| 微波ECR等离子体参数测量及分析 |
| |
| 引用本文： | 李海婴. 微波ECR等离子体参数测量及分析[J]. 哈尔滨师范大学自然科学学报, 2001, 17(1): 27-29 |
| |
| 作者姓名： | 李海婴 |
| |
| 作者单位： | 哈尔滨学院 |
| |
| 摘 要： | 利用双探针测试了微波ECR等离子体参数,发现获得大面积均匀等离子体源强烈依赖于轴向磁场梯度,等郭子体参数受气压影响很大,测量结果与理论分析一致。
|
| 关 键 词： | 电子回旋共振 等离子体参数 磁场位形 测量分析 |
| 修稿时间： | 2001-03-06 |
MICROWAVE ECR PLASMA PARAMETER MEASUREMENT AND ANALYSIS Mg:Zn:LiNbO3 |
| |
| Li Haiying. MICROWAVE ECR PLASMA PARAMETER MEASUREMENT AND ANALYSIS Mg:Zn:LiNbO3[J]. Natural Science Journal of Harbin Normal University, 2001, 17(1): 27-29 |
| |
| Authors: | Li Haiying |
| |
| Affiliation: | Harbin Institute |
| |
| Abstract: | Measuring microwave ECR (electron cyclotron resnance) plasma parameters with a double-probe, the author discovered that a large-section uniform plasma soure is deeply dependent on the axial direction magnetic field gradient, the plasma parameters are also influenced by the gas pressure. The measurement results are in accord with theoritical analysing ones. |
| |
| Keywords: | Electron cyclotron resonance Plasma parameter Magnetic field arrangements |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
