| 超净介质中颗粒污染物光学检测技术的进展 |
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| 引用本文： | 王建华,王乃宁. 超净介质中颗粒污染物光学检测技术的进展[J]. 上海理工大学学报, 1995, 0(2) |
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| 作者姓名： | 王建华 王乃宁 |
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| 作者单位： | 华东工业大学动力工程学院 |
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| 摘 要： | 本文对超净介质中颗粒污染物光学检测的基本原理、技术特性、应用范围、技术现状及发展动向作了总体性阐述．
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| 关 键 词： | 超净介质；杂质控制；颗粒；光学测量 |
The development of optical technology on measuring particle impurity in ultrapure medium |
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| Wang Jianhu,Wang Naining. The development of optical technology on measuring particle impurity in ultrapure medium[J]. Journal of University of Shanghai For Science and Technology, 1995, 0(2) |
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| Authors: | Wang Jianhu Wang Naining |
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| Affiliation: | college of Power Engineering ECUT |
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| Abstract: | The rapid development of science and technology and modern industry causes a demand for a higher level of the purity of many mediums, which, in turn, causes a demand for a higher level of the technology of measuring and controlling the impurities in mediums.This paper makes a general review of the basic principle, technical characters, applied fields,technical state and developing tendency of the optical technology of sizing particle impurity in ultrapure mediums. |
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| Keywords: | ultrapure mediums impurity controlling particle optical measuring |
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