| 三探针法诊断射频低压等离子体电子平均能量 |
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| 引用本文： | 朱文浩,谢鸿,曹明.三探针法诊断射频低压等离子体电子平均能量[J].清华大学学报(自然科学版),1988(5). |
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| 作者姓名： | 朱文浩 谢鸿 曹明 |
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| 作者单位： | 工程力学系
(朱文浩，谢鸿)，工程力学系(曹明) |
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| 摘 要： | 研究电子能量非麦克斯威分布且存在射频干扰下，用三探针诊断低压等离子体电子 平均能量的方法．计算了三探针的理论特性曲线并求得了确定电子平均能量的表达式； 提出了估计电子能量分布特征指数的近似方法：对射频低压氮等离子体，测得了三探针 及双探针的伏安特性曲线，并由此求得了电子平均能量．理论和实验表明．在确定电子 平均能量时，考虑电子能量分布偏离麦克斯威分布的影响是十分必要的。
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| 关 键 词： | 诊断 等离子体 射频等离子体 电子能量 探针 |
Study on Diagnostics of Average Electron Energy in a Low Pressure R. F. Plasma with Triple Probe Method |
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| Zhu Wenhao,Xie Hong,Cao Ming.Study on Diagnostics of Average Electron Energy in a Low Pressure R. F. Plasma with Triple Probe Method[J].Journal of Tsinghua University(Science and Technology),1988(5). |
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| Authors: | Zhu Wenhao Xie Hong Cao Ming |
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| Institution: | Department of Engineering Mechanics |
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| Abstract: | A tripe-probe method is used to diagnose the average electron energy in a radio frequency (rf) plasma, taking account of effects of non-Maxwellian electron energy distribution function (EEDF) and rf voltage in the probe sheath, i.e. the so-called rf disturbance on diagnostics simultaneously. The I--V characteristics of the triple-probe are calculated and a general expression to determine the average electron energy is given; An approach is provided for estimating the characteristic factor involved in EEDF; The I V characteristics are measured for low pressure rf nitrogen plasma with don- ble-probe and triple-probe method and its average electron energy is obtained.Both the theoretical analyses and experiments show that it is necessary to consider the effect of deviation from Maxwellian EEDF on determination of average electron energy of an rf plasma. |
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| Keywords: | diagnostic plasma radio frequency plasma electron energy probe |
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