| 氩辉光放电阴极区离子的能量和角分布 |
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| 引用本文： | 王德真,郭宝海.氩辉光放电阴极区离子的能量和角分布[J].大连理工大学学报,1993,33(4):489-494. |
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| 作者姓名： | 王德真 郭宝海 |
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| 作者单位： | 大连理工大学三束材料改性国家重点实验室
(王德真，郭宝海)，大连理工大学三束材料改性国家重点实验室(马腾才) |
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| 摘 要： | 由蒙特卡罗方法模拟离子在氩直流辉光放电阴极位降区的运动，包括了 离子现中性原子的电荷交换碰撞和弹性散射，用到了较精确的依赖于离子能 量的电荷交换和动量输运截面，得到了阴极位降区不同位置离子的能量分布 和角分布．发现：离子由负辉光区向阴极运动过程中，离子能量分布的高能部 分逐渐增大，角分布向小角度部分压缩，阴极位降区的强电场加速和聚焦了 离子．
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| 关 键 词： | 能量分布 辉光放电 氩 蒙特卡罗法 |
Energy and angular distributions of ions in cathode fall of argon glow discharge |
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| Wang Dezhen,Guo Baohai,Ma Tangcai.Energy and angular distributions of ions in cathode fall of argon glow discharge[J].Journal of Dalian University of Technology,1993,33(4):489-494. |
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| Authors: | Wang Dezhen Guo Baohai Ma Tangcai |
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| Institution: | Key National Laboratory of Material Modification by Three Beams |
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| Abstract: | A Monte Carlo simulation method that includes charge exchange and elastic scattering is used to calculate the energy and angular distribution of ions in the cathode fall of a DC argon glow discharge. Cross sections of the charge transfer and the momentum transfer that depend on the ion energy are taken into account precisely. It is found that, as the ions move towards the cathode, the high-energy portion of the ion energy distribution is enhanced gradually and the small-angle portion of the angular distribution increases. A strong field accelerates the ions to higher speed and ensures that more ions move along the lines of force. |
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| Keywords: | energy distribution glow discharge argon Monte Carlo method |
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