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激光束诱导电流谱无损检测技术的应用
引用本文:俞雷鸣,于海春,杨玉军,陈贵宾.激光束诱导电流谱无损检测技术的应用[J].淮阴师范学院学报(自然科学版),2006,5(3):204-207.
作者姓名:俞雷鸣  于海春  杨玉军  陈贵宾
作者单位:1. 江苏省淮安市,质量技术监督局,江苏,淮安,223001
2. 淮阴师范学院,物理与电子学系,江苏省低维材料化学省重点建设实验室,江苏,淮安,223001
基金项目:江苏省教育厅自然科学基金
摘    要:高分辨率、非直接接触的激光束诱导电流谱表征手段成功用于表征HgCdTe光伏型红外探测器单元,获得了HgCdTe光伏型器件单元的几何结构信息,为HgCdTe器件的优化设计提供参考依据.

关 键 词:激光束诱导电流谱  无损检测  p-n结
文章编号:1671-6876(2006)03-0204-04
收稿时间:2006-05-28
修稿时间:2006年5月28日

Characterizing the HgCdTe Photovoltaic Devices by Laser Beam Induced Current Technique
YU Lei-ming,YU Hai-chun,YANG Yu-jun,CHEN Gui-bin.Characterizing the HgCdTe Photovoltaic Devices by Laser Beam Induced Current Technique[J].Journal of Huaiyin Teachers College(Natrual Science Edition),2006,5(3):204-207.
Authors:YU Lei-ming  YU Hai-chun  YANG Yu-jun  CHEN Gui-bin
Abstract:A measurement system of laser beam induced current(LBIC) with high spatial-resolution and without requiring any direct electrical contact to the unit is presented.It has been widely applied to study the electrical non-uniformities at the surface of the semiconductor materials and devices.The line-scanning and mapping profiles of a series of HgCdTe p-n junctions have been demonstrated.The region of p-to-n type conversion by boron ions implantation is larger than the real implanted area.
Keywords:laser beam induced current  non-destructive testing  p-n junctions
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