| 用于高频磁阻抗效应的软磁薄膜研究 |
| |
| 引用本文： | 陈善宝,林更琪,邱进军,张志强. 用于高频磁阻抗效应的软磁薄膜研究[J]. 华中科技大学学报(自然科学版), 1999, 27(1): 37-40 |
| |
| 作者姓名： | 陈善宝 林更琪 邱进军 张志强 |
| |
| 作者单位： | 华中理工大学电子科学与技术系 |
| |
| 摘 要： | 讨论了用于高频磁阻抗效应传感技术的ＮｅＦｅ软磁薄膜制备和薄膜单轴各向异性产生方法及机理．用射频磁控溅射法在几十ｋＡ／ｍ磁场定向下制备出具有一定单轴各向异性的Ｎｉ８１Ｆｅ１９软磁薄膜，并对所测得的薄膜各种磁化曲线进行了分析
|
| 关 键 词： | 软磁薄膜 磁控溅射 磁场定向 高频磁阻抗效应 |
| 修稿时间： | 1998-09-04 |
Research on Soft Magnetic Thin Film Applied to High Frequency Magnetic Impedance (HFMI) Effect |
| |
| Chen Shanbao,Lin Gengqi,Qiu Jinjun,Zhang Zhiqiang. Research on Soft Magnetic Thin Film Applied to High Frequency Magnetic Impedance (HFMI) Effect[J]. JOURNAL OF HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY.NATURE SCIENCE, 1999, 27(1): 37-40 |
| |
| Authors: | Chen Shanbao Lin Gengqi Qiu Jinjun Zhang Zhiqiang |
| |
| Affiliation: | Chen Shanbao Lin Gengqi Qiu Jinjun Zhang Zhiqiang |
| |
| Abstract: | NiFe soft magnetic thin films fabricated for high frequency magnetic impedance effect are discussed. The method used to cause uniaxial anisotropy of films is investigated and its mechanism analyzed. When applied several tens kA/m in plane magnetic field along a specific direction, a soft magnetic thin film with uniaxial anisotropy is obtained. A sort of hysteresises of thin films are measured and analyzed. |
| |
| Keywords: | soft magnetic thin film magnetron sputtering oriented magnetic field high frequency magnetic impedance effect |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
