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| 基于立体成型法的微激励器静态特性分析 | |
| 引用本文： | 于殿泓,郭俊杰,李涤尘,卢秉恒,山本昌彦. 基于立体成型法的微激励器静态特性分析[J]. 西安交通大学学报, 2001, 35(1): 47-50 |
| 作者姓名： | 于殿泓 郭俊杰 李涤尘 卢秉恒 山本昌彦 |
| 作者单位： | 1. 机械与精密仪器学院 2. 机械工程学院 3. 理工学部 |
| 基金项目： | 国家自然科学基金资助 项目(59575071)． |
| 摘 要： | 介绍了一种新型的微细加工方法，即微型立体成型法以及基于这种方法制造微型电容式激励器的工序步骤，详细分析了该激励器在静电力作用下的静态特性，导出了可动极板处于稳定平衡时的条件及在此条件下的线位移范围，给出了驱动电压与可动极板位移量之间的关系曲线，用所制作的微激励器对上述推证结果进行了实验验证。 |
| 关 键 词： | 微激励器 立体成型 静电力 稳定平衡 微机电 |
| 文章编号： | 0253－987X （2001）01-0047-04 |
| 修稿时间： | 2000-06-23 |
Static Characteristics Analysis of Micro-Actuator Basedon Micro-Stereolithography |
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| Yu Dianhong ,Guo Junjie ,Li Dichen ,Lu Bingheng ,Yamamoto Masahiko. Static Characteristics Analysis of Micro-Actuator Basedon Micro-Stereolithography[J]. Journal of Xi'an Jiaotong University, 2001, 35(1): 47-50 | |
| Authors: | Yu Dianhong Guo Junjie Li Dichen Lu Bingheng Yamamoto Masahiko |
| Affiliation: | Yu Dianhong 1,Guo Junjie 1,Li Dichen 2,Lu Bingheng 2,Yamamoto Masahiko 3 |
| Abstract: | Micro stereolithography and the fabrication process of a micro-actuator manufactured by the micro-stereolithography are introduced. The static characteristics of the micro-actuator driven by electrostatic force is analyzed in detail. Stable balance condition of movable plate electrode and range of displacement in the condition are deduced. The relationship between deflection of the movable plate electrode and the electrostatic force is shown. The results deduced by using the micro-actuator is validated. |
| Keywords: | micro-actuator stereolithography electrostatic force stable balance |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ | |