| 形状记忆合金薄膜微驱动器过程准可控研究 |
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| 引用本文： | 曲炳郡,李路明,张玉玲,王立鼎.形状记忆合金薄膜微驱动器过程准可控研究[J].大连理工大学学报,2001,41(1):64-66. |
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| 作者姓名： | 曲炳郡 李路明 张玉玲 王立鼎 |
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| 作者单位： | 1. 大连理工大学 微机电系统研究中心, 辽宁 大连 116024
2. 中国科学院长春光学精密机械研究所, 吉林 长春 130022 |
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| 基金项目： | 国家自然科学基金资助项目!(E05010703). |
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| 摘 要： | 研究了形状记忆合金（SMA）驱动器的过程不可控及过程准可控输出特性，给出了此类驱动器实现过程准可控的设计思想－－单元互联，及其可控输出位移值与互联单元的一般性关系；对于n个具有双程形状记忆效应的单元互联而成的SMA驱动器，有2^n个可控位移输出。对一类基于单元互联实现变力夹持的SMA薄膜微夹持器进行了理论探讨。
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| 关 键 词： | 形状记忆合金薄膜 微夹持器 过程不可控 过程准可控 单元互联 微驱动材料 |
| 文章编号： | 1000-8608(2001)01-0064-03 |
Quasi process-controllability based on element-interconnection of a SMA thin film microactuator |
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| QU Bing-jun,LI Lu-ming,ZHANG Yu-ling,WANG Li-ding.Quasi process-controllability based on element-interconnection of a SMA thin film microactuator[J].Journal of Dalian University of Technology,2001,41(1):64-66. |
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| Authors: | QU Bing-jun LI Lu-ming ZHANG Yu-ling WANG Li-ding |
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| Institution: | QU Bing-jun1,LI Lu-ming2,ZHANG Yu-ling2,WANG Li-ding1 |
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| Abstract: | Two new concepts which are called process-uncontrollability and quasi process- controllability are presented, and a design idea which is called element-interc onnection used to achieve quasi process-controllability of shape memory alloy ( SMA) actuators is given. Based on this idea, the relationships between controlla ble displacements and coadjacent SMA elements are presented, and a kind of SMA t hin film microtweezer which can adjust its gripping force is investigated. |
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