相似文献   

16.
Summary Interactive effects between acid deposition and the rest of the environment are the key to further understanding. Although this article deals only with plant growth in relation to the chemical state of the soil and not with aerial effects, it is still possible to illustrate a number of interactions and patterns of response among both vascular and non-vascular components of vegetation. Evidence is examined with regard to plant age, pre-treatment and the nature of nutrient supply. It includes consideration of both effects of soil on plants and of plants on soil, notes both antagonisms and symbioses, and draws attention to inducible defence systems.  相似文献   

17.
Despite being relatively insensitive to environmental insult, the spore is responsive to low concentrations of chemical germinants, which induce germination. The process of bacterial spore germination involves membrane permeability changes, ion fluxes and the activation of enzymes that degrade the outer layers of the spore. A number of components in the spore that are required for the germination response have been identified, including a spore-specific family of receptor proteins (the GerA family), an ion transporter and cortex lytic enzymes. The germinant traverses the outer layers of the spore and interacts with its receptor in the inner membrane to initiate the cascade of germination events, but the molecular details of this signal transduction process remain to be identified.  相似文献   

18.
    
Summary A method for obtaining true replica at ordinary temperatures and without pressure is described, using laminated celluloid wetted by acetone. This process, followed by a silica film deposition, can also be used for electron microscopy.  相似文献   

19.
The history of the Greenlandic mineral cryolite is outlined from its discovery in late-eighteenth century to the mid-nineteenth century, when its potential for industrial use was first recognized by the Danish chemist Julius Thomsen. During the 1850s, several attempts were made to exploit cryolite for the production of soda and/or aluminium, of which only the soda process became implemented on an industrial scale. The main part of the paper examines the early cryolite soda manufacture, its chemical basis as well as its industrial significance. The focus is thus the intersection of chemical science and technology. It is argued that Thomsen's process depended intimately on current chemical knowledge, and that, with regard to the science-technology relationship, the cryolite soda manufacture signified a new kind of industrial chemistry.  相似文献   

20.
化学方程式的自动配平是稀土数据库研究和开发中的一个重要辅助程序。已有的关于自动配平化学方程式的报道,其内容大多是数学方法的介绍和讨论,关于程序实现的论述还很少见。本文重点讨论了通过java语言实现化学方程式的配平过程,并使之更加完善,更加优化。该模块已在稀土数据库中使用。  相似文献   

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