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Mechanism and development of dip-pen nanolithography (DPN)
作者姓名:Jiang Hongkui  Lu Shuang
作者单位:浙江师范大学 交通学院
基金项目:Foundation item: The project supported is by Foundation of Education of Zhejiang Province, China (No. 20060470).
摘    要:Dip-pen nanolithography is a new scanning probe lithography (SPL) technique based on atomic force microscopy (AFM) , and now has made a great progress. The process of dip-pen lithography involves the adsorption of ink molecules on AFM tip, the formation of water meniscus, the transport of ink molecules, and diffusion of ink molecules on the substrate. More factors such as temperature, humidity, tip, scanning speed and so on will influence the process of dip-pen lithography. The paper analyzes in detail the mechanism of this technique, introduces synthetically the latest development, including electrochemical DPN, more-mode DPN, multiple DPN, multi-probe array DPN and so on. Finally, the paper describes the characteristics and the application of DPN.

关 键 词:纳米光刻  DPN  机理  周围神经  原子力显微镜  分子吸附  光刻技术  糖尿病
收稿时间:1/2/2008 12:00:00 AM
修稿时间:1/22/2008 4:54:20 PM

Mechanism and development of dip-pen nanolithography (DPN)
Jiang Hongkui,Lu Shuang.Mechanism and development of dip-pen nanolithography (DPN)[J].Engineering Sciences,2008,6(3):45-51.
Authors:Jiang Hongkui and Lu Shuang
Abstract:Dip-pen nanolithography is a new scanning probe lithography (SPL) technique based on atomic force microscopy (AFM), and now has made a great progress. The process of dip pen lithography involves the adsorption of ink molecules on AFM tip, the formation of water meniscus, the transport of ink molecules, and diffusion of ink molecules on the substrate. More factors such as temperature, humidity, tip, scanning speed and so on will influence the process of dip pen lithography. The paper analyzes in detail the mechanism of this technique, introduces synthetically the latest development, including electrochemical DPN, more mode DPN, multiple DPN, multi probe array DPN and so on. Finally, the paper describes the characteristics and the application of DPN.
Keywords:dip-pen  nanolithography  atomic force microscopy  nanofabrication
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