基于半球支承的静电悬浮方法

提出了一种基于半球静电支承的静电悬浮方法,该方法既可任意调节转子与电极之间的间隙,又便于观测转子的摆动情况,从而实现高精度球形转子的平衡测量.通过计算半球静电支承下球形转子与电极之间的间隙,导出了静电力与间隙的关系.在分析了半球静电支承特性的基础上,将其工作状态分为起支和支承2种状态,并设计了相应的数字控制器,保证系统可靠悬浮.试验结果表明,半球静电支承系统能稳定工作,可以满足高精度球形转子平衡测量的要求.

Electrostatic suspension method based on hemisphere bearing

In order to measure the balance of a spherical rotor with high accuracy, an electrostati csuspension method based on hemisphere bearing is presented. The method can adjust the clearance between the rotor and electrodes arbitrarily and observe the swing of the rotor easily. The clearance between the spherical rotor and electrodes is calculated under hemisphere electrostatic suspension and the relationship between the electrostatic force and the clearance is derived. Then, based on analyzing the characteristics of hemisphere electrostatic suspension, the suspension states are divided into initial levitation and suspension phase. Accordingly, the digital controllers are designed to suspend the rotor reliably. Experimental results show that the hemisphere electrostatic suspension system can maintain steady suspension and satisfy the requirements of balance measurement of the spherical rotor with high accuracy.