用干涉条纹密度确定非球面检测点光源的最佳位置

在对非球面的干涉检测中,记录干涉图的CCD的选型、光路中光学器件的选择和干涉图的分析计算以及检测系统的精度评价等,都与干涉入射点光源和参考点光源的位置直接相关。为了能够准确地预判非球面检测时入射球面光波和参考球面光波的点光源最佳位置,采用计算和分析在点光源与被测非球面反射光波的干涉条纹密度的方法,确定非球面干涉检测时入射球面光波和参考球面光波的点光源的最佳位置。通过上述方法不仅能够确定非球面检测时点光源的最佳位置,还可用于全面地分析干涉条纹密度的分布,并用于制定检测系统CCD等光路元件选型的基本策略,也可用于对非球面检测的调试过程进行理论指导。

Fix Dot Light Sources of Incident Spherical Wave and Reference Spherical Wave in Testing Aspheric Surface by Fringe Density

The positions of dot light source of incident spherical wave and reference spherical wave are directly related to the selection of CCD, optics, analysis of interferogram and the evaluate accuracy of a testing system for aspheric surface. In order to predefine the best position of sources of incident spherical wave and reference spherical wave, a new method is adopted to fix dot light source of spherical wave by calculating and analyzing the fringe density. By using the above method, the best source position of spherical wave not only can be predefined but also the interferogram be fully analyzed, simultaneously the specific strategies of selecting CCD and optics can be determined. The results of the research also can be used as a theoretical guidance debugging in the process of testing aspheric surface.