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单轴应力锗能带结构研究
引用本文:马建立,张鹤鸣,宋建军,魏群,王晓艳,王冠宇,徐小波. 单轴应力锗能带结构研究[J]. 中国科学:物理学 力学 天文学, 2012, 0(1): 15-21
作者姓名:马建立  张鹤鸣  宋建军  魏群  王晓艳  王冠宇  徐小波
作者单位:西安电子科技大学微电子学院,宽禁带半导体材料与器件教育部重点实验室,西安710071
基金项目:国家部委资助项目(编号:61398,51308040106,9140C090303110C0904); 陕西省自然科学基础研究计划(编号:2010JQ8008)资助项目
摘    要:用形变势理论讨论了单轴〈001〉和〈110〉及〈111〉张/压应力对锗导带各能谷(?能谷、?能谷及L能谷)能级的影响,采用包含自旋-轨道互作用及应力在内的六带k.p微扰法建立了单轴张/压应力作用下锗的价带结构模型,分析了锗价带带边能级随应力的变化情况,获得了锗导带底能谷能级分裂值、价带带边能级分裂值以及禁带宽度随应力的变化关系.量化数据可为单轴应力锗器件及电路的研究与设计提供参考.

关 键 词:单轴应力锗  能带结构  k·p微扰法

Energy-band structure for uniaxial stressed Germanium
MA JianLi *,ZHANG HeMing,SONG JianJun,WEI Qun,WANG XiaoYan,WANG GuanYu&XU XiaoBo. Energy-band structure for uniaxial stressed Germanium[J]. SCIENCE CHINA Physics, Mechanics & Astronomy, 2012, 0(1): 15-21
Authors:MA JianLi *  ZHANG HeMing  SONG JianJun  WEI Qun  WANG XiaoYan  WANG GuanYu&XU XiaoBo
Affiliation:Key Laboratory for Wide Band Gap Semiconductor Materials and Devices of Ministry of Education,School of Microelectronics,Xidian University,Xi'an 710071,China
Abstract:The influence of uniaxial stress along the001,110and111directions to the conduction band(CB)energy valley(Г valley,△ valleys,and L valleys)of Germanium was investigated by deformation potential theory.The valence band(VB)structure model of Germanium in uniaxial stressed was established by using a six-band k.p model and coupled with deformation potential theory,and the variation of valence band edge energy level with stress was analyzed.The uniaxial stress induced band edge structure change,such as CB splitting energy,VB splitting energy,and band-gap were elaborated.The obtained quantitative results can provide reference for the calculation of other physical parameters of uniaxial stressed Germanium.
Keywords:uniaxial stressed Germanium  energy band structure  k.p perturbation method
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