| 在不同衬底上用纳米引晶法选择性生长金刚石薄膜 |
| |
| 引用本文： | 杨洁,顾鼎熙,石勇,李迅,王成新,韩永昊,刘洪武.在不同衬底上用纳米引晶法选择性生长金刚石薄膜[J].吉林大学学报(理学版),2000(3). |
| |
| 作者姓名： | 杨洁 顾鼎熙 石勇 李迅 王成新 韩永昊 刘洪武 |
| |
| 作者单位： | 1. 空军长春飞行学院
2. 吉林大学超硬材料国家重点实验室,长春,130023 |
| |
| 基金项目： | 国家自然科学基金! (批准号 :5 963 10 60和 695 760 12 ) |
| |
| 摘 要： | 采用光刻工艺和纳米引晶技术 ,在抛光的单晶 Si衬底上形成带有超细金刚石纳米粉的引晶图案 ,并利用引晶处与抛光 Si处金刚石成核密度的巨大差异 ,在光滑的 Si3N4 和 Mo衬底上实现金刚石薄膜的高选择性生长 .
|
| 关 键 词： | 纳米引晶 金刚石薄膜 选择性生长 |
Selective Growth of Polycrystalline Diamond Film by Selectively Seeding with Nanocrystalline Diamond Powder |
| |
| YANG Jie,GU Ding-xi,SHI Yong,LI Xun,WANG Cheng-xin,HAN Yong-hao,LIU Hong-wu.Selective Growth of Polycrystalline Diamond Film by Selectively Seeding with Nanocrystalline Diamond Powder[J].Journal of Jilin University: Sci Ed,2000(3). |
| |
| Authors: | YANG Jie GU Ding-xi SHI Yong LI Xun WANG Cheng-xin HAN Yong-hao LIU Hong-wu |
| |
| Abstract: | A novel process has been proposed to grow the polycrystalline diamond film selectively by selectively seeding with the diamond powder of 5 nm average size. A high selectivity was achieved in the process, which had an advantage over the conventional SAD method. The process requires only a few steps and avoids the surface defects in the routine process. Moreover, the diamond films were selectively grown on Si 3N 4 and Mo substrates by the new method. |
| |
| Keywords: | seeding with nanocrystalline diamond powder diamond film selective growth |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
|
