| 非晶硅薄膜太阳能电池结构中本征膜的初步研究 |
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| 引用本文： | 龙罗明. 非晶硅薄膜太阳能电池结构中本征膜的初步研究[J]. 湘潭大学自然科学学报, 1987, 0(2) |
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| 作者姓名： | 龙罗明 |
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| 摘 要： | 本文介绍在近代物理实验室现有设备的基础上,利用等离子刻蚀机改装为成膜主机,用射频辉光放电方法制备了本征非晶硅膜,并利用激光喇曼光谱仪等设备进行了初步分析。
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| 关 键 词： | 非晶硅 本征膜 |
Research of the Intrinsic Film in the Amorphous Silicon Film Solar cell |
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| Long Luoming. Research of the Intrinsic Film in the Amorphous Silicon Film Solar cell[J]. Natural Science Journal of Xiangtan University, 1987, 0(2) |
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| Authors: | Long Luoming |
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| Affiliation: | Long Luoming |
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| Abstract: | In thir paper,the r.f.glowdischarge deposition of an intrinsic a-morphous silicon film in reported.The devie were altered by meansof a plasma-etching device.We analysed the properties of the filmby experiment means of the modern physical laboratoy. |
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| Keywords: | amorphous silicon intrinsic film |
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