微纳米压印工艺对PMMA流动填充及保真度的影响

采用有限元软件ANSYS进行数值分析及试验验证,研究工艺参数对PMMA流动填充和图形保真度的影响.选取3个相邻的高度不同的微透镜作为分析模型,选择四边形单元,采用映射的方式划分网格,选取模具上表面节点,施加工作压力载荷.分析微透镜阵列的整体压印效果,从是否大面积完全压印、透镜是否完全填充、透镜表面质量(粗糙度等)、缺陷(气泡、裂纹等)等指标进行考察,选出部分较优工艺参数;与较优工艺参数进行交叉比较,选出最优工艺参数;再以该组工艺参数为试验组,进行重复试验,检验工艺参数的可重复性.

Effect of Micro/Nano Stamping Process Parameters on PMMA Liquid Filling and Fidelity of Graphics

The effect of the process parameters on PMMA liquid filling and fidelity of graphics is studied by using finite element software ANSYS and the experimental verification. Selecting the three adjacent micro lens with different heights as analysis model,choosing quadrilateral element cell shape,with the method of mapping mesh, selecting the mold surface nodes, applying work pressure load. Whole stamping effect of micro lens array is analyzed, whether from large area fully embossed, lens is fully populated, the surface quality of the lens (roughness,etc. ),defect (bubble,crack,etc. ) to examine these aspects,such as the optimal technological parameters are selected. The optimal process parameters are compared,and the optimal process parameters are selected,then taking process parameters in the group as the experimental group,we repeated to test repeatability of process parameters.