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| TiO_2/Cu超晶格结构表征 | |
| 引用本文： | 徐跃,李永华,宫杰.TiO_2/Cu超晶格结构表征[J].吉林大学学报(理学版),2001(3). |
| 作者姓名： | 徐跃 李永华 宫杰 |
| 作者单位： | 1. 吉林大学测试中心, 2. 吉林大学材料科学系, 3. 四平师范学院物理系, |
| 摘 要： | 用磁控溅射方法制备 Ti O2 / Cu超晶格 .通过 X射线衍射和电镜手段对其进行测试 ,利用 X射线傅氏线形分析法对超晶格的微观参数进行表征 ,通过 TEM对超晶格的截面形貌进行观察 ,发现其具有柱状生长结构 . |
| 关 键 词： | 薄膜 超晶格 线形分析 |
Preparation and Structure Characterization of Cu/TiO_2 Superlattice |
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| XU Yue.Preparation and Structure Characterization of Cu/TiO_2 Superlattice[J].Journal of Jilin University: Sci Ed,2001(3). | |
| Authors: | XU Yue |
| Abstract: | Cu/TiO 2 superlattice was prepared via magnetron sputtering method. The superlattice was characterized with X ray diffraction, and the TEM and its micro parameters were investigated through Fourier X ray profile analysis. The cross section TEM images indicated that there was columnar structure in the superlattice. |
| Keywords: | film superlattice profile analysis |
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