| RF-MEMS器件及其关键工艺技术 |
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| 引用本文： | 陈华君,郭东辉.RF-MEMS器件及其关键工艺技术[J].集美大学学报(自然科学版),2005,10(2):114-120. |
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| 作者姓名： | 陈华君 郭东辉 |
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| 作者单位： | 厦门大学物理与机电工程学院,福建,厦门,361005;厦门睿智微电子技术有限公司,福建,厦门,361005;厦门大学物理与机电工程学院,福建,厦门,361005 |
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| 基金项目： | 福建省自然科学基金项目(A0410007) |
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| 摘 要： | 综合介绍目前无线通讯产品中使用的各种类型RF-MEMS器件，统一说明RF-MEMS器件的基本工作原理，并分析RF-MEMS器件加工的关键工艺技术及设计制作时应注意的问题。
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| 关 键 词： | 射频器件 微电子机械系统 RF-MEMS 工艺技术 |
| 文章编号： | 1007-7405(2005)02-0114-07 |
| 修稿时间： | 2004年11月1日 |
RF-MEMS Devices and Its Key Technology |
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| CHEN Hua-Jun,GUO Dong-hui.RF-MEMS Devices and Its Key Technology[J].the Editorial Board of Jimei University(Natural Science),2005,10(2):114-120. |
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| Authors: | CHEN Hua-Jun GUO Dong-hui |
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| Institution: | CHEN Hua-jun1,2,GUO Dong-hui1 |
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| Abstract: | As the wireless communication products is now going on the way of low power d issipation, higher frequency and m iniaturization, m icroelectromechanical system (MEMS) technology becomes one of the key technologies to develop the rad io frequency (RF) devices. This paper is to summarize the various types of RF-MEMS devices which had been used in the wireless communication systems, and detail on the main prin- ciple of these RF-MEMS devices. In order to show the keynotes in the design ofRF-MEMS devices, some of importantRF-MEMS processes are also introduced and their shortages are presented. |
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| Keywords: | RF devices microelectromechanical system RF-MEMS technology |
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