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紫外LED研究进展
引用本文:李晋闽,闫建昌,郭亚楠,任睿,蔡听松,王军喜.紫外LED研究进展[J].科技导报(北京),2021,39(14):30-41.
作者姓名:李晋闽  闫建昌  郭亚楠  任睿  蔡听松  王军喜
作者单位:1. 中国科学院半导体研究所, 北京 100083;
2. 中国科学院大学材料与光电研究中心, 北京 100049;
3. 半导体照明联合创新国家重点实验室, 北京 100083
基金项目:国家重点研发计划项目(2016YFB0400800)
摘    要: 氮化物紫外LED的发光波长覆盖210~400 nm的紫外波段,可广泛应用于工业、环境、医疗和生化探测等领域。近年来紫外LED的技术水平发展迅速,器件性能不断提升。由于高Al组分AlGaN材料的固有特性,目前深紫外LED的外量子效率和功率效率仍有大量提升空间。综述了近年来AlGaN基紫外LED的研究进展,阐述了限制其性能的AlGaN外延质量、高Al组分AlGaN材料的掺杂效率、紫外LED量子结构、紫外LED光提取效率及可靠性等核心难题以及取得的重要研究进展。预计到2025年,深紫外LED的量产单芯片光输出功率可突破瓦级,功率效率有望提升至20%以上,寿命达到万小时级别。

关 键 词:紫外LED  AlGaN  掺杂  光提取  
收稿时间:2020-11-13

Recent progress of ultraviolet light-emitting diodes
LI Jinmin,YAN Jianchang,GUO Yanan,REN Rui,CAI Tingsong,WANG Junxi.Recent progress of ultraviolet light-emitting diodes[J].Science & Technology Review,2021,39(14):30-41.
Authors:LI Jinmin  YAN Jianchang  GUO Yanan  REN Rui  CAI Tingsong  WANG Junxi
Institution:1. Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China;
2. Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China;
3. State Key Laboratory of Solid State Lighting, Beijing 100083, China
Abstract:The III-nitride based ultraviolet light-emitting diodes (UV LEDs) have tunable emission wavelengths covering a range from 210nm to 400nm, making them suited to be applied in many fields, such as industrial, environmental, medical and biochemical detection fields. Rapid great technical breakthroughs have been made to improve the performance of the AlGaN UV LEDs over the past few years. However, there is still much room for the improvement of the external quantum efficiency and the wall plug efficiency of the deep-UV LEDs due to the intrinsic properties of the Al-rich AlGaN materials. This paper reviews the recent development of the AlGaN UV LEDs, as well as the key challenges to the efficiency improvement, including the epitaxy quality, the doping efficiency, the quantum structure, the light extraction and the reliability, and the effective solutions. It is estimated that by the year 2025, the single-chip light output power of the deep-UV LED will exceed the watt level, the wall plug efficiency is expected to be increased to over 20%, and the lifetime will reach a level of 104 hours.
Keywords:ultraviolet light-emitting diodes  AlGaN  doping  light extraction  
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