| 微机械音叉陀螺仪的研究 |
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| 引用本文： | 罗晓章,周百令.微机械音叉陀螺仪的研究[J].东南大学学报(自然科学版),1998,28(2):120-123. |
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| 作者姓名： | 罗晓章 周百令 |
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| 作者单位： | 东南大学仪器科学与工程系 |
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| 摘 要： | 微机械音叉陀螺仪是一种用于测量角速度的微型惯性器件，在许多领域都有极其广泛的应用，是当今微米／纳米技术发展的一个主要方向。本文论述其结构组成，分析了其工作机理，探讨了其检测电极的最佳间距，并给出了提高其灵敏度的途径。
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| 关 键 词： | 微机械 音叉陀螺仪 灵敏度 |
Research of Micromechanical Tuning Fork Gyroscope |
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| Luo Xiaozhang,Zhou Bailing,Wang Shourong,Zhang Yan''''e.Research of Micromechanical Tuning Fork Gyroscope[J].Journal of Southeast University(Natural Science Edition),1998,28(2):120-123. |
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| Authors: | Luo Xiaozhang Zhou Bailing Wang Shourong Zhang Yan'e |
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| Abstract: | The micromechanical tuning fork gyroscope is a miniature inertial instrument that is used to detect the angular speed of the moving objects. It will play an important role in many areas, and is the direction of the micro/nanometer technology development. The paper describes its structural components, analyses its principle of operation, and discusses the optimal displacement of its sense electrodes. Finally, the method of improving its sensitivity is given. |
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| Keywords: | micromechanical tuning fork gyroscope sensitivity |
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