Controllable growth of dielectric/semiconductor integrated films |
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Authors: | YangRong Li Jun Zhu WenBo Luo XingZhao Liu WanLi Zhang |
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Institution: | (1) State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu, 610054, China |
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Abstract: | Currently, electronic information systems are developing quickly towards further miniaturization and monolithic integration
so as to realize smaller volume, higher velocity and lower power consumption. For this purpose, the integration of all sorts
of active devices (mainly fabricated by semiconductors) with passive devices (fabricated by functional materials) is particularly
important and impendent. Therefore, it is necessary to integrate multifunctional oxide dielectrics possessing electric, magnetic,
acoustic, optical and thermal properties characterized by spontaneous polarization with semiconductors bearing the characters
of carrier transportation to form artificial structures via deposition of solid films. This kind of integrated films may have
two characters, i.e., the all-in-one multifunction and modulation of electromagnetic properties by hetero-interface. This
makes it possible to realize monolithic integration of detecting, processing, transmission, executing and storing of electronic
information. Meanwhile, possible integrated coupling effects will be pursued instead of exploring the limited physical properties
of the related materials. In this paper, we put forward a new direction of developing electronic devices with higher performances,
and demonstrate some results concerning our recent research on the interface-controllable integrated growth of dielectrics
and GaN. Recent progresses of the related research in the world are also reviewed.
Supported by the State Key Development Program for Basic Research of China (Grant No. 61363Z01) and National Natural Science
Foundation of China (Grant No. 50772019) |
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Keywords: | thin film integration semiconductor dielectrics pulsed laser deposition |
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