NiFeNb种子层对坡莫合金磁滞回线的影响

采用NiFeNb为种子层,制备(Ni82Fe18)1-xNbx(35 )/(Ni82Fe18)(150 )/Ta(30 )系列膜,并对其颗粒大小和磁滞回线等进行测量,探讨种子层中Nb含量x对坡莫合金磁滞回线的影响.结果表明:以NiFeNb作种子层能更好地改善坡莫合金的微结构.种子层厚度为20 ,Nb含量为24 4%时,磁滞回线有最小的回线面积、矫顽力和较小的不对称性.种子层影响坡莫合金磁滞回线的一个重要原因是脱附激活能等因素造成种子层具有不同的表面粗糙度,进而使坡莫合金具有不同的微结构.     

Nb含量对纳米级NiFe薄膜ρ和磁电阻的影响

以NiFeNb为新种子层,采用直流磁控溅射法制备了(Ni82 Fe18)(1-x)Nbx(35A)/Ni82Fe18(150A)/Ta(30A)纳米级坡莫合金系列膜.测量了样品的零场电阻率(ρ),磁电阻(△R/R)和微结构.研究了ρ、△R/R随Nb含量的变化.探讨了Nb含量对坡莫合金薄膜微结构从而对其ρ和△R/R影响的微观机制.     

(Ni_(0.79)Fe_(0.21))_(1-x)Nb_x种子层对Ni_(0.79)Fe_(0.21)合金磁电阻的影响

采用磁控溅射的方法, 在诱导磁场下制备了[(Ni0 79Fe0 21)1-xNbx]/NiFe/Ta 系列膜, 测量了种子层中Nb原子的百分含量、膜的微结构和膜的MR( Magnetoresistance), 研究了种子层的厚度和种子层中Nb原子的百分含量对NiFe的MR的影响. 实验表明: 以NiFeNb为种子层可较明显的改善Ni0 79Fe0 21膜的微结构, 提高其磁电阻性能.     

以NiFeNb为新种子层的纳米级坡莫合金薄膜的各向异性磁电阻

以三元合金NiFeNb作新种子层,采用直流磁控多靶设备制备了具有不同Nb含量(x)、NiFeNb厚度(t)和坡莫合金厚 度(d)的纳米级(Ni82Fe18)1-xNbx(tnm)/Ni82Fe18(dnm)/Ta(3nm)坡莫合金系列膜.测量了样品的各向异性磁电阻和微结 构.从实验角度详细研究了AMR随x,t,d和退火等工艺条件的变化.结果表明:①作为x或t的函数,AMR在x=23.8% 或x=2.75nm处分别最大;②NiFeNb作为种子层在提高坡莫合金薄膜各向异性磁电阻方面优于Ta;③在通过中高温退 火来改善坡莫合金薄膜AMR方面,NiFeNb种子层明显好于Ta和NiFeCr.     

NiO靶烧结温度对NiO/Ni81Fe19双层膜的影响

在不同的温度下烧结制备 Ni O靶 ,用射频磁控溅射法淀积 Ni O/ Ni81 Fe1 9双层膜 ,研究了不同的温度烧结 Ni O靶对 Ni O/ Ni Fe双层膜特性的影响 ,结果表明 ,使用不同的烧结温度制备的 Ni O靶溅射所得的 Ni O膜中 Ni的化学价态及其含量不同 ,进而影响 Ni O/ Ni81 Fe1 9双层膜的磁滞回线的矩形度及层间交换耦合作用     

(Ni0.79Fe0.21)1-xNbx种子层对Ni0.79Fe0.21 合金磁电阻的影响

采用磁控溅射的方法．在诱导磁场下制备了[(Nio．79Feo．21)1-xNbx]／NiFe／Ta系列膜，测量了种子层中Nb原子的百分含量、膜的微结构和膜的MR(Magnetoresistance)．研究了种子层的厚度和种子层中Nb原子的百分含量对NiFe的MR的影响．实验表明：以NiFeNb为种子层可较明显的改善Ni0．79Feo．21膜的微结构，提高其磁电阻性能。     

C/[Co5nm/Cxnm]4/C纳米颗粒膜的微结构和磁特性研究

在室温下,应用对靶磁控溅射法制备了多层C/[Co5nm/Cxnm]4/C颗粒膜.C靶和Co靶分别采用了射频溅射和直流对靶溅射模式,随后进行了原位退火.用振动样品磁强计(VSM)和扫描探针显微镜(SPM)系统研究了插层C层的厚度对多层颗粒膜的微结构和磁特性的影响.X射线衍射(XRD)图样显示出样品具有六角密堆积结构.振动样品磁强计测量表明磁矩很好地排列在膜面内,在插层C层的厚度为12nm时矫顽力达到最大值,剩磁比接近于1.     

Ti(t)/Co(54nm)/Ti(t)纳米薄膜的制备和磁特性

应用对靶磁控溅射法在玻璃基底上制备了Ti(t)/Co(54nm)/Ti(t)(t=5,10,15,20,25nm)纳米薄膜,研究了非磁性Ti层厚度对样品磁特性的影响.实验结果显示,Ti(5nm)/Co(54nm)/Ti(5nm)样品的垂直膜面矫顽力高达159kA·m-1.研究表明,如此高的矫顽力主要源于样品晶粒的磁晶各向异性.另外,非磁性Ti原子的扩散在一定程度上减小了磁性颗粒间的交换相互作用,导致出现大的矫顽力.     

TbFeCoPr多层膜磁光科尔谱的矩阵法模拟

利用4×4矩阵法,模拟了(Tb23Fe72.5Co4.5)100-xPrx或(Tb27Fe65Co8)100-xPrx两个磁性多层膜系统的磁光科尔旋转角和椭圆率分别随入射角和磁性层厚度的变化.计算结果表明:(1)引入界面效应,发现界面结构对结果有重要的影响,当d1=d2=h/2时,理论模拟结果很好地解释了实验结果;(2)在入射光波长为670、825nm时,(Tb23Fe72.5Co4.5)100-xPrx和(Tb27Fe65Co8)100-xPrx两个多层膜系统的科尔旋转角随磁性层的厚度和入射角度的变化都存在峰值,Pr含量的变化不会改变科尔谱的形状,但对科尔旋转角的峰值有影响.     

[FePt/Ta]5Ta多层膜的磁性和磁后效

采用磁控溅射法制备了[FePt/Ta]5Ta多层膜,通过XRD检测样品为单相L10结构,没有发现杂相.利用Preisach模型得到的结果和实验一致,并在此基础上研究了单场磁后效行为.     

热处理对Ta/Ni0.65Co0.35薄膜微结构和磁电阻性能的影响

选用磁致伸缩系数接近于零的软磁合金Ta/Ni0.65Co0.35作为磁敏感层,研究了热处理对Ta/Ni0.65Co0.35薄膜织构、磁学性能和磁电阻性能的影响.制备了Barber电极结构的磁电阻元件,对磁电阻元件的输出特性进行了测试.结果表明:真空退火可以有效降低薄膜内的应力和杂质缺陷,使晶粒尺寸增大,晶界对传导电子的散射减少,各向异性磁电阻(AMR)值提高;真空磁场退火有利于提高薄膜的单轴各向异性,使薄膜的AMR值和磁传感器元件的灵敏度增加.     

Chemical states of the atoms in magnetic multilayersTa/NiOx/Ni81Fe19/Ta and Co/AlOx/Co

Ta/NiOx/Ni81Fe19/Ta and Co/AiOx/Co multilayers were prepared by rf reactive and dc magnetron sputtering. The exchange coupling field (Hex) and the coercivity (Hc)of NiOx/Ni81Fe19 as a function of the ratio of Ar to O2 during the deposition process were studied. The composition and chemical states at the interface region of NiOx/NiFe were also investigated using the X-ray photoelectron spectroscopy (XPS) and peak decomposition technique. The results show that when the ratio of Ar to O2 is equal to 7 and the argon sputtering pressure is 0.57 Pa, the x value is approximately 1and the valence of nickel is +2. At this point, NiOx is antiferromagnetic NiO and the corresponding Hex is the largest.As the ratio of Ar/O2 deviates from 7, the Hex will decrease due to the presence of magnetic impurities such as Ni+3 or metallic Ni at the interface region of NiOx /NiFe, while the Hc will increase due to the metallic Ni. Al layers in Co/AIOx/Co multilayers were also studied by angle-resolved XPS. Our finding is that the bottom Co could be completely covered by depositing an Al layer about 1.8 nm. The thickness of AIOx was 1.2 nm.     

磁性多层膜Ta/NiO/NiFe/Ta角分辨XPS

磁性多层膜Ta/NiO/NiFe/Ta由磁控溅射方法制备.采用角分辨X射线光电子能谱(XPS)研究了反铁磁(NiO)/铁磁(NiFe)界面.结果表明,在NiO/NiFe界面发生了化学反应: NiO+Fe = Ni+FeO和3NiO+2Fe =3Ni+Fe2O3,此反应深度约为1～1.5 nm.反应产物将影响NiO对NiFe的交换耦合.     

Magnetic property and interface structure of Ta/NiO/NiFe/Ta

Ta/NiO/NiFe/Ta multilayers, utilizing Ta as buffer layer, were prepared by rf reactive and dc magnetron sputtering. The exchange coupling field between NiO and NiFe reached a maximum value of 9.6×10³ A/m at a NiO film thickness of 50 nm. The composition and chemical states at interface region of Ta/NiO/Ta were studied by using the X-ray photoelectron spectroscopy (XPS) and peak decomp- osition technique. The results show that there is an “inter- mixing layer” at the Ta/NiO (and NiO/Ta) interface due to a thermodynamically favorable reaction 2Ta + 5NiO = 5Ni + Ta₂O₅. This interface reaction has a great effect on exchange coupling. The thickness of Ni+NiO estimated by XPS depth- profiles is about 8—10 nm.     

SiO2/Ta interface reaction in magnetic multilayers and its influence on Ta buffer layers

Ta is often used as a buffer layer in magnetic multilayers. In this study, Ta/Ni81Fe19/Ta multilayers were deposited by magnetron sputtering on sing-crystal Si with a 300-nm-thick SiO2 film. The composition and chemical states at the interface region of SiO2/Ta were studied using the X-ray photoelectron spectroscopy (XPS) and peak decomposition technique. The results show that there is an "intermixing layer" at the SiO2/Ta interface due to a thermodynamically favorable reaction: 15 SiO2 + 37 Ta = 6 Ta2O5 + 5 Ta5Si3. Therefore, the Ta buffer layer thickness used to induce NiFe (111) texture increases.     

Chemical states of the atoms in magnetic multilayers Ta/NiO x /Ni81Fe19/Ta and Co/AlO x /Co

Ta/NiO _x /Ni₈₁Fe₁₉/Ta and Co/AlO _x /Co multilayers were prepared by rf reactive and dc magnetron sputtering. The exchange coupling field (H _ex) and the coercivity (H _c) of NiO _x /Ni₈₁Fe₁₉ as a function of the ratio of Ar to O₂ during the deposition process were studied. The composition and chemical states at the interface region of NiO _x /NiFe were also investigated using the X-ray photoelectron spectroscopy (XPS) and peak decomposition technique. The results show that when the ratio of Ar to O₂ is equal to 7 and the argon sputtering pressure is 0.57 Pa, the x value is approximately 1 and the valence of nickel is +2. At this point, NiO _x is antiferromagnetic NiO and the corresponding H_ex is the largest. As the ratio of Ar/O₂ deviates from 7, the H _ex will decrease due to the presence of magnetic impurities such as Ni⁺³ or metallic Ni at the interface region of NiO _x /NiFe, while the H _c will increase due to the metallic Ni. Al layers in Co/AlO _x /Co multilayers were also studied by angle-resolved XPS. Our finding is that the bottom Co could be completely covered by depositing an Al layer about 1.8 nm. The thickness of AlO _x was 1.2 nm.     

不同热处理条件下的Ag/Ni超晶格薄膜层状结构的X射线衍射研究

用Ｘ射线衍射法,对经不同条件热处理后的Ａｇ／Ｎｉ超晶格薄膜的结构进行研究．结果表明,未经热处理的超晶格膜显示良好的人工双元素层调制周期性,且存在［１１１］晶向垂直于膜面的织构．升温时的应变弛豫使超晶格膜的晶格沿垂直于膜面方向发生轻微收缩,直至达平衡态．热处理形成新晶粒,其取向不再严格有序,减弱了薄膜的［１１１］织构．加热所激发的原子长程扩散导致一些元素层厚度减小并趋于消失,而另外的元素层厚度增大,从而使人工调制周期性逐渐被破坏;原始态超晶格膜元素层的厚度越大,则周期结构的热稳定性相应也越高,这部分归因于原子扩散长度与元素层厚度成正比关系     

TiO2/Ta2O5复合薄膜对医用NiTi合金的表面改性

采用 AFM,XRD和 XPS等对 Ni Ti表面离子束合成 Ti O2 /Ta2 O5复合薄膜的表面微观形貌、微结构和表面化学组成进行了表征。同时研究了膜层的力学性能、抗模拟体液腐蚀性和抗凝血性。结果表明 ,适当组成的 Ti O2 /Ta2 O5复合薄膜能显著提高 Ni Ti合金的抗腐蚀性和抗凝血性