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Preparation and performance of novel LLTO thin film electrolytes for thin film lithium batteries
Authors:RenJie Chen  Wei Liang  HaiQin Zhang  Feng Wu  Li Li
Institution:1. School of Chemical Engineering and Environment, Beijing Key Laboratory of Environmental Science and Engineering, Beijing Institute of Technology, Beijing, 100081, China
2. National Development Center for High Technology Green Materials, Beijing, 100081, China
Abstract:We prepared a series of lithium lanthanum titanate (LLTO) thin film electrolytes by radio frequency (RF) magnetron sputtering using LLTO targets in a N2 atmosphere. We also deposited the LLTO thin films in an Ar atmosphere under a same condition as references for comparison. The microstructure morphology and the composition of the thin films were investigated by X-ray diffraction (XRD), scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS), respectively. Results show that the thin film has an amorphous structure with a uniform surface and it is free of pinholes and cracks. Impedance measurements reveal that the ionic conductivity of the electrolytes is beneficial for all solid lithium batteries dependent on the lithium content at room temperature. We found that the amorphous LLTO thin film performs well and it has potential application in microbatteries for use in microelectronic devices.
Keywords:LLTO thin film electrolytes  RF magnetron sputtering  ionic conductivity  lithium batteries
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